Integrated Inductors with Magnetic Materials for On-Chip ... - Hot Chips

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Permeability vs. Applied <strong>Magnetic</strong> Field <strong>Magnetic</strong> anisotropy H k has two components: The intrinsic induced anisotropy from the deposition The demagnetizing energy caused by the sample shape
Complex Permeability Model δ = 2ρ ωµ iµ o δ = skin depth ρ = resistivity of magnetic film ω = frequency µ i = relative dc permeability d = film thickness µ = µ i ( 1 2δ ( 1+ j) d tanh + j) d 2δ High resistivity materials are needed to reduce the eddy currents and increase the skin depth. CoZrTa ρ = 100 µΩ-cm
Page 1 and 2: Integrated Inductors with Magnetic
Page 3 and 4: Multi-Core Power Management Voltage
Page 5 and 6: 100~480 MHz Switching Regulator Dis
Page 7 and 8: Package-Integrated VR with Intel ®
Page 9 and 10: RF CMOS Integrated Circuit Inductor
Page 11: Magnetic Hystersis Loops for CoZrTa
Page 15 and 16: Permeability Spectra of CoZrTa Real
Page 17 and 18: Hard Spiral and Transmission Line I
Page 19 and 20: Spiral Inductors with Single Magnet
Page 21 and 22: Magnetic Flux Density At 1GHz Unlam
Page 23 and 24: Hard Easy Spiral and Stripe Inducto
Page 25 and 26: Hard Axis Cross-Sectional Image of
Page 27 and 28: Inductance Modeling of Rectangular
Page 29 and 30: Sheet and Shunt Inductances Sheet i
Page 31 and 32: Analytical Modeling of Q-Factor Thi
Page 33 and 34: Quality Factor of Inductors With La
Page 35: For More Information • IEEE Trans

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