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Integrated Inductors with Magnetic Materials for On-Chip ... - Hot Chips

Integrated Inductors with Magnetic Materials for On-Chip ... - Hot Chips

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Hard<br />

Axis<br />

Cross-Sectional Image of Inductor<br />

in 130 nm 6-level Metal CMOS Process<br />

CoZrTa<br />

Inductor Metal<br />

CoZrTa<br />

Cu (M6)<br />

Cu (M5)<br />

Cu (M4)<br />

Cu (M3)<br />

Cu (M2)<br />

Cu (M1)<br />

<strong>Magnetic</strong><br />

Via

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