Integrated Inductors with Magnetic Materials for On-Chip ... - Hot Chips
Integrated Inductors with Magnetic Materials for On-Chip ... - Hot Chips
Integrated Inductors with Magnetic Materials for On-Chip ... - Hot Chips
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Hard<br />
Axis<br />
Cross-Sectional Image of Inductor<br />
in 130 nm 6-level Metal CMOS Process<br />
CoZrTa<br />
Inductor Metal<br />
CoZrTa<br />
Cu (M6)<br />
Cu (M5)<br />
Cu (M4)<br />
Cu (M3)<br />
Cu (M2)<br />
Cu (M1)<br />
<strong>Magnetic</strong><br />
Via