Integrated Inductors with Magnetic Materials for On-Chip ... - Hot Chips
Integrated Inductors with Magnetic Materials for On-Chip ... - Hot Chips
Integrated Inductors with Magnetic Materials for On-Chip ... - Hot Chips
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Complex Permeability Model<br />
δ =<br />
2ρ<br />
ωµ iµ o<br />
δ = skin depth<br />
ρ = resistivity of magnetic film<br />
ω = frequency<br />
µ i = relative dc permeability<br />
d = film thickness<br />
µ =<br />
µ<br />
i<br />
( 1<br />
2δ ( 1+<br />
j)<br />
d<br />
tanh<br />
+ j)<br />
d 2δ<br />
High resistivity materials<br />
are needed to reduce<br />
the eddy currents and<br />
increase the skin depth.<br />
CoZrTa ρ = 100 µΩ-cm
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