Serie SP Miniature Plane-Mirror Interferometer SP-Series - SIOS ...

Miniaturinterferometer
Miniature Plane-Mirror
mit Planspiegelreflektor
Interferometer
SP-Series
Serie SP

Aufbau und Funktionsweise
Die Miniaturinterferometer mit Planspiegelreflektor der Serie
SP sind Einbaumessgeräte und dienen der Präzisionslängenmessung.
Sie sind geometrisch und funktionell aufgabenspezifisch
anpassbar. Die Miniaturisierung des Sensorkopfes
erlaubt die Anwendung als fest installiertes Messsystem.
Als Messreflektor können Planspiegel oder reflektierende
Oberflächen optischer Qualität verwendet werden. Der
Messreflektor kann im Bereich von Winkelminuten zur
optischen Achse des Messstrahls verkippt werden, ohne dass
die Funktion beeinträchtigt wird. Die Zuführung des Laserlichtes
zum Sensorkopf erfolgt über Lichtwellenleiter (LWL).
Das Miniaturinterferometer wandelt die Messbewegung des
Planspiegels in Richtung der optischen Achse des Messstrahles
in ein Interferenzsignal. Das interferenzoptische Signal wird
zur optoelektronischen Auswerte- und Versorgungs-einheit
übertragen und als Messergebnis zur Verfügung gestellt. Die
Bedienung und Anzeige erfolgt wahlweise über ein separates
Display oder einen PC mit optionaler Software.
Technische Daten
Besondere Merkmale und Vorteile
Längenmesssystem höchster Genauigkeit
einstrahliges Messprinzip minimiert Abbe-Fehler
bei entsprechender Einbaulage
flexibles Einbaumesssystem, kunden-spezifisch
anpassbar
LWL-Einkopplung des Laserlichtes
als Reflektor ist ein Planspiegel bzw. eine
reflektierende Oberfläche direkt verwendbar
entsprechend der Größe des Messreflektors
kann sich das Messobjekt senkrecht zur
Messbewegung bewegen
He-Ne-Laser mit hoher Frequenzstabilität als
Lichtquelle
Korrektur der Umwelteinflüsse auf die
Wellenlänge des Laserlichtes
Material des Sensorkopfes wählbar zwischen
Aluminium, Edelstahl und Invar
Anwendungen
Laserinterferometrisches Präzisionslängenmesssystem
für Messtische, Mikroskoptische,
Positioniertische, Messmaschinen, Werkzeugmaschinen,
Härte- und Materialprüfgeräte als
Einbaumess- oder Kalibriergerät
Ein,- Zwei- und Mehrkoordinatenmessungen
Zweikoordinatenmessungen, z.B. an Planartischen,
durch zwei Sensorköpfe an einer elektronischen
Auswerte- und Versorgungseinheit
Kalibrierung von Längenmessgeräten
Schlagfehlermessungen
Rundlauffehlermessungen
Berührungslose Oberflächenvermessungen
Modell SP 120 Modell SP 2000
100
1 / 0,1
632,8
3 · 10 -7
2000
1 / 0,1
632,8
2 · 10
1
-8
Design and Operation
Our SP-Series miniature plane-mirror interferometers are precision
length measurement instruments designed for incorporation
into customer supplied systems, and are readily adapted to
suit a wide variety of experimental setups and tasks. The
miniaturized sensor head allows their employment as permanently
installed metrological systems.
Planar mirrors or other optical-quality reflective surfaces may be
employed as reflectors on their translating arms, and may be
angularly misaligned by as much as several minutes of arc with
respect to the laser beam without adversely affecting the
operation of the interferometer. The beam from the laser light
source is transmitted to the sensor head by a fiberoptic cable.
The miniature interferometer converts motions of the planar
mirror along the beam axis into optical interference signals that
are transmitted to an optoelectronic signal processing/power
supply unit for processing and output as lengths.
Instrument operation and display of measurement results are
controlled either through a separate keypad/display unit or a
PC running an optional software package.
Technical Data
Messbereich mm
Auflösung nm
Wellenlänge nm
Frequenzstabilität des Lasers (nach der Einlaufzeit)
Einlaufzeit des Lasers min
Arbeitstemperaturbereich °C
Verschiebegeschwindigkeit (maximal) mm/s
Abmessungen Sensorkopf mm
(H x B x T) Elektronische Auswerte- u.
Versorgungseinheit mm
Gewicht Sensorkopf g
Elektronische Auswerte- u.
Versorgungseinheit g
Schnittstellen Standard
Optional
Kabellänge zwischen Sensorkopf und
elektronischer Auswerte- u. Versorgungseinheit m
Spannungsversorgung VAC
Hz
Major Performance Features
Ultraprecise length measurement instruments
Single beam design minimizes Abbe aberraions
when correctly aligned
Versatile instruments for incorporation into
customer supplied systems, readily adapted to
suit a wide variety of tasks
Fiberoptic coupled sensor head
A planar mirror or other reflective surface may
be employed as the moving reflector
The specimen can be moved perpendicular to
the direction of measurement depending on
the measuring reflector dimensions
Employs frequency-stabilized HeNe lasers as
light sources
Corrects for variations in laser wavelength
caused by ambient conditions
Sensor head material selectable between
aluminium, stainless steel and Invar
Applications
Precision laser interferometric length measurement
systems for incorporation into, or calirating,
translation stages, microscope stages,
positioning stages, metrological equipment,
machine tools, or hardness testing and mateials
testing equipment
Single/dual/multi-axis coordinate measureents
Two-coordinate measurements, e.g. on planar
stages, by using two sensor heads connected to
an electronic analysis and supply unit
Calibrating length measurement
instrumentation
Runout and eccentricity measurements
Noncontact surface profiling
Model SP 120 Model SP 2000
100
1 / 0.1
0.1
632.8
3 · 10 10…20
15…30
800
36 x 70 x 70
150 x 450 x 400
200
9.500
RS 232 C, USB
Digitales 32-bit Parallelinterface
Digitale Inkrementalsignale (TTL-Pegel)
Analoge Inkrementalsignale (± 1Vpp) 3, optional bis 10
100…240
47…60
SIOS Meßtechnik GmbH
Am Vogelherd 46
D-98693 Ilmenau
Tel: +49-(0)3677-64470 E-mail: info@sios.de
Fax: +49-(0)3677-64478 URL: http://www.sios.de
Wir beraten Sie gern:
Änderungen vorbehalten. 11/2008
-7
2,000
1 / 0.1
0.1
632.8
2 · 10
1
-8
Design and Operation
Our SP-Series miniature plane-mirror interferometers are precision
length measurement instruments designed for incorporation
into customer supplied systems, and are readily adapted to
suit a wide variety of experimental setups and tasks. The
miniaturized sensor head allows their employment as permanently
installed metrological systems.
Planar mirrors or other optical-quality reflective surfaces may be
employed as reflectors on their translating arms, and may be
angularly misaligned by as much as several minutes of arc with
respect to the laser beam without adversely affecting the
operation of the interferometer. The beam from the laser light
source is transmitted to the sensor head by a fiberoptic cable.
The miniature interferometer converts motions of the planar
mirror along the beam axis into optical interference signals that
are transmitted to an optoelectronic signal processing/power
supply unit for processing and output as lengths.
Instrument operation and display of measurement results are
controlled either through a separate keypad/display unit or a
PC running an optional software package.
Technical Data
Measurement range mm
Metric resolution, standard nm
optionally nm
Nominal laser wavelength nm
Laser frequency stability (after warm-up)
Laser warm-up period min
Operating temperature range °C
Maximum mirror translation rate mm/s
Dimensions (H x W x D):
Sensor head mm
Optoelectronic signal-processing/power-supply unit mm
Mass:
Sensor head g
Optoelectronic signal-processing/power-supply unit g
Interface: standard
optionally
Fiberoptic cable length m
Supply-line voltage VAC
Supply-line frequency Hz
Major Performance Features
Ultraprecise length measurement instruments
Single beam design minimizes Abbe aberraions
when correctly aligned
Versatile instruments for incorporation into
customer supplied systems, readily adapted to
suit a wide variety of tasks
Fiberoptic coupled sensor head
A planar mirror or other reflective surface may
be employed as the moving reflector
The specimen can be moved perpendicular to
the direction of measurement depending on
the measuring reflector dimensions
Employs frequency-stabilized HeNe lasers as
light sources
Corrects for variations in laser wavelength
caused by ambient conditions
Sensor head material selectable between
aluminium, stainless steel and Invar
Applications
Precision laser interferometric length measurement
systems for incorporation into, or calirating,
translation stages, microscope stages,
positioning stages, metrological equipment,
machine tools, or hardness testing and mateials
testing equipment
Single/dual/multi-axis coordinate measureents
Two-coordinate measurements, e.g. on planar
stages, by using two sensor heads connected to
an electronic analysis and supply unit
Calibrating length measurement
instrumentation
Runout and eccentricity measurements
Noncontact surface profiling
Model SP 120 Model SP 2000
100
1 / 0.1
0.1
632.8
3 · 10
10 - 20
15 - 30
800
36 x 70 x 70
150 x 450 x 400
200
9,500
RS 232 C, USB
Digital 32-bit parallel interface
Digital increment signals (TTL)
Analog increment signals (±1 Vpp)
3, optionally up to 10
100 - 240
47 - 60
SIOS Meßtechnik GmbH
Am Vogelherd 46
D-98693 Ilmenau, Germany
Tel: +49-(0)3677-64470 E-mail: info@sios.de
Fax: +49-(0)3677-64478 URL: http://www.sios.de
We reserve the right to alter products and their specifications without prior notice.
Your contact for further information:
11/2008
-7
2,000
1 / 0.1
0.1
632.8
2 · 10
1
-8
Design and Operation
Our SP-Series miniature plane-mirror interferometers are precision
length measurement instruments designed for incorporation
into customer supplied systems, and are readily adapted to
suit a wide variety of experimental setups and tasks. The
miniaturized sensor head allows their employment as permanently
installed metrological systems.
Planar mirrors or other optical-quality reflective surfaces may be
employed as reflectors on their translating arms, and may be
angularly misaligned by as much as several minutes of arc with
respect to the laser beam without adversely affecting the
operation of the interferometer. The beam from the laser light
source is transmitted to the sensor head by a fiberoptic cable.
The miniature interferometer converts motions of the planar
mirror along the beam axis into optical interference signals that
are transmitted to an optoelectronic signal processing/power
supply unit for processing and output as lengths.
Instrument operation and display of measurement results are
controlled either through a separate keypad/display unit or a
PC running an optional software package.
Technical Data
Measurement range mm
Metric resolution, standard nm
optionally nm
Nominal laser wavelength nm
Laser frequency stability (after warm-up)
Laser warm-up period min
Operating temperature range °C
Maximum mirror translation rate mm/s
Dimensions (H x W x D):
Sensor head mm
Optoelectronic signal-processing/power-supply unit mm
Mass:
Sensor head g
Optoelectronic signal-processing/power-supply unit g
Interface: standard
optionally
Fiberoptic cable length m
Supply-line voltage VAC
Supply-line frequency Hz
Major Performance Features
Ultraprecise length measurement instruments
Single beam design minimizes Abbe aberraions
when correctly aligned
Versatile instruments for incorporation into
customer supplied systems, readily adapted to
suit a wide variety of tasks
Fiberoptic coupled sensor head
A planar mirror or other reflective surface may
be employed as the moving reflector
The specimen can be moved perpendicular to
the direction of measurement depending on
the measuring reflector dimensions
Employs frequency-stabilized HeNe lasers as
light sources
Corrects for variations in laser wavelength
caused by ambient conditions
Sensor head material selectable between
aluminium, stainless steel and Invar
Applications
Precision laser interferometric length measurement
systems for incorporation into, or calirating,
translation stages, microscope stages,
positioning stages, metrological equipment,
machine tools, or hardness testing and mateials
testing equipment
Single/dual/multi-axis coordinate measureents
Two-coordinate measurements, e.g. on planar
stages, by using two sensor heads connected to
an electronic analysis and supply unit
Calibrating length measurement
instrumentation
Runout and eccentricity measurements
Noncontact surface profiling
Model SP 120 Model SP 2000
100
1 / 0.1
0.1
632.8
3 · 10 10 - 20
15 - 30
800
36 x 70 x 70
150 x 450 x 400
200
9,500
RS 232 C, USB
Digital 32-bit parallel interface
Digital increment signals (TTL)
Analog increment signals (±1 Vpp)
3, optionally up to 10
100 - 240
47 - 60
SIOS Meßtechnik GmbH
Am Vogelherd 46
D-98693 Ilmenau, Germany
Tel: +49-(0)3677-64470 E-mail: info@sios.de
Fax: +49-(0)3677-64478 URL: http://www.sios.de
We reserve the right to alter products and their specifications without prior notice.
Your contact for further information:
11/2008
-7
2,000
1 / 0.1
0.1
632.8
2 · 10
1
-8
Measurement range mm
Metric resolution, standard nm
optionally nm
Nominal laser wavelength nm
Laser frequency stability (after warm-up)
Laser warm-up period min
Operating temperature range °C
Maximum mirror translation rate mm/s
Dimensions (H x W x D):
Sensor head mm
Optoelectronic signal-processing/power-supply unit mm
Mass:
Sensor head g
Optoelectronic signal-processing/power-supply unit g
Interface: standard
optionally
Fiberoptic cable length m
Supply-line voltage VAC
Supply-line frequency Hz
10 - 20
15 - 30
800
36 x 70 x 70
150 x 450 x 400
200
9,500
RS 232 C, USB
Digital 32-bit parallel interface
Digital increment signals (TTL)
Analog increment signals (±1 Vpp)
3, optionally up to 10
100 - 240
47 - 60
SIOS Meßtechnik GmbH
Am Vogelherd 46
D-98693 Ilmenau, Germany
Tel: +49-(0)3677-64470 E-mail: info@sios.de
Fax: +49-(0)3677-64478 URL: http://www.sios.de
Your contact for further information:
We reserve the right to alter products and their specifications without prior notice. 11/2008