Spectroscopic Ellipsometry Workshop - L.O.T.-Oriel

Spectroscopic Ellipsometry Workshop
July 17th, 2012
Fondazione Istituto Italiano di Tecnologia, Genova
Morning Session: Introduction to Spectroscopic Ellipsometry
This session will give a detailed introduction to the operational principles, instrumental configurations and
application examples of Spectroscopic Ellipsometry. Software data analysis and system demonstration will give
the participants the opportunity to see these principles applied to real samples.
Program
9.45-10.15 Registration
10.15-10.30 S. Schutzmann – LOT Oriel srl Welcome and introduction
10.30-11.00 S. Schutzmann – LOT Oriel srl Theory and fundamental of Spectroscopic Ellipsometry
11.00-11.15 Coffee break
11.15-11.45 S. Schutzmann – LOT Oriel srl Introduction to data analysis
11.45-12.15 T. Wagner – LOT Oriel GmbH Overview of Spectroscopic Ellipsometry applications
12.15-13.00 T. Wagner – LOT Oriel GmbH Instrumentation and measurement demonstration
13.00-14.00 Lunch break
Afternoon session: Woollam users seminar
The seminar will gather part of the Woollam user community and give the opportunity to exchange
experiences and present applications of spectroscopic ellipsometry over a broad range of research topics.
Participants of the morning session and users who are not presenting talks are welcome to attend.
The seminar is chaired by Prof. Maurizio Canepa from Physics Department of University of Genova.
Program
14.00-14.25 M. Canepa – Università di
Genova
14.15-14.35 L. Brigo – Università di
Padova
Welcome and introduction
Ellipsometric characterization of Sol-Gel thin films: porosity
and applications to plasmonic devices
14.35-14.55 E. Taralli – INRIM Torino Spectral ellipsometry measurements of silicon photodiodes
for predictable quantum efficient detectors
14.55-15.15 E. Cianci – CNR IMM, Agrate In situ spectroscopic ellipsometry as a diagnostic for thin
Brianza
oxide films grown by atomic layer deposition
15.15-15.30 Coffee break
15.30-15.50 G. Ruffato – Veneto Plasmonic crystals for sensing applications: spectroscopic
Nanotech
ellipsometry and comparison with numerical simulations
15.50-16.10 R. De Angelis – Università Spectroscopic Ellipsometry: a tool for the characterization of
di Roma Tor Vergata
innovative materials for optoelectronics at the NeMO Lab
16.10-16.30 C. Toccafondi – Università Spectroscopic ellipsometry measurements on nano-granular
di Genova
TiO2 thin films
16.30-16.50 A. Sytchkova – ENEA CR Advanced transparent conductors: Conductivity profiling of
Casaccia
TCO ultrathin layers and Characterization of metal-dielectric
electrods
The language of the workshop is English.
The workshop (both morning and afternoon session) is free of charge but it requires registration due to
limited availability of places.
In order to register, please fill in the form on Page 2 and fax it to:+39 065010389.
You may also send your contact information electronically to schutzmann@lot-oriel.it
www.lot-oriel.it

Spectroscopic Ellipsometry Workshop
July 17th, 2012
Fondazione Istituto Italiano di Tecnologia, Genova
Date
July 17th, 2012
Venue Contact information
Fondazione Istituto Italiano di Tecnologia,
Via Morego 30 -16163 Genova
Stefano Schutzmann
LOT Oriel Italia srl
Tel.: +39 06 5004204
Fax.: +39 06 5010389
e-mail: schutzmann@lot-oriel.it
The workshop (both morning and afternoon session) is free of charge but it requires registration due to
limited availability of places
I would like to register for the Workshop
Morning session Afternoon session
(please indicate which session you wish to attend, whether morning, afternoon or both)
Name:___________________________________________________
Institution:_______________________________________________
Address:_________________________________________________
Phone:__________________________________________________
e-mail:__________________________________________________
Signature:_______________________________________________
In order to register, please fill in the form and fax it to:+39 065010389.
or email it to: schutzmann@lot-oriel.it
www.lot-oriel.it