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Lumped and distributed element design for LTCC radio filters

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<strong>Lumped</strong> <strong>and</strong> <strong>distributed</strong> <strong>element</strong> <strong>design</strong> <strong>for</strong> <strong>LTCC</strong> <strong>radio</strong> <strong>filters</strong><br />

Jens Müller<br />

Micro Systems Engineering GmbH & Co.<br />

Schlegelweg 17<br />

D-95180 Berg/Germany<br />

Phone: +49 9293 78 64<br />

E-Mail: jmueller@mse.biotronik-erlangen.de<br />

Claude Guichaoua<br />

Solectron Brittany/France<br />

Route de Quimper<br />

F-29590 Pont-de-Buis/France<br />

Phone : +33 2 98 81 33 04<br />

E-Mail : ClaudeGuichaoua@bty.slr.com<br />

Abstract<br />

In the perspective of the 3 rd generation of mobile systems (3G) <strong>and</strong> in the current evolution of 2G,<br />

multi-mode wireless terminals are developing to provide more services <strong>for</strong> users. Modes of interest are<br />

GSM 900, GSM 1800, IS95, TETRAPOL, TETRA, WB-CDMA, APCO 25, DIIS <strong>and</strong> GPS.<br />

Very tight technical requirements (TETRAPOL, APCO 25), along with integration constraints (multimode<br />

capability in a user-friendly cabinet) <strong>and</strong> price pressure (-10% a year), make the new plat<strong>for</strong>m a<br />

challenge. In that context, smart implementation of wide-b<strong>and</strong> VCOs <strong>and</strong> tuneable <strong>filters</strong> are<br />

compulsory to meet market requirements.<br />

<strong>LTCC</strong> is a convenient technology <strong>for</strong> the manufacturing of b<strong>and</strong> pass <strong>filters</strong> <strong>for</strong> a b<strong>and</strong>width of 380<br />

MHz to 2400 MHz as required by <strong>radio</strong> telephony systems [1,2]. For lumped <strong>element</strong> <strong>filters</strong>, the best<br />

choice turns out to be a hybrid solution with a mix of soldered components on top of the package <strong>and</strong><br />

embedded components. Components which would require a large area or too many layers to be<br />

integrated in <strong>LTCC</strong> can be selected as SMDs.<br />

Due to the relatively low frequency <strong>and</strong> there<strong>for</strong>e “long” wavelength, the <strong>distributed</strong> <strong>filters</strong> require<br />

considerable space to be realised in <strong>LTCC</strong> having a permittivity of about 6-10. A combline filter <strong>design</strong><br />

was found to be the best in terms of size <strong>and</strong> electrical per<strong>for</strong>mance.<br />

Demonstrators were built up <strong>and</strong> the results of the S-Parameter measurement will be discussed.<br />

Key words: <strong>LTCC</strong>, RF-<strong>filters</strong>, passive integration, miniaturisation<br />

Introduction<br />

<strong>LTCC</strong> technology provides three major<br />

benefits <strong>for</strong> filter <strong>design</strong>s:<br />

first, the ceramic nature of the substrate<br />

allows the implementation of resonators of<br />

significant quality factor;<br />

second, the hybrid assembly process<br />

allows the mounting of a variable capacitor<br />

<strong>and</strong> varactor diodes to provide the tuning<br />

of this type of <strong>filters</strong> as well as a BGA<br />

connection to the mother board;<br />

third, the implementation of embedded<br />

passive components like resistors,<br />

capacitors <strong>and</strong> coils, along with. the fact<br />

that this technology allows a multilayer<br />

<strong>design</strong> which is nearly unlimited (20 layer<br />

substrates have been already successfully<br />

manufactured), allows an outst<strong>and</strong>ing level<br />

of integration.<br />

The paper demonstrates two<br />

approaches <strong>for</strong> <strong>LTCC</strong> filter modules – lumped<br />

<strong>and</strong> <strong>distributed</strong> <strong>element</strong> <strong>design</strong>s. The<br />

development of the lumped BGA-filter module<br />

started with the electrical filter <strong>design</strong>. After<br />

electrical optimisation on the schematic level<br />

(including feasibility <strong>for</strong> integrated<br />

components) the <strong>element</strong>s of the circuit were<br />

analysed <strong>for</strong> size <strong>and</strong> layers required to make<br />

them in <strong>LTCC</strong>. Optimisation was focussed on<br />

the size of the filter package. The maximum<br />

layer count defined was 8. The embedded<br />

components (capacitors <strong>and</strong> inductors) were<br />

<strong>design</strong>ed based on equations developed<br />

earlier [3]. Fine tuning of the component<br />

per<strong>for</strong>mance including interference <strong>and</strong><br />

coupling effects was made with electrical field<br />

simulation.


Distributed <strong>filters</strong> were <strong>design</strong>ed <strong>and</strong><br />

optimised using a 3D electromagnetic field<br />

solver. These <strong>filters</strong> were not limited to 8 layers<br />

to allow a more flexible <strong>design</strong>.<br />

The demonstrators were realised with<br />

DuPont 951 material using silver pastes.<br />

Solder paste stencil printing was used <strong>for</strong><br />

bumping. After SMD mounting, the <strong>filters</strong> were<br />

singulated <strong>and</strong> assembled on a test board <strong>for</strong><br />

electrical characterization.<br />

Passive Integration<br />

Passive integration is defined as a<br />

combination of circuit carrier (substrate, board)<br />

with passive components like resistors,<br />

capacitors <strong>and</strong> inductors in one technology.<br />

Passive <strong>element</strong>s may be integrated on the<br />

surface or embedded in a multilayer structure<br />

of the substrate. The goal is to achieve:<br />

Reduced module sizes<br />

Lower costs (component reduction)<br />

Improved electrical <strong>and</strong> thermal<br />

per<strong>for</strong>mance<br />

Higher reliability (reduced number of I/O)<br />

<strong>LTCC</strong>-resistors are achieved by<br />

printing a pattern with a specific resistor paste.<br />

These pastes are available from 1 Ohm/sq. to<br />

> 10 MOhm/sq. Due to printing <strong>and</strong> other<br />

process <strong>and</strong> material tolerances, these<br />

resistors need to be trimmed. There<strong>for</strong>e,<br />

precise resistors are placed on the surface of<br />

the substrate <strong>for</strong> accessing them by laser. For<br />

lower requirements on the tolerance (e.g.<br />

> 25%) resistors can be embedded in the<br />

<strong>LTCC</strong> substrate. This can be useful <strong>for</strong> buried<br />

absorbers or internal heaters [4]. Embedded<br />

resistors may be trimmed to a desired value by<br />

high-voltage-pulse-trimming [5]. This method is<br />

very paste <strong>and</strong> <strong>design</strong> dependent.<br />

Fig. 1: Inductor <strong>design</strong>s <strong>for</strong> <strong>LTCC</strong><br />

Inductors in <strong>LTCC</strong> are made of line<br />

<strong>element</strong>s which <strong>for</strong>m a spiral or a helix. The<br />

inductance is a function of numerous<br />

parameters like number of windings, tape<br />

thickness, position to the ground plane, line<br />

width etc. Fig. 1 shows typical <strong>design</strong>s <strong>for</strong><br />

<strong>LTCC</strong> inductors. Useful inductance values <strong>for</strong><br />

printed RF-coils are in the range of 1…100nH.<br />

Capacitors can be <strong>design</strong>ed as<br />

interdigital (planar comb structure) or as plate<br />

capacitors (Fig. 2). They are simple to<br />

integrate since they are printed together with<br />

the conductor line pattern. The capacitance is<br />

a function of permittivity, plate area, distance<br />

between plates <strong>and</strong> number of plates (<strong>for</strong> a<br />

multilayer capacitor). Using the tape as<br />

dielectrics between the plates limits the useful<br />

range from 0.2 ….10pF. These capacitors are<br />

compatible with RF-requirements in terms of<br />

self resonance frequency <strong>and</strong> quality. Higher<br />

capacitance densities can only be achieved by<br />

inserting a special high-k-material between the<br />

plates [6]. Due to printing accuracy <strong>and</strong> lot to<br />

lot variation, a tolerance of about > 15% is<br />

achievable. These materials show also a poor<br />

dielectric loss behaviour which makes filter<br />

<strong>design</strong>s with high selectivity impossible. These<br />

materials were mainly developed <strong>for</strong><br />

decoupling capacitors or similar applications.<br />

Fig. 2: Multilayer plate capacitor<br />

For microwave frequencies however,<br />

passive integration is not limited to the lumped<br />

passive components mentioned above.<br />

Structures made of line <strong>element</strong>s are used to<br />

create <strong>filters</strong>, resonators, couplers etc.<br />

Depending on the line type chosen, these<br />

structures are on the surface (microstrip line)<br />

or embedded between ground planes<br />

(stripline). The latter provides reduced<br />

interactions with neighbouring components<br />

due to the complete shielding. The size of<br />

these components is related to the signal<br />

wavelength. For frequencies above 20 GHz<br />

such <strong>filters</strong> become small. In the frequency<br />

b<strong>and</strong> of interest here, they are rather large <strong>and</strong><br />

there<strong>for</strong>e not suited <strong>for</strong> high integration. The<br />

advantages of line or <strong>distributed</strong> <strong>filters</strong> are the<br />

low insertion loss <strong>and</strong> the good selectivity.<br />

General filter <strong>design</strong><br />

The <strong>LTCC</strong> <strong>filters</strong> specifications were<br />

defined from a complete <strong>radio</strong> architecture<br />

study based on a multi-mode architecture


covering both professional <strong>and</strong> public market.<br />

According to st<strong>and</strong>ard constraints (UMTS,<br />

TETRAPOL,…) the global <strong>radio</strong> architecture<br />

was defined including 1dB compression point<br />

requirements, Mixer image rejection, Mixer<br />

harmonics, Local Oscillators leakage filtering,<br />

noise dimensioning, inter-modulation requirements<br />

<strong>and</strong> filtering budget.<br />

<strong>Lumped</strong> <strong>element</strong> filter <strong>design</strong><br />

The general flow <strong>for</strong> the filter <strong>design</strong> is<br />

shown in Fig. 3. Designing a filter starts with<br />

the system requirements mentioned above. In<br />

our case the filter <strong>design</strong> <strong>and</strong> it’s optimisation<br />

was per<strong>for</strong>med by GENESYS 1 .<br />

SMD selection<br />

(RF-properties<br />

from vendor)<br />

System<br />

Specification<br />

Electrical filter<br />

synthesis, <strong>design</strong><br />

& optimisation<br />

Critical component<br />

analysis/feasibility<br />

(sensitivity)<br />

Component<br />

partitioning<br />

SMT/embedded<br />

Single component<br />

<strong>design</strong><br />

Single component<br />

verification by<br />

3D-simulation<br />

Placement in<br />

module<br />

Module verification<br />

by mixed 3D- <strong>and</strong><br />

"Black Box"<br />

simulation<br />

Finalise Layout<br />

Filter type,<br />

order<br />

estimated<br />

properties<br />

(e.g. quality)<br />

layer count,<br />

thickness,<br />

estim. area<br />

Component<br />

modification<br />

n<br />

correct<br />

behavior?<br />

y<br />

Placement<br />

modification<br />

correct<br />

behavior?<br />

Fig. 3: Design flow <strong>for</strong> filter development<br />

1 Courtesy of EAGLEWARE Inc<br />

n<br />

y<br />

Ideal components are used <strong>for</strong> the first<br />

approximation (Fig. 4). In the second step,<br />

typical <strong>element</strong> properties like losses, self<br />

resonance frequency etc. are added <strong>and</strong><br />

optimisation is repeated. Critical components<br />

can be traced by a tolerance sensitivity<br />

analysis showing the highest impact to the<br />

overall behaviour, which is also a measure <strong>for</strong><br />

manufacturability.<br />

Fig. 4: Example of filter schematic<br />

Next, the schematic is divided into<br />

integrated components <strong>and</strong> SMDs (e.g. actives<br />

<strong>for</strong> tunable <strong>filters</strong> or large capacitors). With a<br />

coarse <strong>design</strong> of the embedded components<br />

based on library <strong>element</strong>s or semi-empirical<br />

equations a first placement study <strong>and</strong> size<br />

estimation can be derived. If the area of the<br />

module is much larger than the area <strong>for</strong> the<br />

SMDs on top, some of the large integrated<br />

components should be changed to a SMD-type<br />

to get an optimum in module size (Fig. 5).<br />

Large values as SMD<br />

Fig. 5: Component partitioning<br />

After partitioning the “fine” <strong>design</strong> of<br />

embedded components is done. There are<br />

many parameters which can be adversely<br />

varied like plate area versus number of layers<br />

<strong>for</strong> a capacitor or number of turns versus coil<br />

radius <strong>for</strong> inductors. Optimisation of these<br />

<strong>design</strong>s can be either driven by size<br />

constraints or costs (e.g. number of layers).<br />

The physical dimensions of each component<br />

are obtained from semi-empirical equations or<br />

known similar <strong>element</strong>s which are already<br />

available in a data base. A library with<br />

measured or simulated electrical parameters<br />

helps to reduce the <strong>design</strong> time <strong>and</strong> increases<br />

the confidence in the <strong>design</strong>. New components<br />

should be optimised or verified by a 3dimensional<br />

electrical simulation until they<br />

show the correct behaviour (Fig. 6).


Fig. 6: Simulation structure of a 3D coil<br />

S11<br />

Fig. 7: Coil simulation results (S11, S21)<br />

up to 6 GHz<br />

The <strong>design</strong>ed <strong>LTCC</strong>-components are<br />

then arranged according to their interconnections.<br />

Symmetries in the schematic<br />

should also lead to symmetries in the placement<br />

to obtain equal conditions.<br />

Finally, a module simulation including<br />

electrical models of the SMDs, the embedded<br />

components, all connections <strong>and</strong> the module<br />

interface (e.g. solder bumps) helps to find out<br />

possible problems due to parasitic effects like<br />

cross talk or mutual inductivity. Process or<br />

material tolerances are used to assess<br />

repeatability <strong>and</strong> manufacturability. However,<br />

complex modules may be still too much <strong>for</strong><br />

simulation programs despite the increasing<br />

computing power.<br />

Fig. 8: 3D-structure of the module<br />

S21<br />

S11, S21[dB]<br />

0<br />

-20<br />

-40<br />

-60<br />

- 7µm<br />

-80<br />

0 400 800 1200 1600<br />

Frequency [Mhz]<br />

+ 7µm<br />

Fig. 9: Influence of tape thickness<br />

variation on the frequency<br />

response<br />

Distributed filter <strong>design</strong><br />

Based on the specifications from the<br />

general filter <strong>design</strong>, the synthesis of the<br />

<strong>distributed</strong> <strong>filters</strong> was per<strong>for</strong>med using<br />

GENESYS software 1 (M/FILTER module).<br />

Combline <strong>and</strong> hairpin topologies were selected<br />

due to their easy implementation <strong>and</strong><br />

integration in <strong>LTCC</strong> technology. The number of<br />

poles, the trans<strong>for</strong>mation functions (Tchebychev<br />

or Elliptic) were defined in order to meet<br />

the specifications.<br />

The initial layout was implemented in<br />

IE3D 2 software <strong>for</strong> electromagnetic simulations<br />

<strong>and</strong> optimisation in terms of space <strong>and</strong><br />

per<strong>for</strong>mance. Additionally, manufacturing<br />

constraints <strong>and</strong> tolerances as material thickness<br />

were taken into account in the <strong>design</strong><br />

optimisation, in order to improve manufacturing<br />

yield.<br />

Fig. 10: Combline filter structure (top <strong>and</strong><br />

bottom ground planes not<br />

shown)<br />

2 ZELAND Software Inc


S11, S21 [dB]<br />

0,000<br />

-10,000<br />

-20,000<br />

-30,000<br />

-40,000<br />

1,9 1,95 2 2,05 2,1 2,15 2,2 2,25 2,3<br />

frequency [GHz]<br />

Fig. 11: Simulation results <strong>for</strong> the combline<br />

filter<br />

<strong>LTCC</strong> filter realisation<br />

Both introduced <strong>filters</strong> were<br />

manufactured using DuPont Greentape 951.<br />

Though, the lumped <strong>element</strong> harmonic filter<br />

uses only 6 tape layers, it was made of 8<br />

layers to allow other filter solutions on the<br />

same test coupon. The two additional layers<br />

were provided with feed-through vias <strong>for</strong><br />

connecting the solder bumps of the BGA-type<br />

module. Due to the required thickness of the<br />

combline structure, this filter was made of 14<br />

layers. The conductor material applied was Ag<br />

to maintain very low conductive losses.<br />

After <strong>LTCC</strong>-processing, all modules<br />

were solder bumped using a stencil printing<br />

technique <strong>and</strong> reflow. The bump pitch is<br />

800 µm with a bump diameter of about<br />

300 µm. Additional 0402-SMT components<br />

were assembled on the harmonic filter<br />

modules prior to singulation from the panel.<br />

Fig. 12: Combline filter module<br />

A test PCB (Fig. 14) with 50calibration<br />

structures <strong>and</strong> SMA-connectors<br />

was used to measure the scattering<br />

parameters with a network analyzer (HP<br />

8753C).<br />

Fig. 13: Completed harmonic filter<br />

Fig. 14: RF-Test-PCB with mounted<br />

<strong>filters</strong><br />

Measurement results are shown in<br />

Figs. 15/16. The harmonic filter behaviour<br />

differs from the predicted per<strong>for</strong>mance<br />

according to the simulations. The main<br />

changes are the decreased stop frequency<br />

<strong>and</strong> the attenuation in the stop b<strong>and</strong>. The<br />

<strong>for</strong>mer leads also to a larger attenuation in the<br />

pass b<strong>and</strong>. A first analysis revealed a<br />

dominating influence of the inductors self<br />

resonance frequency <strong>and</strong> additional parasitic<br />

<strong>element</strong>s associated with the mounted SMDs.<br />

A detailed investigation is to follow.<br />

A slightly higher attenuation was<br />

obtained in the pass b<strong>and</strong> of the combline<br />

filter. This may be attributed to the AgPd-top<br />

<strong>and</strong> –bottom ground metallisation (higher Rsq.).<br />

However, the overall prediction of the filter<br />

behaviour is in good agreement with the test<br />

results (Fig. 16). For a first estimation of<br />

production tolerances, several <strong>filters</strong> have<br />

been measured <strong>and</strong> plotted in the same<br />

diagram. Fig. 17 shows data from 4 different<br />

<strong>filters</strong> from the same manufacturing lot. The<br />

filter to filter dispersion is very low, verifying<br />

the constant layer thickness (material


tolerances) <strong>and</strong> the precise stacking alignment<br />

(manufacturing tolerances).<br />

Fig. 15: Measured S-parameters of the<br />

harmonic filter<br />

dB<br />

0,000<br />

-10,000<br />

-20,000<br />

-30,000<br />

-40,000<br />

1,9 1,95 2 2,05 2,1 2,15 2,2 2,25 2,3<br />

frequency [GHz]<br />

S11[dB]<br />

S21 [dB]<br />

S11 [dB] sim<br />

S21 [dB] sim<br />

Fig. 16: Measured vs. simulated Sparameters<br />

<strong>for</strong> the combline filter<br />

Fig. 17: Measured S-Parameters of 4<br />

combline <strong>filters</strong><br />

Summary <strong>and</strong> conclusions<br />

B<strong>and</strong> pass <strong>filters</strong> <strong>for</strong> RF-applications in<br />

the frequency range from 380 MHz to 2.4 GHz<br />

have been <strong>design</strong>ed <strong>and</strong> manufactured using<br />

<strong>LTCC</strong> technology. Distributed <strong>filters</strong> (line<br />

coupled) have the disadvantage of size in the<br />

frequency range considered. The combline<br />

<strong>design</strong> offers the smallest footprint. Due to the<br />

well defined structures <strong>and</strong> boundary<br />

conditions of line <strong>filters</strong>, simulation results were<br />

in very good agreement with the measured<br />

data.<br />

<strong>Lumped</strong> <strong>element</strong> <strong>filters</strong> using<br />

embedded inductors <strong>and</strong> capacitors allow<br />

highly integrated <strong>design</strong>s. Mixing external<br />

SMDs with buried components permits very<br />

small module dimensions. However, mixed<br />

component <strong>design</strong>s are difficult to simulate<br />

accurately. Interactions between embedded<br />

<strong>element</strong>s <strong>and</strong> external components may<br />

become a dominating factor in the electrical<br />

function. The frequency behaviour of the<br />

harmonic filter realised showed large<br />

deviations from the simulated one. Reasons<br />

<strong>for</strong> this will be investigated by sub-structure<br />

measurements. Based on these data, a new,<br />

more realistic model will be established.<br />

Acknowledgements<br />

The authors would like to thank the<br />

colleagues from the Technical University of<br />

Ilmenau <strong>for</strong> the support in measuring the<br />

structures. The work carried out in the project<br />

Multi-Modules is funded by the EU within the<br />

program IST under the project number 1999-<br />

20260.<br />

References<br />

[1] N.N.: “Passive Pack in more Per<strong>for</strong>mance”,<br />

Microwave Engineering Europe, June 2002, pp. 15-<br />

18.<br />

[2] L. Devlin, G. Pearson, J. Pittcock, B. Hunt:<br />

“RF <strong>and</strong> Microwave Component Development”,<br />

Proceedings 38 th IMAPS Nordic Conference,<br />

Oslo/Norway, 2001.<br />

[3] J. Müller, H. Thust: “3D-Integration of<br />

Passive RF-Components in <strong>LTCC</strong>”, Proceedings of<br />

the Pan Pacific Conference, Maui/Hawaii, Febr.<br />

1997.<br />

[4] DuPont Thick Film News: “Highlyintegrated<br />

mm-wave modules use <strong>LTCC</strong> <strong>and</strong><br />

metallised plastic covers,” DuPont Horizons, No. 18,<br />

Dec. 2001.<br />

[5] W. Ehrhardt, H. Thust.: “Trimming of buried<br />

RuO2-based Thick Film Resistors in Multilayer<br />

Technology (<strong>LTCC</strong>) by Energy of High Voltage<br />

Pulses”, Proceedings of the 38th IMAPS Nordic<br />

Conference, Oslo, Sept. 2001.<br />

[6] J. Müller, D. Josip: “Integrated Capacitors<br />

using <strong>LTCC</strong>”, Microtech 2002, 29./30.01.2002,<br />

Manchester/UK

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