system and circuit design for a capacitive mems gyroscope - Aaltodoc

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6.1.4 Direct Excitation of Secondary Resonator . . . . . . . . . . . 102 6.1.5 Variation of Middle Electrode Biasing Voltage . . . . . . . . 103 6.1.6 Cross-Coupling in Electronics . . . . . . . . . . . . . . . . . 103 6.2 Effects of Synchronous Demodulation . . . . . . . . . . . . . . . . . 104 6.3 Effects of Quadrature Compensation . . . . . . . . . . . . . . . . . . 106 6.4 Effects of Temperature . . . . . . . . . . . . . . . . . . . . . . . . . 108 6.5 Discussion . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 109 7 Capacitive Sensor Readout 111 7.1 Effects of Electrostatic Forces . . . . . . . . . . . . . . . . . . . . . 113 7.1.1 Spring Softening . . . . . . . . . . . . . . . . . . . . . . . . 114 7.1.2 Nonlinear Electrostatic Forces . . . . . . . . . . . . . . . . . 115 7.1.3 Pull-In . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 115 7.2 Continuous-Time Front-Ends . . . . . . . . . . . . . . . . . . . . . . 116 7.2.1 Resonance Frequency Operation . . . . . . . . . . . . . . . . 116 7.2.2 Modulation to a Higher Frequency . . . . . . . . . . . . . . . 121 7.3 Switched-Capacitor Discrete-Time Front-Ends . . . . . . . . . . . . . 124 7.3.1 Voltage Amplifiers . . . . . . . . . . . . . . . . . . . . . . . 125 7.3.2 Noise Bandwidth-Limited Discrete-Time Circuits . . . . . . . 133 7.3.3 Electromechanical ΣΔ Loops . . . . . . . . . . . . . . . . . . 136 7.3.4 Other Switched-Capacitor Front-Ends . . . . . . . . . . . . . 138 7.4 Discussion . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 139 8 Implementation 141 8.1 Sensor Element . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 141 8.2 System Design . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 144 8.2.1 Sensor Readout and Angular Velocity Detection . . . . . . . . 146 8.2.2 Clocking Scheme and Synchronous Demodulation . . . . . . 147 8.2.3 Primary Resonator Excitation . . . . . . . . . . . . . . . . . 152 8.2.4 Quadrature Compensation . . . . . . . . . . . . . . . . . . . 153 8.2.5 System Start-Up . . . . . . . . . . . . . . . . . . . . . . . . 153 8.3 Sensor Readout Electronics . . . . . . . . . . . . . . . . . . . . . . . 154 8.3.1 Sensor Front-End . . . . . . . . . . . . . . . . . . . . . . . . 154 8.3.2 High-Pass Filtering . . . . . . . . . . . . . . . . . . . . . . . 164 8.3.3 Signal Level Normalization . . . . . . . . . . . . . . . . . . 167 8.3.4 Low-Pass Filtering . . . . . . . . . . . . . . . . . . . . . . . 169 8.3.5 Bandpass ΣΔ ADCs . . . . . . . . . . . . . . . . . . . . . . 173 8.4 Other Analog Circuit Blocks . . . . . . . . . . . . . . . . . . . . . . 175 8.4.1 Phase-Locked Loop and Reference Clock Generation . . . . . 175 ix
x 8.4.2 High-Voltage DAC . . . . . . . . . . . . . . . . . . . . . . . 178 8.4.3 Charge Pumps . . . . . . . . . . . . . . . . . . . . . . . . . 179 8.4.4 Phase Shifter . . . . . . . . . . . . . . . . . . . . . . . . . . 181 8.4.5 Drive-Level DAC . . . . . . . . . . . . . . . . . . . . . . . . 182 8.5 Digital Signal Processing . . . . . . . . . . . . . . . . . . . . . . . . 183 8.5.1 Downconversion, Decimation, and Phase Correction . . . . . 183 8.5.2 Controllers . . . . . . . . . . . . . . . . . . . . . . . . . . . 184 8.6 Experimental Results . . . . . . . . . . . . . . . . . . . . . . . . . . 186 8.6.1 Sensor Readout . . . . . . . . . . . . . . . . . . . . . . . . . 186 8.6.2 Phase Error Correction . . . . . . . . . . . . . . . . . . . . . 187 8.6.3 Quadrature Signal Compensation . . . . . . . . . . . . . . . 191 8.6.4 Zero-Rate Output . . . . . . . . . . . . . . . . . . . . . . . . 193 8.6.5 System Performance . . . . . . . . . . . . . . . . . . . . . . 198 9 Conclusions and Future Work 203 Bibliography 206 A Effect of Nonlinearities 221 B Effect of Mechanical-Thermal Noise 227 C Parallel-Plate Actuator with Voltage Biasing 231 D Noise Properties of SC Readout Circuits with CDS 233 E Photograph of the Sensor Element 239 F Microphotograph of the Implemented ASIC 241
Page 1 and 2: TKK Dissertations 116 Espoo 2008 SY
Page 3 and 4: Distribution: Helsinki University o
Page 6: VÄITÖSKIRJAN TIIVISTELMÄ TEKNILL
Page 9 and 10: ii introduced on a more general lev
Page 11 and 12: iv Muut tarvittavat piirilohkot - k
Page 13 and 14: vi I would like to express my grati
Page 15: viii 2.4.3 Single- and Two-Chip Imp
Page 19 and 20: xii ΔVDC ε0 εr ζI, ζQ ηI, ηQ
Page 21 and 22: xiv ω0y ωc ωcw ωe ωexc ωUGF
Page 23 and 24: xvi Cn,sw,rms COX CP Cpar Input-ref
Page 25 and 26: xviii G V/Ω G V/x G V/y G y/Ω G y
Page 27 and 28: xx Iin,sec Ileak In-phase component
Page 29 and 30: xxii RB RCOMP Rcorr Reff R f RGM Re
Page 31 and 32: xxiv Vin,sec,de(t) Output of the se
Page 33 and 34: xxvi AGC Automatic Gain Control ALC
Page 35 and 36: xxviii ICMR Input Common-Mode Range
Page 37 and 38: xxx VRG Vibrating Ring Gyroscope XO
Page 39 and 40: 2 Introduction with more details in
Page 41 and 42: 4 Introduction effect couples vibra
Page 43 and 44: 6 Introduction mary resonator excit
Page 46 and 47: Chapter 2 Micromechanical Gyroscope
Page 48 and 49: 2.1 Operation of a Vibratory Microg
Page 60 and 61: 2.2 Mechanical-Thermal Noise 23 2.1
Page 62 and 63: 2.3 Excitation and Detection 25 req
Page 64 and 65: 2.4 Manufacturing Technologies 27 b
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2.4 Manufacturing Technologies 29 E
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2.5 Published Microgyroscopes 31 2.
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2.5 Published Microgyroscopes 33 gy
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2.5 Published Microgyroscopes 35 te
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2.5 Published Microgyroscopes 37 th
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2.5 Published Microgyroscopes 39 el
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2.5 Published Microgyroscopes 41 ar
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2.6 Commercially Available Microgyr
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1) User-selectable 2) Specified for
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12) Device has both analog and digi
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Chapter 3 Synchronous Demodulation
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3.1 Demodulation in Ideal Case 51 3
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3.3 Secondary Resonator Transfer Fu
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3.4 Nonlinearities in Displacement-
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3.5 Mechanical-Thermal Noise 63 Fig
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3.7 Discussion 65 non-idealities we
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68 Primary Resonator Excitation dis
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70 Primary Resonator Excitation The
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72 Primary Resonator Excitation and
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74 Primary Resonator Excitation 4.2
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76 Primary Resonator Excitation * H
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78 Primary Resonator Excitation dis
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80 Primary Resonator Excitation res
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82 Primary Resonator Excitation DAC
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84 Primary Resonator Excitation ac
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86 Compensation of Mechanical Quadr
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Figure 5.6 A feedback loop with Σ
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Chapter 6 Zero-Rate Output The zero
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6.1 Sources of Zero-Rate Output 99
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6.2 Effects of Synchronous Demodula
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6.3 Effects of Quadrature Compensat
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6.5 Discussion 109 source in the el
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112 Capacitive Sensor Readout Typic
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114 Capacitive Sensor Readout 7.1.1
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116 Capacitive Sensor Readout stati
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118 Capacitive Sensor Readout corre
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120 Capacitive Sensor Readout examp
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122 Capacitive Sensor Readout large
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124 Capacitive Sensor Readout DC an
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126 Capacitive Sensor Readout (a)
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128 Capacitive Sensor Readout In th
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130 Capacitive Sensor Readout suffi
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132 Capacitive Sensor Readout (a)
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134 Capacitive Sensor Readout negli
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136 Capacitive Sensor Readout reset
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138 Capacitive Sensor Readout incre
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140 Capacitive Sensor Readout is co
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142 Implementation such a way that
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144 Implementation 8.2 System Desig
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146 Implementation 8.2.1 Sensor Rea
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148 Implementation together with th
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150 Implementation approach require
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152 Implementation used for clock g
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154 Implementation Because of the d
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156 Implementation plied from the C
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158 Implementation of a PMOS transi
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160 Implementation R eff (MΩ) 1000
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162 Implementation R eff (MΩ) 1000
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164 Implementation effective resist
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166 Implementation is applied to th
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168 Implementation ther differences
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170 Implementation (a) (b) (c) V in
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172 Implementation V inp V inn V C2
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174 Implementation (a) -z -2 z -1 1
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Figure 8.19 Schematic of the implem
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178 Implementation teresis are equa
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180 Implementation From the silicon
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182 Implementation V inp V inn C 1p
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184 Implementation as an XOR operat
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186 Implementation triggered by the
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188 Implementation Θ 1 (°) 2.5 2
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190 Implementation R.m.s. noise (dB
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192 Implementation Quadrature outpu
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194 Implementation Signal (dBFS)
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196 Implementation itor towards gro
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198 Implementation Finally, the mea
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200 Implementation Root Allan varia
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202 Implementation Technology Table
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204 Conclusions and Future Work usi
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Bibliography [1] H. C. Nathanson an
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Bibliography 209 [20] L. Aaltonen,
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Bibliography 211 [45] J. M. Bustill
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Bibliography 213 [68] B. V. Amini,
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Bibliography 215 [88] S. R. Zarabad
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Bibliography 217 [113] Z. Y. Chang
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Bibliography 219 [138] ——, “N
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Appendix A Effect of Nonlinearities
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+ 3ABD · sin((ω0x − 2ωΩ)t + 2
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+ 3BC2 · cos((3ω0x + ωΩ)t − T
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Appendix B Effect of Mechanical-The
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lowing an identical path, the power
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232 Parallel-Plate Actuator with Vo
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234 Noise Properties of SC Readout
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Page 275 and 276:
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Appendix F Microphotograph of the I
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system and circuit design for a capacitive mems gyroscope - Aaltodoc

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