system and circuit design for a capacitive mems gyroscope - Aaltodoc

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PTAT Proportional-to-Absolute Temperature PZT Lead Zirconate Titanate Q Quadrature component r.m.s. Root-Mean-Square RC Resistor-Capacitor RIE Reactive Ion Etching SBB Self-Balancing Bridge SC Switched-Capacitor SEM Scanning Electron Microscope Si Silicon Si3N4 Silicon Nitride SiGe Silicon-Germanium SiO2 Silicon Dioxide SNR Signal-to-Noise Ratio SOI Silicon-on-Insulator SPI Serial Peripheral Interface SQNR Signal-to-Quantization Noise Ratio S.T. Self-Test SW Switch THD Total Harmonic Distortion USB Upper Sideb<strong>and</strong> V Voltage VCO Voltage-Controlled Oscillator VGA Variable-Gain Amplifier VHDL VHSIC Hardware Description Language VHSIC Very High-Speed Integrated Circuit xxix
xxx VRG Vibrating Ring Gyroscope XOR Exclusive-Or ZnO Zinc Oxide ZOH Zero-Order Hold ZRO Zero-Rate Output
Page 1 and 2: TKK Dissertations 116 Espoo 2008 SY
Page 3 and 4: Distribution: Helsinki University o
Page 6: VÄITÖSKIRJAN TIIVISTELMÄ TEKNILL
Page 9 and 10: ii introduced on a more general lev
Page 11 and 12: iv Muut tarvittavat piirilohkot - k
Page 13 and 14: vi I would like to express my grati
Page 15 and 16: viii 2.4.3 Single- and Two-Chip Imp
Page 17 and 18: x 8.4.2 High-Voltage DAC . . . . .
Page 19 and 20: xii ΔVDC ε0 εr ζI, ζQ ηI, ηQ
Page 21 and 22: xiv ω0y ωc ωcw ωe ωexc ωUGF
Page 23 and 24: xvi Cn,sw,rms COX CP Cpar Input-ref
Page 25 and 26: xviii G V/Ω G V/x G V/y G y/Ω G y
Page 27 and 28: xx Iin,sec Ileak In-phase component
Page 29 and 30: xxii RB RCOMP Rcorr Reff R f RGM Re
Page 31 and 32: xxiv Vin,sec,de(t) Output of the se
Page 33 and 34: xxvi AGC Automatic Gain Control ALC
Page 35: xxviii ICMR Input Common-Mode Range
Page 39 and 40: 2 Introduction with more details in
Page 41 and 42: 4 Introduction effect couples vibra
Page 43 and 44: 6 Introduction mary resonator excit
Page 46 and 47: Chapter 2 Micromechanical Gyroscope
Page 48 and 49: 2.1 Operation of a Vibratory Microg
Page 60 and 61: 2.2 Mechanical-Thermal Noise 23 2.1
Page 62 and 63: 2.3 Excitation and Detection 25 req
Page 64 and 65: 2.4 Manufacturing Technologies 27 b
Page 66 and 67: 2.4 Manufacturing Technologies 29 E
Page 68 and 69: 2.5 Published Microgyroscopes 31 2.
Page 70 and 71: 2.5 Published Microgyroscopes 33 gy
Page 72 and 73: 2.5 Published Microgyroscopes 35 te
Page 74 and 75: 2.5 Published Microgyroscopes 37 th
Page 76 and 77: 2.5 Published Microgyroscopes 39 el
Page 78 and 79: 2.5 Published Microgyroscopes 41 ar
Page 80 and 81: 2.6 Commercially Available Microgyr
Page 82 and 83: 1) User-selectable 2) Specified for
Page 84 and 85: 12) Device has both analog and digi
Page 86 and 87:
Chapter 3 Synchronous Demodulation
Page 88 and 89:
3.1 Demodulation in Ideal Case 51 3
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3.3 Secondary Resonator Transfer Fu
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Page 96 and 97:
Page 98 and 99:
3.4 Nonlinearities in Displacement-
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3.5 Mechanical-Thermal Noise 63 Fig
Page 102:
3.7 Discussion 65 non-idealities we
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68 Primary Resonator Excitation dis
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70 Primary Resonator Excitation The
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72 Primary Resonator Excitation and
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74 Primary Resonator Excitation 4.2
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76 Primary Resonator Excitation * H
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78 Primary Resonator Excitation dis
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80 Primary Resonator Excitation res
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82 Primary Resonator Excitation DAC
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84 Primary Resonator Excitation ac
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86 Compensation of Mechanical Quadr
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Page 127 and 128:
Page 129 and 130:
Figure 5.6 A feedback loop with Σ
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Page 134 and 135:
Chapter 6 Zero-Rate Output The zero
Page 136 and 137:
6.1 Sources of Zero-Rate Output 99
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Page 140 and 141:
Page 142 and 143:
6.2 Effects of Synchronous Demodula
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6.3 Effects of Quadrature Compensat
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6.5 Discussion 109 source in the el
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112 Capacitive Sensor Readout Typic
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114 Capacitive Sensor Readout 7.1.1
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116 Capacitive Sensor Readout stati
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118 Capacitive Sensor Readout corre
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120 Capacitive Sensor Readout examp
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122 Capacitive Sensor Readout large
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124 Capacitive Sensor Readout DC an
Page 163 and 164:
126 Capacitive Sensor Readout (a)
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128 Capacitive Sensor Readout In th
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130 Capacitive Sensor Readout suffi
Page 169 and 170:
132 Capacitive Sensor Readout (a)
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134 Capacitive Sensor Readout negli
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136 Capacitive Sensor Readout reset
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138 Capacitive Sensor Readout incre
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140 Capacitive Sensor Readout is co
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142 Implementation such a way that
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144 Implementation 8.2 System Desig
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146 Implementation 8.2.1 Sensor Rea
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148 Implementation together with th
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150 Implementation approach require
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152 Implementation used for clock g
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154 Implementation Because of the d
Page 193 and 194:
156 Implementation plied from the C
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158 Implementation of a PMOS transi
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160 Implementation R eff (MΩ) 1000
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162 Implementation R eff (MΩ) 1000
Page 201 and 202:
164 Implementation effective resist
Page 203 and 204:
166 Implementation is applied to th
Page 205 and 206:
168 Implementation ther differences
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170 Implementation (a) (b) (c) V in
Page 209 and 210:
172 Implementation V inp V inn V C2
Page 211 and 212:
174 Implementation (a) -z -2 z -1 1
Page 213 and 214:
Figure 8.19 Schematic of the implem
Page 215 and 216:
178 Implementation teresis are equa
Page 217 and 218:
180 Implementation From the silicon
Page 219 and 220:
182 Implementation V inp V inn C 1p
Page 221 and 222:
184 Implementation as an XOR operat
Page 223 and 224:
186 Implementation triggered by the
Page 225 and 226:
188 Implementation Θ 1 (°) 2.5 2
Page 227 and 228:
190 Implementation R.m.s. noise (dB
Page 229 and 230:
192 Implementation Quadrature outpu
Page 231 and 232:
194 Implementation Signal (dBFS)
Page 233 and 234:
196 Implementation itor towards gro
Page 235 and 236:
198 Implementation Finally, the mea
Page 237 and 238:
200 Implementation Root Allan varia
Page 239 and 240:
202 Implementation Technology Table
Page 241 and 242:
204 Conclusions and Future Work usi
Page 244 and 245:
Bibliography [1] H. C. Nathanson an
Page 246 and 247:
Bibliography 209 [20] L. Aaltonen,
Page 248 and 249:
Bibliography 211 [45] J. M. Bustill
Page 250 and 251:
Bibliography 213 [68] B. V. Amini,
Page 252 and 253:
Bibliography 215 [88] S. R. Zarabad
Page 254 and 255:
Bibliography 217 [113] Z. Y. Chang
Page 256 and 257:
Bibliography 219 [138] ——, “N
Page 258 and 259:
Appendix A Effect of Nonlinearities
Page 260 and 261:
+ 3ABD · sin((ω0x − 2ωΩ)t + 2
Page 262 and 263:
+ 3BC2 · cos((3ω0x + ωΩ)t − T
Page 264 and 265:
Appendix B Effect of Mechanical-The
Page 266:
lowing an identical path, the power
Page 269 and 270:
232 Parallel-Plate Actuator with Vo
Page 271 and 272:
234 Noise Properties of SC Readout
Page 273 and 274:
Page 275 and 276:
Page 278 and 279:
Appendix F Microphotograph of the I
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