system and circuit design for a capacitive mems gyroscope - Aaltodoc

14 Micromechanical Gyroscopes
for Very High-Speed Integrated Circuit. AMS stands for Analog and Mixed-Signal
extensions). By writing an equation for x based on the block diagram, it can be verified
that the model corresponds to Eq. (2.6).
F
1/m
x 1
s
x
−D/m
−k/m
Figure 2.3 A model of a resonator.
2.1.2 Ideal 2-Degree-of-Freedom Mechanical Resonator in Inertial
Frame of Reference
The preceding analysis can be easily extended to a 2-DoF resonator in an inertial frame
of reference. A schematic drawing of such a system is shown in Fig. 2.4.
k xx
D xx
kyy
m
D yy
Figure 2.4 A 2-DoF mechanical resonator.
In the figure, the four rollers are used to symbolize the fact that when the mass m is
moving in the x-direction, the y-directional spring and damper kyy and Dyy have no ef-
1
s
y
z
x
x