system and circuit design for a capacitive mems gyroscope - Aaltodoc

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D/A Digital-to-Analog xxvii dc Direct Current; general symbol for time-constant electri- DIV Divider cal signal such as current or voltage DNL Differential Nonlinearity DoF Degree(s) of Freedom DRIE Deep Reactive Ion Etching DSP Digital Signal Processing EoM Equation of Motion ESC Electronic Stability Control ESD Electrostatic Discharge FDDA Fully Differential Difference Amplifier FFT Fast Fourier Transformation FIR Finite Impulse Response FPGA Field-Programmable Gate Array FS Full-Scale GPS Global Positioning System HARPSS High Aspect-Ratio Combined Poly- and Single-Crystal Silicon HP High-Pass HPF High-Pass Filter HSG-IMIT Hahn-Schickard-Gesellschaft, Institut für Mikro- und In- formationstechnik HV High-Voltage I Integrator controller, realized by an integrator; in-phase component; current IC Integrated Circuit
xxviii ICMR Input Common-Mode Range INL Integral Nonlinearity LP Low-Pass LPF Low-Pass Filter LSB Lower Sideband; Least Significant Bit LV Low-Voltage MEMS Micro-Electro-Mechanical System MM Micromachining, micromechanics MOS Metal-Oxide-Semiconductor MOSFET Metal-Oxide-Semiconductor Field-Effect Transistor MOSFET-C MOSFET-Capacitor, circuit topology to implement a con- tinuous-time integrator MRC MOS Resistive Circuit MV Medium Voltage NL Noise-Shaping Loop NMOS N-type MOS transistor OSR Oversampling Ratio OTA Operational Transconductance Amplifier P Proportional controller, realized by a gain PCB Printed Circuit Board PFD Phase-Frequency Detector PI Proportional-Integratorcontroller, a controller formed by a sum of P and I controllers PID Proportional-Integrator-Differentiator controller, a con- PLL Phase-Locked Loop PMOS P-type MOS transistor troller formed by a sum of P, I, and D controllers
Page 1 and 2: TKK Dissertations 116 Espoo 2008 SY
Page 3 and 4: Distribution: Helsinki University o
Page 6: VÄITÖSKIRJAN TIIVISTELMÄ TEKNILL
Page 9 and 10: ii introduced on a more general lev
Page 11 and 12: iv Muut tarvittavat piirilohkot - k
Page 13 and 14: vi I would like to express my grati
Page 15 and 16: viii 2.4.3 Single- and Two-Chip Imp
Page 17 and 18: x 8.4.2 High-Voltage DAC . . . . .
Page 19 and 20: xii ΔVDC ε0 εr ζI, ζQ ηI, ηQ
Page 21 and 22: xiv ω0y ωc ωcw ωe ωexc ωUGF
Page 23 and 24: xvi Cn,sw,rms COX CP Cpar Input-ref
Page 25 and 26: xviii G V/Ω G V/x G V/y G y/Ω G y
Page 27 and 28: xx Iin,sec Ileak In-phase component
Page 29 and 30: xxii RB RCOMP Rcorr Reff R f RGM Re
Page 31 and 32: xxiv Vin,sec,de(t) Output of the se
Page 33: xxvi AGC Automatic Gain Control ALC
Page 37 and 38: xxx VRG Vibrating Ring Gyroscope XO
Page 39 and 40: 2 Introduction with more details in
Page 41 and 42: 4 Introduction effect couples vibra
Page 43 and 44: 6 Introduction mary resonator excit
Page 46 and 47: Chapter 2 Micromechanical Gyroscope
Page 48 and 49: 2.1 Operation of a Vibratory Microg
Page 60 and 61: 2.2 Mechanical-Thermal Noise 23 2.1
Page 62 and 63: 2.3 Excitation and Detection 25 req
Page 64 and 65: 2.4 Manufacturing Technologies 27 b
Page 66 and 67: 2.4 Manufacturing Technologies 29 E
Page 68 and 69: 2.5 Published Microgyroscopes 31 2.
Page 70 and 71: 2.5 Published Microgyroscopes 33 gy
Page 72 and 73: 2.5 Published Microgyroscopes 35 te
Page 74 and 75: 2.5 Published Microgyroscopes 37 th
Page 76 and 77: 2.5 Published Microgyroscopes 39 el
Page 78 and 79: 2.5 Published Microgyroscopes 41 ar
Page 80 and 81: 2.6 Commercially Available Microgyr
Page 82 and 83: 1) User-selectable 2) Specified for
Page 84 and 85:
12) Device has both analog and digi
Page 86 and 87:
Chapter 3 Synchronous Demodulation
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3.1 Demodulation in Ideal Case 51 3
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3.3 Secondary Resonator Transfer Fu
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Page 96 and 97:
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3.4 Nonlinearities in Displacement-
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3.5 Mechanical-Thermal Noise 63 Fig
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3.7 Discussion 65 non-idealities we
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68 Primary Resonator Excitation dis
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70 Primary Resonator Excitation The
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72 Primary Resonator Excitation and
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74 Primary Resonator Excitation 4.2
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76 Primary Resonator Excitation * H
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78 Primary Resonator Excitation dis
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80 Primary Resonator Excitation res
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82 Primary Resonator Excitation DAC
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84 Primary Resonator Excitation ac
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86 Compensation of Mechanical Quadr
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Page 127 and 128:
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Figure 5.6 A feedback loop with Σ
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Page 134 and 135:
Chapter 6 Zero-Rate Output The zero
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6.1 Sources of Zero-Rate Output 99
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Page 142 and 143:
6.2 Effects of Synchronous Demodula
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6.3 Effects of Quadrature Compensat
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6.5 Discussion 109 source in the el
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112 Capacitive Sensor Readout Typic
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114 Capacitive Sensor Readout 7.1.1
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116 Capacitive Sensor Readout stati
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118 Capacitive Sensor Readout corre
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120 Capacitive Sensor Readout examp
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122 Capacitive Sensor Readout large
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124 Capacitive Sensor Readout DC an
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126 Capacitive Sensor Readout (a)
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128 Capacitive Sensor Readout In th
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130 Capacitive Sensor Readout suffi
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132 Capacitive Sensor Readout (a)
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134 Capacitive Sensor Readout negli
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136 Capacitive Sensor Readout reset
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138 Capacitive Sensor Readout incre
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140 Capacitive Sensor Readout is co
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142 Implementation such a way that
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144 Implementation 8.2 System Desig
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146 Implementation 8.2.1 Sensor Rea
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148 Implementation together with th
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150 Implementation approach require
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152 Implementation used for clock g
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154 Implementation Because of the d
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156 Implementation plied from the C
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158 Implementation of a PMOS transi
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160 Implementation R eff (MΩ) 1000
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162 Implementation R eff (MΩ) 1000
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164 Implementation effective resist
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166 Implementation is applied to th
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168 Implementation ther differences
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170 Implementation (a) (b) (c) V in
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172 Implementation V inp V inn V C2
Page 211 and 212:
174 Implementation (a) -z -2 z -1 1
Page 213 and 214:
Figure 8.19 Schematic of the implem
Page 215 and 216:
178 Implementation teresis are equa
Page 217 and 218:
180 Implementation From the silicon
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182 Implementation V inp V inn C 1p
Page 221 and 222:
184 Implementation as an XOR operat
Page 223 and 224:
186 Implementation triggered by the
Page 225 and 226:
188 Implementation Θ 1 (°) 2.5 2
Page 227 and 228:
190 Implementation R.m.s. noise (dB
Page 229 and 230:
192 Implementation Quadrature outpu
Page 231 and 232:
194 Implementation Signal (dBFS)
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196 Implementation itor towards gro
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198 Implementation Finally, the mea
Page 237 and 238:
200 Implementation Root Allan varia
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202 Implementation Technology Table
Page 241 and 242:
204 Conclusions and Future Work usi
Page 244 and 245:
Bibliography [1] H. C. Nathanson an
Page 246 and 247:
Bibliography 209 [20] L. Aaltonen,
Page 248 and 249:
Bibliography 211 [45] J. M. Bustill
Page 250 and 251:
Bibliography 213 [68] B. V. Amini,
Page 252 and 253:
Bibliography 215 [88] S. R. Zarabad
Page 254 and 255:
Bibliography 217 [113] Z. Y. Chang
Page 256 and 257:
Bibliography 219 [138] ——, “N
Page 258 and 259:
Appendix A Effect of Nonlinearities
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+ 3ABD · sin((ω0x − 2ωΩ)t + 2
Page 262 and 263:
+ 3BC2 · cos((3ω0x + ωΩ)t − T
Page 264 and 265:
Appendix B Effect of Mechanical-The
Page 266:
lowing an identical path, the power
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232 Parallel-Plate Actuator with Vo
Page 271 and 272:
234 Noise Properties of SC Readout
Page 273 and 274:
Page 275 and 276:
Page 278 and 279:
Appendix F Microphotograph of the I
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