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Heat Transfer in Microchannels - coolingZONE

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R th,h – Conduction Resistance<br />

through the chip<br />

R th,c – Contact Resistance at<br />

the Chip/Substrate Interface<br />

<strong>Microchannels</strong><br />

Incropera, pg. 155<br />

R th,sub – 3-D Conduction<br />

Resistance <strong>in</strong> the substrate<br />

(spread<strong>in</strong>g resistance)<br />

R th,cnv – Convection<br />

Resistance from the substrate<br />

to the coolant<br />

Note that this network ends with the mean fluid temperature. If we use the<br />

<strong>in</strong>let fluid temperature, we also need to <strong>in</strong>clude R caloric

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