POWERING your FUTURE

SOLarIS
ADvANCED NANOTECHNOLOGy SOLUTIONS
FOR CLEAN ENERGy PRODUCTION
FLEXIBILITy
Various substrates
Wafers
Glasses
Thin Foils
Various applications
Solar Cells
Touch Panels
Thermo Electric Generators
Thin Film Batteries
NEMS / Semiconductors
OLED
Various processes
DC Sputtering (reactive, pulsed)
RF Sputtering
Etching
Heating / Annealing
FEaTUrES
Quick change over from one substrate size to another due to carrier system
Substrate loading / unloading included in the machine design
Small foot print and low operating costs
Flexible confi gurations allowed - each process station is separated from the other
Multi layer capability – each chamber can operate different processes and deposit different materials
Multi Source Sputtering – alloy development with up to 4 different materials
High throughput – up to 1200 substrates / h (dry cycle time < 3.0 sec)
Substrate rotation during sputtering ensures ±2.5% layer uniformity
Substrate diameter up to 225mm
Film annealing with lamp heater up to 550°C
Surface cleaning and activation by etching
Easy integration into automated inline production systems
FLEXIBILITy IN SUBSTraTES
Solar cell Thin foil Touch panel
SOLARIS is an Oerlikon trademark registered in Europe and other countries
PHOTOvOLTAIC
The SOLARIS is designed for front- and back side coating of crystalline
silicon solar cells.
The Multi layer capability allows passivation and “silane free” SiN-AR
(Anti Refl ective) coating on the front side, with the freedom to select
optical criterias (like refractive indices, etc.) of individual layers as well as
passivation and metal layer deposition on the back side.
TOUCH PANELS
While touch sensing is commonplace for single points of contact, multitouch
sensing enables a user to interact with a system with more than
one fi nger at a time, as in chording and bi-manual operations. Such
sensing devices are inherently also able to accommodate multiple users
simultaneously, which is especially useful for larger interaction scenarios
such as interactive walls and tabletops.
Touch panels are made of glass or polymer and require TCO
(Transparent Conductive Oxide) contact layers in combination with anti
refl ection coatings The ability to mask areas which do not require active
layers is another unique feature with the SOLARIS system.
THERMOELECTRICS
Thermoelectric devices are based on the fact that when certain materials
are heated, they generate a signifi cant electrical voltage.
The fundamental problem in creating effi cient thermoelectric materials
is that they need to be very good at conducting electricity, but not heat.
That way, one end of the apparatus can get hot while the other remains
cold, instead of the material quickly equalizing the temperature. In most
materials, electrical and thermal conductivity go hand in hand. Thin
Film technology is not only a cost effective alternative, it even increases
effi ciencies and the SOLARIS system is the manufacturing solution for
green energy generation devices.
ENERGy STORAGE
Nanotechnology is providing us with next generation systems that rely on
micro-generation of energy stored in thin fi lm batteries. Nanotechnology
works on both sides of the equation. Solar and wind generators are made
more effi cient by the use of thin fi lms to reach grid parity. Thin fi lm batteries
use new materials created using nanotechnology to achieve components
that are used to manufacture batteries 40 times more effi cient than current
batteries. The SOLARIS with its Multi source capability is the ideal tool
to develop new materials and alloys to drive developments in energy
storage devices and is at the same time the proven equipment for mass
production.
SOLarIS
TECHNICAL INFORMATION
THrOUGHpUT
Increased throughput in Pv – easy – with double step feature:
prOCESS DEVELOpmENT
Implement to mass production
Increased throughput necessary –
easy - with double step feature
Production can continue with 50%
capacity when one system is down
for target change
Target change time max. 2min per
chamber
Total down time for target and shield
change max. 30min
Target lifetime in case of SiN coating
of cSi solar cells = 180,000 cells
ONLy 30 minutes
maintenance per week
Multi layer capability – each chamber
can operate different processes and
deposit different materials
Multi Source Sputtering – alloy
development with up to 4 different
materials