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Cryopumps, Cryogenics - Granzow

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<strong>Cryopumps</strong> with Fully Automatic Control,<br />

ClassicLine<br />

COOLVAC 800 CL<br />

COOLVAC 1.500 CL<br />

COOLVAC 1.500 CL<br />

Advantages to the User<br />

- Hydrocarbon-free high vacuum<br />

- High capacity for argon and hydrogen<br />

- High crossover value<br />

- Simple operation<br />

- Trouble-free integration into complex systems<br />

- Fully automatic regeneration through Cryo Compact<br />

Control<br />

- Easy servicing<br />

Typical Applications<br />

- Evaporators<br />

- Sputtering systems<br />

- Ion implanters<br />

- Optical coating systems<br />

- Metallization systems<br />

Advantages to the User<br />

- Hydrocarbon-free high vacuum<br />

- High capacity for argon and hydrogen<br />

- High crossover value<br />

- Simple operation<br />

- Trouble-free integration into complex systems<br />

- Fully automatic regeneration through Cryo Compact<br />

Control<br />

- Easy servicing<br />

Typical Applications<br />

- Evaporators<br />

- Sputtering systems<br />

- Ion implanters<br />

- Optical coating systems<br />

- Metallization systems<br />

Ø 180<br />

Ø 240<br />

DN 40 KF<br />

153<br />

DN 16 KF<br />

257<br />

DN 25 KF<br />

143<br />

386<br />

418<br />

535<br />

320<br />

549<br />

Dimensional drawing for the COOLVAC 800 CL (DN 160 ISO-K)<br />

Dimensional drawing for the COOLVAC 1.500 CL (DN 200 ISO-K)<br />

C12 14<br />

Oerlikon Leybold Vacuum Full Line Catalog

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