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Cryopumps, Cryogenics - Granzow

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COOLVAC 2.000 CL<br />

COOLVAC 3.000 CL<br />

COOLVAC 2.000 CL<br />

Advantages to the User<br />

- Hydrocarbon-free high vacuum<br />

- High capacity for argon and hydrogen<br />

- High crossover value<br />

- Simple operation<br />

- Trouble-free integration into complex systems<br />

- Fully automatic regeneration through Cryo Compact<br />

Control<br />

- Easy servicing<br />

Typical Applications<br />

- Evaporators<br />

- Sputtering systems<br />

- Ion implanters<br />

- Optical coating systems<br />

- Metallization systems<br />

COOLVAC 3.000 CL<br />

Advantages to the User<br />

- Hydrocarbon-free high vacuum<br />

- High capacity for argon and hydrogen<br />

- High crossover value<br />

- Simple operation<br />

- Trouble-free integration into complex systems<br />

- Fully automatic regeneration through Cryo Compact<br />

Control<br />

- Easy servicing<br />

Typical Applications<br />

- Evaporators<br />

- Sputtering systems<br />

- Ion implanters<br />

- Optical coating systems<br />

- Metallization systems<br />

Ø 304<br />

Ø 370<br />

300<br />

345<br />

559<br />

604<br />

Dimensional drawing for the COOLVAC 2.000 CL (DN 250 CF)<br />

Dimensional drawing for the COOLVAC 3.000 CL (DN 320 ISO-K)<br />

C12 18<br />

Oerlikon Leybold Vacuum Full Line Catalog

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