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Cryopumps, Cryogenics - Granzow

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Contents<br />

General<br />

Applications and Accessories<br />

<strong>Cryopumps</strong> . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . C12.03<br />

Cold Heads . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . C12.04<br />

General<br />

<strong>Cryopumps</strong> . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . C12.05<br />

Multiple Operation of Refrigerator <strong>Cryopumps</strong> . . . . . . . . . . . . C12.06<br />

Regenerating <strong>Cryopumps</strong> . . . . . . . . . . . . . . . . . . . . . . . . . . . C12.06<br />

Refrigerating Capacity of Cryogenic Cold Heads . . . . . . . . . . C12.07<br />

Cold Heads . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . C12.08<br />

Compressor Units . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . C12.11<br />

Products<br />

<strong>Cryopumps</strong><br />

Standard <strong>Cryopumps</strong><br />

BasicLine<br />

COOLVAC 800 BL . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . C12.12<br />

<strong>Cryopumps</strong> with Fully Automatic Control<br />

ClassicLine<br />

COOLVAC 800 CL, 1.500 CL . . . . . . . . . . . . . . . . . . . . . . . C12.14<br />

COOLVAC 2.000 CL, 3.000 CL . . . . . . . . . . . . . . . . . . . . . C12.18<br />

COOLVAC 5.000 CL, 10.000 CL . . . . . . . . . . . . . . . . . . . . C12.22<br />

COOLVAC 18.000 CL . . . . . . . . . . . . . . . . . . . . . . . . . . . . . C12.26<br />

<strong>Cryogenics</strong><br />

Cold Heads, pneumatically driven<br />

Single Stage Cold Head COOLPOWER 140 T . . . . . . . . . . . C12.28<br />

Dual Stage Cold Heads<br />

COOLPOWER 7/25, 5/100 and 5/100 T . . . . . . . . . . . . . . C12.30<br />

Cold Head, mechanically driven<br />

COOLPOWER 10 MD . . . . . . . . . . . . . . . . . . . . . . . . . . . . . C12.32<br />

Compressor Units<br />

COOLPAK 4000/4200, COOLPAK 6000/6200 . . . . . . . . . . . C12.34<br />

COOLPAK 6000 MD / 6200 MD . . . . . . . . . . . . . . . . . . . . . . C12.36<br />

General Accessories for Compressor Units COOLPAK . . . . . . . C12.38<br />

Refrigerator Cryostats<br />

based on the RDK 6-320 . . . . . . . . . . . . . . . . . . . . . . . . . . . . C12.39<br />

optical, based on the RDK 6-320 . . . . . . . . . . . . . . . . . . . . . C12.40<br />

Conversion of Units<br />

Celsius, Fahrenheit, Kelvin<br />

Kelvin (abbreviated as K) is the unit of<br />

temperature.<br />

Temperatures on the Kelvin scale are<br />

converted into temperatures on the<br />

Celsius scale as follows:<br />

n °C = (n + 273.15) K.<br />

Since the following equation applies<br />

between Celsius scale and Fahrenheit<br />

scale<br />

n °F = 5/9 (n – 32) °C<br />

it follows that<br />

n °F = 5/9 (n + 459.67) K.<br />

The inverse equations are as follows:<br />

m K = (m – 273.15) °C<br />

m °C = (1.8 m + 32) °F<br />

m K = (1.8 m – 459.67) °F.<br />

The following applies in particular to<br />

absolute Zero:<br />

0 K = -273.15 °C ; -459.67 °F.<br />

1 bar = 14.5 psi<br />

1 MPa = 10 bar<br />

Accessories<br />

<strong>Cryopumps</strong> / <strong>Cryogenics</strong><br />

Controllers and Monitoring Units for <strong>Cryopumps</strong> . . . . . . . . . . . C12.42<br />

COOLVAC ClassicLine, System Configuration<br />

Single Operation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . C12.45<br />

Dual Operation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . C12.46<br />

Dual and Mutiple Operation . . . . . . . . . . . . . . . . . . . . . . . . . . C12.47<br />

Low Temperature Controller Modell 9700 . . . . . . . . . . . . . . . . C12.48<br />

Low Temperature Measuring Instrument MODEL 1901 . . . . . . C12.49<br />

Temperature Sensor . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . C12.50<br />

Safety Valve . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . C12.51<br />

Precision Manometer . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . C12.52<br />

C12 02<br />

Oerlikon Leybold Vacuum Full Line Catalog

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