Cryopumps, Cryogenics - Granzow
Cryopumps, Cryogenics - Granzow
Cryopumps, Cryogenics - Granzow
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COOLVAC ClassicLine,<br />
Dual System Configuration<br />
Only for European mains voltages and<br />
for compressors suited for dual operation<br />
7<br />
COOLVAC<br />
# 1<br />
COOLVAC<br />
# 2<br />
PM<br />
PM<br />
1<br />
3<br />
3<br />
5<br />
4<br />
4<br />
SC<br />
PS<br />
2<br />
COMPRESSOR<br />
for dual operation<br />
6<br />
RS 232 C<br />
External PC<br />
PM = Pump module (included with the pump)<br />
SC = System controller<br />
PS = Power supply<br />
1 = e.g. Part No. 844 262<br />
2 = e.g. Part No. 844 139<br />
3 = e.g. Part No. 844 138<br />
4 = Part No. 400 000 323 (necessary only for COOLVAC 1500 CL, 2000 CL und 3000 CL)<br />
5 = Part No. 844 141<br />
6 = to be provided by the customer<br />
7 = e.g. Part No. 844 256<br />
Key to the diagram “Dual System Configuration”<br />
C12 46<br />
Oerlikon Leybold Vacuum Full Line Catalog