Instrumented Indentation - CSM Instruments
Instrumented Indentation - CSM Instruments
Instrumented Indentation - CSM Instruments
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Force (µN)<br />
120<br />
100<br />
80<br />
60<br />
40<br />
20<br />
0<br />
5 nm indentation on DLC film<br />
Noise floor less than 0.1 nm!<br />
Single Indent<br />
0 1 2 3 4 5 6<br />
Pentration Depth (nm)