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Instrumented Indentation - CSM Instruments

Instrumented Indentation - CSM Instruments

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Force (µN)<br />

120<br />

100<br />

80<br />

60<br />

40<br />

20<br />

0<br />

5 nm indentation on DLC film<br />

Noise floor less than 0.1 nm!<br />

Single Indent<br />

0 1 2 3 4 5 6<br />

Pentration Depth (nm)

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