Instrumented Indentation - CSM Instruments
Instrumented Indentation - CSM Instruments
Instrumented Indentation - CSM Instruments
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Why the Nanoindentation?<br />
> On a surface covered by thin layers, the<br />
maximum depth of the indentation must be<br />
lower than 10% of total depth of the<br />
covering<br />
substrate.<br />
to avoid influence on the<br />
Film depth, h film<br />
Maximum penetration, h m<br />
Elastic distortion<br />
h<br />
h<br />
m �<br />
film<br />
10%<br />
> High resolution positioning:<br />
- Small volume testing<br />
- High positioning accuracy<br />
10�m
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