Wafer Map Failure Pattern Recognition Using Artificial Intelligence

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Phase 4 : Pattern Recognition • Line Detection Methodology (2) Definition + Training Filter results + Identification 22
Phase 4 : Pattern Recognition • Segment Detection Methodology (3) Definition + Training Filter results + Identification 23
Page 1 and 2: Wafer Map Failure Pattern Recogniti
Page 3 and 4: Background • Disposition challeng
Page 5 and 6: Objectives • Create a tool to hel
Page 7 and 8: Approach • Extract useable parame
Page 9 and 10: Phase 1 : Data preparation (1) •
Page 11 and 12: Phase 1 : Data preparation (3) •
Page 13 and 14: Phase 3 : System structure (1) •
Page 21: Phase 4 : Pattern Recognition • A
Page 25 and 26: Phase 5 : Testing and Results (2)
Page 27 and 28: • Features Other Considerations -
Page 29 and 30: List of tools used (2) Tools Eclips
Page 31 and 32: Conclusion • It is concluded that
Page 33: Thank You • We would like thank t

Wafer Map Failure Pattern Recognition Using Artificial Intelligence

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