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Additional Sensors<br />

IONIVAC Sensors IE 414/IE 514<br />

These passive sensors use hot<br />

cathode ionization technology.<br />

Advantages to the User<br />

- Exchangeable cathode<br />

- High accuracy of the measurements<br />

due to individually calibrated sensing<br />

system<br />

IE 414<br />

- Bayard-Alpert sensing system<br />

- Measurement range to<br />

2 x 10 -11 mbar (1.5 x 10 -11 Torr)<br />

- Protection shied welded in place<br />

IE 514<br />

- Extractor sensing system<br />

- Reliable to 1 x 10 -12 mbar<br />

(0.75 x 10 -12 Torr)<br />

- Significant reduction of X-ray and<br />

ion desorption effects<br />

33<br />

69,4<br />

33<br />

69,4<br />

DN 40 CF<br />

DN 40 CF<br />

55<br />

12,8<br />

58<br />

90<br />

25<br />

12,8<br />

66<br />

98<br />

Dimensional drawing for the IE 414 (left) and IE 414 (right)<br />

C16 60<br />

Oerlikon Leybold Vacuum Full Line Catalog

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