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Total Pressure Gauges

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Technical Data PR 25 PR 26 PR 27 PR 28<br />

Measurement range<br />

High voltage supply (anode potential)<br />

mbar<br />

(Torr)<br />

kV<br />

1 x 10 -9 to 10 -2 1 x 10 -9 to 10 -2 1 x 10 -9 to 10 -2 1 x 10 -9 to 10 -2<br />

(0.75 x 10 -9 to 10 -2 ) (0.75 x 10 -9 to 10 -2 ) (0.75 x 10 -9 to 10 -2 ) (0.75 x 10 -9 to 10 -2 )<br />

+3.3/+1.6 +3.3/+1.6 +3.3/+1.6 +3.3/+1.6<br />

Storage temperature range °C<br />

Nominal temperature range °C<br />

Degassing temperature (flange) °C<br />

-25 to +80 -25 to +80 -25 to +80 -25 to +80<br />

0 to +80 0 to +80 0 to +80 0 to +200<br />

– – – 350<br />

Permissible overload (abs.)<br />

bar<br />

6 1) 6 1) 6 1) 6 1)<br />

Dead volume cm 3<br />

Materials in contact with the medium<br />

21 21 21 21<br />

stainless steel, stainless steel, stainless steel, stainless steel,<br />

nichrome, nichrome, nichrome, nichrome,<br />

ceramics, titanium ceramics, titanium ceramics, titanium ceramics, titanium<br />

Weight, approx.<br />

Vacuum connection<br />

Operating units<br />

kg (lbs)<br />

DN<br />

0.75 (1.66) 0.75 (1.66) 0.8 (1.66) 0.8 (1.66)<br />

25 KF 40 KF 40 CF 40 CF<br />

COMBIVAC COMBIVAC COMBIVAC COMBIVAC<br />

CM 31, 32, 33 / CM 31, 32, 33 / CM 31, 32, 33 / CM 31, 32, 33 /<br />

PENNINGVAC PM 31 PENNINGVAC PM 31 PENNINGVAC PM 31 PENNINGVAC PM 31<br />

Ordering Information<br />

PENNINGVAC sensors<br />

Replacement cathode plate, titanium<br />

(5 pcs., incl. 5 ceramics discs)<br />

Replacement anode ring<br />

Baffle, with centering ring<br />

PR 25 PR 26 PR 27 PR 28<br />

Part No. 157 52 Part No. 136 46 Part No. 136 47 Part No. 136 48<br />

Part No. 162 91 Part No. 162 91 Part No. 162 91 Part No. 162 91<br />

Part No. 200 28 711 Part No. 200 28 711 Part No. 200 28 711 Part No. 200 28 711<br />

Part No. 230 078 Part No. 230 079 – –<br />

1) When using an ultra sealing gasket at the vacuum connection<br />

Oerlikon Leybold Vacuum Full Line Catalog<br />

65 C16

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