Silicon Detectors - HEPHY

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6.3 The CMS Inner Tracker  The pixel detector! ~50 cm! ~1 m! ~40 cm! Pixel size: 100 µm x 150 µm! Barrel Pixel:  3 barrel layers at r of 4.3, 7.3, 10.4 cm  11520 chips (48 million pixels)! Forward Pixel:  4 disks at z of ±35.5 and ±46.5 cm  4320 chips (18 million pixels)  Modules dilted by 20 o for better   charge sharing! M. Krammer, Praktikum 2010/11! Silicon Detectors! 49!
6.3 The CMS Inner Tracker  The pixel detector - construction! Hybrid Pixel Technology:   Readout chips (ROCs) bump bonded to high resistivity silicon sensor! Barrel Pixel sensor wafer:! Bump bonds:! Thickness 270 µm  n + -pixels in n-bulk with   p-spray (CIS) or p-stop (SINTEF)     ! Bump bonding process  Barrel: Indium, In-house at PSI  Forward: PbSn at two vendors (RTI, IZM)  ! M. Krammer, Praktikum 2010/11! Silicon Detectors! 50!
Page 1 and 2: Silicon Detectors ! Manfred Krammer
Page 3 and 4: 2 Basics! M. Krammer, Praktikum 201
Page 5 and 6: 2.1 Materials  Compound semicondu
Page 7 and 8: 2.2 Material Properties  Energy b
Page 9 and 10: 2.3 Constructing a Detector  The
Page 11 and 12: 2.4 Doping  Bond model: n-doping
Page 13 and 14: 2.4 Doping  Bond model: p-doping
Page 15 and 16: 2.5 The p-n Junction  Creating a
Page 17 and 18: 2.5 The p-n Junction  Operation w
Page 19 and 20: 2.5 The p-n Junction  Current-vol
Page 21 and 22: 2.6 Detector Characteristics  Dep
Page 23 and 24: 3 Detector Structures! M. Krammer,
Page 25 and 26: 3.1 Microstrip Detector  AC coupl
Page 27 and 28: 3.1 Microstrip Detector  Polysili
Page 29 and 30: 3.3 Hybrid Pixel Detectors   Bump
Page 31 and 32: 4.1 Signal to Noise Ratio   Intro
Page 33 and 34: 4.1 Noise Contributions  Detector
Page 35 and 36: 4.2 Position Resolution  Introduc
Page 37 and 38: 4.2 Position Resolution  Diffusio
Page 39 and 40: 4.2 Position Resolution  Example
Page 41 and 42: 6.3 The CMS Inner Tracker  The CM
Page 43 and 44: 6.3 The CMS Inner Tracker  Some n
Page 45 and 46: 6.3 The CMS Inner Tracker  Exampl
Page 47 and 48: M. Krammer, Praktikum 2010/11! Sili
Page 49: Tracker Insertion! M. Krammer, Prak
Page 53 and 54: 6.3 The CMS Inner Tracker  A barr
Page 55 and 56: 6.3 The CMS Inner Tracker  PIxel
Page 57: 6.3 The CMS Inner Tracker  Simula

Silicon Detectors - HEPHY

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