The ITRS and AMC - Purafil
The ITRS and AMC - Purafil
The ITRS and AMC - Purafil
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1<br />
2006-11-14, 11:42<br />
CleanRooms China 2006 9
<strong>ITRS</strong><br />
Chris Muller<br />
<strong>AMC</strong><br />
SEMATECH<br />
<strong>ITRS</strong><br />
<strong>AMC</strong><br />
<strong>ITRS</strong><br />
<strong>AMC</strong><br />
<strong>AMC</strong><br />
<strong>AMC</strong><br />
TWG<br />
<strong>AMC</strong><br />
2005<br />
[3]<br />
<strong>AMC</strong><br />
<strong>AMC</strong><br />
<strong>ITRS</strong> [1]<br />
Litho<br />
<strong>AMC</strong><br />
<strong>AMC</strong><br />
FI<br />
YE<br />
WECC<br />
C6<br />
C30<br />
/<br />
2005<br />
[2]<br />
<strong>ITRS</strong><br />
<strong>ITRS</strong><br />
ESIA<br />
JEITA<br />
KSIA<br />
SIA<br />
TSIA<br />
SEMATECH<br />
<strong>AMC</strong><br />
FI<br />
2005<br />
CleanRooms China 2006 9<br />
2<br />
2006-11-14, 11:42
1 2001<br />
[4]<br />
WECC<br />
<strong>AMC</strong><br />
[4]<br />
[6]<br />
2003<br />
2001 <strong>ITRS</strong> <strong>AMC</strong><br />
114a<br />
114b<br />
POD/FOUP<br />
[5]<br />
95a<br />
95b<br />
<strong>AMC</strong><br />
<strong>AMC</strong><br />
<strong>AMC</strong><br />
<strong>AMC</strong><br />
WECC<br />
SMC<br />
2<br />
2005 <strong>ITRS</strong> [4]<br />
1<br />
<strong>AMC</strong><br />
<strong>AMC</strong><br />
<strong>AMC</strong><br />
65 nm<br />
HEPA<br />
300mm<br />
DUV<br />
<strong>AMC</strong><br />
2 2003<br />
<strong>AMC</strong><br />
ppt<br />
<strong>AMC</strong><br />
<strong>AMC</strong><br />
<strong>AMC</strong><br />
<strong>AMC</strong><br />
CleanRooms China 2006 9<br />
3<br />
2006-11-14, 11:42
3 2005<br />
/ /<br />
POD<br />
WECC<br />
FOUP<br />
<strong>AMC</strong><br />
2005 <strong>ITRS</strong><br />
115a 115b WECC<br />
3<br />
<strong>AMC</strong><br />
<strong>AMC</strong><br />
GC/MS<br />
<strong>AMC</strong><br />
<strong>AMC</strong><br />
/<br />
<strong>AMC</strong><br />
run-to-run control<br />
/<br />
<strong>AMC</strong><br />
<strong>AMC</strong><br />
<strong>AMC</strong><br />
<strong>AMC</strong><br />
<strong>AMC</strong><br />
<strong>AMC</strong><br />
<strong>AMC</strong><br />
SMC<br />
<strong>AMC</strong><br />
<strong>AMC</strong><br />
<strong>AMC</strong><br />
<strong>AMC</strong><br />
/<br />
FI<br />
YE<br />
CleanRooms China 2006 9<br />
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2006-11-14, 11:42
<strong>AMC</strong><br />
<strong>AMC</strong><br />
<strong>AMC</strong><br />
2005 <strong>ITRS</strong><br />
<strong>AMC</strong><br />
POD/FOUP<br />
YE<br />
<strong>AMC</strong><br />
WECC<br />
<strong>AMC</strong> /<br />
/<br />
<strong>AMC</strong><br />
SMC<br />
<strong>AMC</strong><br />
<strong>AMC</strong><br />
WECC<br />
<strong>AMC</strong><br />
<strong>AMC</strong><br />
2005 <strong>ITRS</strong><br />
<strong>AMC</strong><br />
<strong>AMC</strong><br />
<strong>AMC</strong><br />
<strong>AMC</strong><br />
<strong>AMC</strong><br />
ISO 14644<br />
IEST ISO 14644-8<br />
- FDIS<br />
www.lest.org ISO 14644<br />
Christopher O. Muller<br />
Muller<br />
<strong>Purafil</strong><br />
100 10-12g/m 3<br />
<strong>Purafil</strong><br />
ISO 14644<br />
\<br />
2005 19 5<br />
Chris Muller IEST <strong>AMC</strong><br />
Muller<br />
<strong>AMC</strong><br />
<strong>AMC</strong><br />
<strong>AMC</strong> <strong>AMC</strong> <strong>AMC</strong><br />
chris_muller@purafil.com<br />
CleanRooms China 2006 9<br />
5<br />
2006-11-14, 11:42
<strong>AMC</strong><br />
Chris Muller<br />
<strong>AMC</strong><br />
<strong>AMC</strong><br />
<strong>AMC</strong><br />
60<br />
300<br />
ppb<br />
QCM<br />
[3, 4, 5]<br />
QCM<br />
ERM<br />
[1]<br />
<strong>AMC</strong><br />
ERM<br />
<strong>AMC</strong><br />
ERM<br />
1ppb<br />
1 ERM<br />
<strong>AMC</strong><br />
<strong>AMC</strong><br />
<strong>AMC</strong><br />
Å<br />
<strong>AMC</strong><br />
1ppb<br />
ERM<br />
<strong>AMC</strong><br />
1<br />
<strong>AMC</strong><br />
[6 7]<br />
2<br />
C2/S2<br />
1<br />
2<br />
CleanRooms China 2006 9<br />
6<br />
2006-11-14, 11:42
1<br />
1<br />
[9]<br />
3 150<br />
LG<br />
<strong>AMC</strong><br />
ppt<br />
[10]<br />
5<br />
AFM 32 35<br />
4 500<br />
100 0.45<br />
LG<br />
1ng<br />
5<br />
MEMS<br />
4<br />
QCM<br />
SAW<br />
MCS<br />
3<br />
QCM<br />
5<br />
SAW<br />
MCS<br />
EEPROM<br />
<strong>AMC</strong><br />
[11]<br />
6A 6B<br />
2<br />
1 2ppb<br />
7<br />
CleanRooms China 2006 9<br />
7<br />
2006-11-14, 11:42
6A<br />
6B<br />
1ppb<br />
7<br />
Christopher O. Muller <strong>Purafil</strong><br />
<strong>Purafil</strong><br />
Doraville<br />
Christopher O. Muller<br />
<strong>Purafil</strong><br />
/<br />
/<br />
chris_muller@purafil.com.<br />
CleanRooms China 2006 9<br />
8<br />
2006-11-14, 11:42
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