PRiMELiNE® - Roth & Rau AG

PRiMELiNE ®
System solutions for solar cell manufacturing
High productive equipment - High efficient technologies - Low costs
Future solar cell technologies for highest cell efficiencies
Industrially proven manufacturing equipment for solar cell manufacturing
Equipment for the whole value chain in solar cell manufacturing available (Meyer Burger Group)
- Well-matched equipment for wafer-, cell- and module manufacturing
Best Cost of Ownership
Software controlled manufacturing solutions
Professional project management and worldwide service
Standard crystalline silicon solar cell technology
18.0% on monocrystalline wafers
17.0% on multicrystalline wafers
Gross throughput of 2,400 wafers/hour
Local Back Contacts Technology (LoBaCo) on iPERC cells
Upgrade of existing production lines with LoBaCo back side passivation technology
Versatlie applicable PECVD system MAiA ® constitues the core equipment for front and
back side passivation
19.0% on monocrystalline wafers
18.0% on multicrystalline wafers
Highly integrated technology system solutions for minimised wafer handling, complex and
high electrical and mechanical yield
Heterojunction Technology for high efficient solar cells
Highest cell efficiencies of ≥20% with further upside potential (monocrystalline wafers only)
Lower production costs due to low temperature processing and low wafer stress
Simple production process with less production stepsCo-process with MAiAm
Excellent temperature coefficient
Gross throughput of 2,400 wafers/hour
A member of Meyer Burger Group

System solutions for advanced solar cell technologies
Local Back Contacts Technology (LoBaCo)
Emitter
Diffusion
Phosphor
Glass (PSG)
Etching
Anti-Reflection Coating, Rear
and Front Side Passivation
(Al 2
O 3
, SiN x
)
Systems engineering and process know how in solar cell manufacturing
Several types of equipment including core technologies
A wide range of service packages
Professional project planning and management
Focus on technology support
Competence in research and development for optimisation of each production step
CALiPSO ® MAiA ® CALiPSO ® CAMiNI ®
Customer-specific MES solutions for the entire life cycle of production lines
- Simulations > Production Control > Data Analysis > Process Optimisation
Available for the whole photovoltaic value chain
Textured front SiNx passivation
- Crystalline Silicon Technology: Wafer Production > Cell Manufacturing > Module Assembly
- Thin Film Technology: Front and Back End Processes
Roth & Rau, therefore, provides its customers a team of well-experienced technologists companying the
production ramp-up period. This enables even newcomer in the photovoltaic industry to rapidly launch a
solar cell production on a competitive technological level and gives established cell manufacturers the
possibility to outsource specific items of the construction of production lines or to introduce new technlogy
steps.
Screen printed front contacts
Laser opened
AlOx
local contacts
Nitride
Front Side
Back Side
Technology-Packages:
Standard crystalline silicon solar cell technology
Al-screenprint
Saw Damage
Phosphorous Emitter
Phosphor Anti-Reflection
Etching &
Screen Contact Cell Tester
Doping Diffusion
Glass (PSG) Coating,
Texturing
Etching
Printing Firing & Sorter
Passivation
Heterojunction Technology (HJT)
Texturing
Back PECVD Side 1
i/n Front PECVD Side 2
PVD
i/p
Printing
Screen
Cell Tester
TCO Front/ Back Side
Curing
& Sorter
CALiPSO ® SiNA ® CAMiNI ® Back Contact
Annealing
Laser
Ablation
Screen
Print
Contact
Firing
Textured front SiNx passivation
HELiA PECVD
HELiA PVD
CALiPSO ®
ITO
Screen printed front contacts
a-Si:H (p)
a-Si:H (i)
Screen printed front contacts
Al-screenprint
Al-BSF
n-type c-Si
a-Si:H (i)
a-Si:H (n)
ITO
Front Side
Back Side
Back contact

Equipment-Packages
Besides the technology and service packages Roth & Rau covers a big portion of the necessary production
equipment for solar cell manufacturing with own products. This includes in particular coating equipment for
the deposition of various types of thin layers used in crystalline silicon solar cell production, furnaces for
emitter diffusion, annealing, curing and firing, wafer handling automation components and MES systems
provided by our software company AIS Automation Dresden.
Furthermore our equipment fits perfect to other production equipment within the Meyer Burger group. This
includes equipment and technologies for wafer and module manufacturing.
SiNA ® - PECVD anti-reflection coating system
Modular based inline coating system for excellent silicon-nitrid optical and passivation properties
Compact design with high throughput (scalable from 50 to 125 MWp)
Perfect adaptation of the throughput to the customer's needs at simultaneously low running costs
MAiA ® - Versatile applicable PECVD platform
Bases on the same modular construction platform like the SiNA ®
Further options for application in the production of new types of solar cells
Very well suited for local back contacts (LoBaCo) technology (front and back side coating in one system)
HELiA - Coating equipment for heterojunction solar cells
Key components within the production process of high efficiency cells with heterojunction technology
HELiA PECVD
for deposition of uniform, well controlled thin layers of intrinsic and doped amorphous silicon
onto a textured silicon wafer surface
HELiA PVD
for deposition of TCO and metallic contact layers by means of magnetron sputtering
CAMiNI ® - Contact firing furnace with integrated dryer
Smallest footprint for combined drying-firing-system (Minimum maintenance and operating costs)
Innovative transport system with profilled ceramic rollers for smooth cell transport
Dual lane process with separate heatable lanes
CALiPSO ® - Flexible heat treatment furnace
Up to 8 lanes inline furnace for multiple applications like diffusion, annealing and curing
Ceramic roller transport system for metal free and smooth cell transport
Precise temperature control and excellent temperature uniformity
AUTOMATiON - Maximizing productivity with compatile automation systems
Compact loading and unloading system for reduced footprint and short wafer handling time
Configurable to automate a wide variety of process tools with a throughput of up to 4,800 w/h
Available for all Roth & Rau equipment as well as for other OEM process equipment used in the cell
manufacturing process chain
Roth & Rau AG, info@roth-rau.com, www.roth-rau.com