PT 151 Dry / PT 361 Dry Turbomolecular Pump ... - Schoonover, Inc.

PT 151 Dry / PT 361 Dry
Turbomolecular Pump Systems
These turbomolecular pump systems
are ready-to-operate vacuum units for
generating a vacuum in the high and
ultra-high vacuum range which is free
of hydrocarbons.
When pumping aggressive or abrasive
process gases, a purge gas facility
must be used for the pumps.
Typical Applications
- Spectroscopy
- Tube manufacturing
- Beam guidance systems
- Microbalances
- Sputtering and evaporation systems
- Surface physics
PT 361 Dry with scroll pump with options
(measuring instrument, forevacuum valve)
Advantages to the User
- Low ultimate pressure
(< 10 -7 mbar /Torr), free of hydrocarbons
- High effective pumping speed
- Compact, mobile unit
- Simple to operate
- High level of reliability
- Purge gas and venting ports
- Components such as backing
pump, frequency converter and
TURBOVAC, as well as venting or
degassing are controlled via a single
multi function switch
- Service friendly assembly for maintenance
without the need to disassemble
backing or high vacuum
pump
- Pump systems prepared for installation
of larger backing pumps (for
barrier gas operation, for example)
- Additional mains sockets for accessories
- CE approval
The turbomolecular pump systems
consists of the following principal components:
- Grease lubricated turbomolecular
pump TURBOVAC 151 or 361 with
splinter guard
- Electronic frequency converter
TD 20 classic
- Dry compressing scroll pump
SCROLLVAC SC 15 D or SC 30 D
- Switch box with mains power
outlet and rotary switch to operate
the connected units
The pump systems are prepared for
installation of further components:
- Vacuum gauges (up to two):
- Air cooling unit
- Flange heater
- Venting valve
h h 1 b l
mm 887 735 500 425
in. 34.92 28.94 19.69 16.73
h 1
h
l
b
PT 151 / 361 Dry turbomolecular pump system with scroll vacuum pump SCROLLVAC
C10 20
Oerlikon Leybold Vacuum Full Line Catalog

Technical Data
PT 151 Dry
PT 361 Dry
Turbomolecular pump TURBOVAC
High vacuum connection
DN
Pumping speed for N 2 l x s -1
Compression for N 2 /H 2
Speed of the TURBOVAC
rpm
Scroll vacuum pump
SCROLLVAC
Nominal pumping speed
(DIN 28 400)
m 3 x h -1 (cfm)
Exhaust connection
DN
Attainable ultimate pressure
with FPM (FKM) gasket mbar (Torr)
with Cu seal
mbar (Torr)
Cooling water consumption
Cooling water connection,
hose nozzle, outside dia.
Power consumption
Main supply
EURO version
US version
Dimensions (W x H x D)
Weight, approx.
l/h
mm (in.)
kW
151 151 361 361
100 ISO-K 100 CF 100 ISO-K 100 CF
145 145 345 345
> 10 9 8.5 x 10 2 > 10 9 3.5 x 10 3
50 000 50 000 50 000 50 000
SC 5 D SC 5 D SC 15 D SC 15 D
15 15 30 30
16 KF 16 KF 25 KF 25 KF
10 -8 (0.75 x 10 -8 ) 10 -8 (0.75 x 10 -8 ) 10 -8 (0.75 x 10 -8 ) 10-8 (0.75 x 10 -8 )
– 10 -10 (0.75 x 10 -10 ) – 10 -10 (0.75 x 10 -10 )
20 20 20 20
11 (0.43) 11 (0.43) 11 (0.43) 11 (0.43)
0.7 0.7 1.5 1.5
230 V, 50 Hz 230 V, 50 Hz 230 V, 50 Hz 230 V, 50 Hz
115 V, 60 Hz 115 V, 60 Hz 115 V, 60 Hz 115 V, 60 Hz
mm 500 x 890 x 484 500 x 890 x 484 500 x 890 x 484 500 x 890 x 484
(in.) (19.69 x 35.04 x 19.06) (19.69 x 35.04 x 19.06) (19.69 x 35.04 x 19.06) (19.69 x 35.04 x 19.06)
kg (lbs) 51 (112.6) 51 (112.6) 80 (176.6) 80 (176.6)
Ordering Information
PT 151 Dry
PT 361 Dry
Turbomolecular pump system
230 V, 50/60 Hz / 115 V, 60 Hz
with Schuko plug
DN 100 ISO-K
DN 100 CF
Part No. 502 440 Part No. 502 442
Part No. 502 441 Part No. 502 443
Mains cord
CH
UK
US/Japan
US/Japan
Air cooling unit
115 V
230 V
230 V, 50 Hz
230 V, 50/60 Hz
230 V, 50/60 Hz
115 V, 60 Hz
Part No. 200 81 099 Part No. 200 81 099
Part No. 200 81 097 Part No. 200 81 097
Part No. 200 81 141 Part No. 200 81 141
Part No. 200 81 090 Part No. 200 81 090
Part No. 894 08 Part No. 894 08
Part No. 855 31 Part No. 855 31
Flange heater, DN 100 CF
115 V
230 V
Venting valve, DN 10 KF
manually operated
Power failure venting valve, DN 10 KF
024 V DC
230 V, 50/60 Hz
Purge gas and venting valve, 230 V
0.2 mbar x l x s -1
Part No. 854 28 Part No. 854 28
Part No. 854 27 Part No. 854 27
Part No. 173 24 Part No. 173 24
Part No. 174 46 Part No. 174 46
Part No. 174 26 Part No. 174 26
Part No. 855 19 Part No. 855 19
Control unit for turbomolecular pump systems
(see Section “Accessories”)
upon request
upon request
Oerlikon Leybold Vacuum Full Line Catalog
21 C10