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Gate Resistance Influence on Integrated Circuits in MESFET ...

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SETIT2007<br />

f<strong>in</strong>gers. The sk<strong>in</strong> effect will present the frequency<br />

resp<strong>on</strong>se <strong>in</strong> the metallizati<strong>on</strong> access resistance of the<br />

gate <strong>in</strong> AC regime [4]:<br />

r<br />

f<br />

( f ) = rga<br />

1<br />

(3)<br />

fse<br />

ae<br />

ga<br />

+<br />

(b)<br />

Figure 5 Parameters of <strong>MESFET</strong>; (a) geometrical<br />

parameters; (b) equivalent circuit <strong>in</strong> high frequency<br />

Where: N is the dop<strong>in</strong>g density <strong>in</strong> the N layer of the<br />

channel, W is the thickness of the layer N of the<br />

channel under the gate, Z G is the width of the gate, L G<br />

is the length of the metal gate, L SG is the separati<strong>on</strong><br />

gate - source, L GD is the separati<strong>on</strong> gate – dra<strong>in</strong>, W R the<br />

depressi<strong>on</strong> depth of the gate, Ws is the exhausti<strong>on</strong><br />

depth of the surface, d is the depth of exhausti<strong>on</strong>, h is<br />

the height of the gate, X is the extensi<strong>on</strong> of the gate<br />

charge space under the gate.<br />

4. <str<strong>on</strong>g>Influence</str<strong>on</strong>g> of gate resistance <strong>on</strong> the<br />

<strong>in</strong>put impedance<br />

<str<strong>on</strong>g>Resistance</str<strong>on</strong>g> associated to the gate metallizati<strong>on</strong><br />

deteriorates the microwaves and commutati<strong>on</strong><br />

performances. To carry out weak noise <strong>MESFET</strong>, it is<br />

important to decrease the gate resistance. This gate<br />

resistance Rg was identified a l<strong>on</strong>g time as a parasitic<br />

parameter which deteriorates the noise factor and<br />

limits the power ga<strong>in</strong> of the Schottky-barrier-gate<br />

<strong>MESFET</strong>S (SBG<strong>MESFET</strong>s). We add a metallizati<strong>on</strong><br />

resistance: Rga to Rg as shown <strong>on</strong> the figure 5-b .this<br />

gate metallizati<strong>on</strong> resistance c<strong>on</strong>tributes clearly to Rg<br />

[8]. It is given <strong>in</strong> a distributed way, and c<strong>on</strong>firms the<br />

effect of the resistance end to end of the gate f<strong>in</strong>ger:<br />

rga<br />

Wg<br />

Rga = (1)<br />

3Nk²<br />

To dist<strong>in</strong>guish this well-known resistance from the<br />

comp<strong>on</strong>ent <strong>MESFET</strong> which is the aim of this article,<br />

we presented this access resistance al<strong>on</strong>g the gate<br />

f<strong>in</strong>ger rga ,it is then the end to end normal<br />

metallizati<strong>on</strong> resistance given by:<br />

<br />

r<br />

ga<br />

= (2)<br />

A<br />

gx<br />

Where is the metal resistivity of gate , and Agx is<br />

the gate secti<strong>on</strong> . Wg is the gate and Nk is the number<br />

of parallel f<strong>in</strong>gers. Because the undercarriage length of<br />

door is narrowed with major submicr<strong>on</strong>ic dimensi<strong>on</strong>s it<br />

is usual to limit the <strong>in</strong>crease <strong>in</strong> the rga by us<strong>in</strong>g a<br />

formed cut T, and to <strong>in</strong>crease the number of parallel<br />

where the frequency characteristic for the<br />

beg<strong>in</strong>n<strong>in</strong>g of the significant sk<strong>in</strong> effect is:<br />

fse<br />

r<br />

ga<br />

= β<br />

(4)<br />

µo<br />

µo = 4.10-7 Vs/Am is the free space permeability,<br />

and a geometrical factor, roughly equal to 3,5 for a<br />

cross secti<strong>on</strong> of the cross-secti<strong>on</strong>. For a rga=150<br />

/mm, the fse is 420 GHz. Although can be reduced<br />

by the presence of a plane <strong>on</strong> the ground [5], the sk<strong>in</strong><br />

effect seems certa<strong>in</strong>ly to be negligible. We prove<br />

numerically that the sk<strong>in</strong> effect is <strong>in</strong>deed negligible,<br />

and that eqns. (3) - (4) are precise and adapted for<br />

SBG<strong>MESFET</strong>. Another resistive comp<strong>on</strong>ent <strong>on</strong> the<br />

<strong>in</strong>put side of the <strong>MESFET</strong> is the fill<strong>in</strong>g resistance Ri<br />

(or Rgs) for the gate - source capacity. This parameter<br />

is often hard to separate from Rg dur<strong>in</strong>g the extracti<strong>on</strong><br />

of the equivalent circuit [6]. However, Ri is between a<br />

sixth and a fifth of the channel resistance for a used<br />

zero-dra<strong>in</strong>-polarizati<strong>on</strong> [7].<br />

1 Lg Idmax Lg.vsat<br />

Ri Ro( )( ) =<br />

5 Wg Id 5µId<br />

= (5)<br />

Where Ro is the plate resistance and Idmax the<br />

current saturati<strong>on</strong> of the channel, vsat is the speed of<br />

saturati<strong>on</strong>, and µ the mobility. The factor 1/5 <strong>in</strong> eqn.<br />

(5) is the higher limit of quantity:<br />

(R11-R12)/ (I11-I12) 2<br />

Where Rij and Iij parameters determ<strong>in</strong>e the Y<br />

parameters, and are derived from the waves l<strong>in</strong>ear<br />

equati<strong>on</strong> of the <strong>MESFET</strong> <strong>in</strong>side [8]. It expla<strong>in</strong>s both<br />

the distributed nature of Ri, and the change of the<br />

electr<strong>on</strong> c<strong>on</strong>centrati<strong>on</strong> of the sheet al<strong>on</strong>g the channel.<br />

Both eqns. (1) and (5) foresee very small resistances,<br />

often much smaller than the values produced by<br />

methods of extracti<strong>on</strong> of equivalent circuit. It is an<br />

<strong>in</strong>dicati<strong>on</strong> of an additi<strong>on</strong>al comp<strong>on</strong>ent <strong>in</strong> the <strong>in</strong>put<br />

resistance, whose physics must be established <strong>in</strong> order<br />

to understand better the <strong>MESFET</strong> comp<strong>on</strong>ent, and to<br />

produce measurable models. To f<strong>in</strong>ish the study of<br />

effect of the c<strong>on</strong>duct<strong>in</strong>g semi metal <strong>in</strong>terface, we add a<br />

comp<strong>on</strong>ent to Rg resistance [10] which def<strong>in</strong>es the<br />

gate resistance f the normalized <strong>in</strong>terfacial resistance<br />

.This resistance is def<strong>in</strong>ed as a c<strong>on</strong>tact resistance with<br />

the substrate, rgi be<strong>in</strong>g the normal gate resistance of<br />

the normalized <strong>in</strong>terfacial resistance.<br />

Rgi<br />

r<br />

gi<br />

= (6)<br />

WgLg<br />

Simulati<strong>on</strong> AC of the <strong>in</strong>fluence of the gate<br />

resistance and gate length <strong>on</strong> the <strong>in</strong>put and output<br />

- 5 -

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