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Speciation of Individual Mineral Particles of Micrometer Size by the ...

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Low-Z particle EPMA (Electron Probe X-ray<br />

Microanalysis) for single particle analysis<br />

1. SEM-EDX (Scanning Electron Microscopy –<br />

Energy Dispersive X-ray Spectrometer)<br />

- <strong>Individual</strong> Particle Analysis<br />

* shape and size : secondary / backscattered electron images<br />

* chemical compositions : X-ray spectrum<br />

2. Ultra-thin window EDX for low-Z elements detection (e.g., C, N, O, F)<br />

3. Metallic collecting substrates for minimizing charging effect (e.g., Ag, Al)<br />

4. Monte Carlo calculation for Quantification<br />

5. Chemical speciation <strong>of</strong> aerosol particles – Expert System

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