Rare-Earth Industry Overview and Defense Applications by ... - SME
Rare-Earth Industry Overview and Defense Applications by ... - SME
Rare-Earth Industry Overview and Defense Applications by ... - SME
You also want an ePaper? Increase the reach of your titles
YUMPU automatically turns print PDFs into web optimized ePapers that Google loves.
Chemical Mechanical Polishing (CMP)<br />
also known as Chemical Mechanical Planarization<br />
• Cerium oxide is used<br />
in polishing:<br />
• Semiconductors –<br />
Logic <strong>and</strong> Memory<br />
Storage<br />
• Dielectrics<br />
• STI or Shallow<br />
Trench Isolation -<br />
Transistors<br />
Credit: Alpsitec