Curlew brochure - SPECS Surface Nano Analysis GmbH

Integration of Scanning Probe Microscopy and
Scanning Electron/Ion Microscopy
Key Features
• Sub-Nanometric Height
Resolution in SEM/SAM/FIB
• Closed-Loop Scanning and
Coarse Positioning in 3D
• Automated Tip Replacement
• Kinematic Sample and Tunneling
Tip/AFM Sensor Mount
• HV and UHV Design

Innovation in surface Spectroscopy and
microscopy systems
SPECS leads the way in state-of-the-art
technology for electron spectroscopy and
scanning probe microscopy.
SPECS Surface Nano Analysis GmbH
SPECS headquarters with more than 150
employees is located in the center of Germany’s
capital Berlin with subsidiaries in Switzerland
(SPECS Zurich GmbH) and in the USA (SPECS
Inc.). To be close to our customers we have liason
offices in France and Spain. Furthermore we
are represented all over the globe by our sales
partners.
We are a team of scientists and engineers who
dedicate their knowledge and experience to
the development, design, and production of
instruments for surface science, materials
research, and nanotechnology for more than 25
years.
State-of-the-art scanning
probe microscopy sytems
Our key to success is know-how, experience,
intensive contact with scientists from all over the
world, customer orientation, and reliable quality
control.
Thus, we see ourselves as partner for systems
and components for your research.
Curlew SPM

Curlew SPM
In Situ SPM
The combination of Scanning Probe
Microscopy and Scanning Electron/Auger/
Focused Ion Beam Microscopy is the
perfect complement of imaging speed and
resolution from millimeter field of views
down to the atomic scale.
New Perspectives in Scanning
Probe Microscopy
Microscopy on Different Length
Scales
The Curlew in situ SPM provides the possibility
of analysis, probing, and manipulation of the
same sample feature by SPM and SEM/SAM/
FIB techniques without the need for timeconsuming
feature backtracking. Futhermore, it
adds sub-nanometer height resolution and the
ability to image insulating surfaces to SEM and
FIB systems. The many electron-/ion-matter
interaction signals providing spectroscopic and
crystallographic surface information can be
superimposed with SPM topography data. The
Curlew in situ SPM gives new perspectives
with respect to surface analysis, probing and
manipulation at the nanometer scale.
SEM/SAM/FIB Integration
The Curlew is readily integrated upon the
stage of virtually any SEM/SAM/FIB system and is
compatible with systems operating at ultra-high
vacuum, high vacuum as well as environmental
conditions. In particular the SPM geometry
enables integration with short working distance
SEM/SAM/FIB optics. Standalone SEM/SAM/FIB
imaging resolution and analytical performance
remain uncompromised. For SAM integration
a non-magnetic version of the Curlew SPM is
ideally suited.
Side view of Curlew SPM:
Ideal for integration with
short working distance
SEM/SAM/FIB optics

Multiprobe Station
The Curlew concept is also expandable to a
multiprobe station permitting advanced SPM
and probing experiments with multiple tips to
be combined with SEM vision-controlled tip
navigation.
Sensor Types
The Curlew SPM features a stiff sensor design
based on a ceramic tip holder with conductive
paths for tip/sensor contacting. Manipulation
of tips and sensors is easy and safe. The Curlew
SPM accepts different kinds of electrical sensors
including tunneling tips, Akiyama-Probes
(Nanosensors) as well as quartz-based sensors,
like the SPECS KolibriSensor. All sensors have a
protruding tip that allows for direct SEM visioncontrolled
tip/sensor positioning and control.
Coarse Tip Positioning
The tip is positioned laterally and vertically by
inertial piezo-motors with integrated optical
encoders for closed-loop operation. A compact
parallel kinematic coarse positioning motor
design reduces the mechanical loop from sample
to tip leading to higher stiffness and lower
sensitivity to mechanical vibrations compared to
the conventional stacked motor-axes design.
SPM Scanner
The Z tip scanner and the flexure-based XY
sample stage can be optionally equipped with
capacitive sensors that ensure perfectly linearized
and calibrated closed-loop SPM scanning.
Tip/Sensor Mount
Tips and sensors are rigidly mounted to a
precise kinematic interface between the ceramic
tip holder and the Curlew tip receptor. This
ensures perfect stability as well as enhanced
and reliable performance of oscillating sensors.
The spring-loaded design of the receptor is
completely non-magnetic with a weight of
less than 2 g. Four contact springs provide the
electronic connections to the sensor or tip.
Coaxial cabling and shielding of the contacts
up to the sensor/tip minimize cross-talk and
interference from the environment.
The Curlew SPM is
available with different
kinds of tips and sensors,
like the Akiyama-Probe,
a self-sensing and selfactuating
quartz tuning
fork based cantilever
sensor (left) and tungsten
or Pt/Ir tunneling tips
(right). Additional sensors
are available on request.
Curlew SPM

Sample Mount
5
The sample holder is kinematically mounted on
three ruby spheres in three radial grooves (Maxwell
geometry). This assures a mechanically firm and
perfectly defined position. Electrical biasing
of the sample is available via shielded cables.
Various sample holders can be installed in
the Curlew sample receptor. The basic design
provides an adapter for standard SEM pin stub
holders for convenient mounting and storage of
samples.
Tip/Sensor Replacement
The Curlew SPM features sample and tip/
sensor replacement inside a UHV chamber or
through a load-lock chamber using a transfer
rod or a wobble stick. The automated tip/sensor
replacement procedure is highly user-friendly
and safe. The innovative design features tip
mounting and unmounting without any friction
from metallic springs or contacts.
The kinematic sample
receptor-mount of the
Curlew SPM (top) enables
tip/sensor replacement by
means of a user-friendly
tip/sensor transfer shuttle
(bottom).

Nanonis SPM Control System
The Nanonis Control System offers the highest
resolution, lowest noise and the greatest
flexibility in SPM. All SPM modes are available
and the control system is readily expandable for
multi-tip control.
The Curlew Control System consists of:
• Nanonis SPM Control System Base Package
• Nanonis Oscillation Controller
• FEMTO preamplifier kit
• High voltage amplifier and controller for
scanners
• High voltage amplifier and controller for
coarse approach motors
Integration into Analytical
Instruments
Live Performance of Curlew SPM
The Curlew is a compact and versatile SPM,
enabling integration into almost any kind of SEM,
SAM or FIB and even into many other analytical
instruments like SIMS. Successful integration into
Tescan and JEOL microscopes has already been
proven.
AFM height image (6 μm x 6 μm) of a calibration
grating measured with an Akiyama-Probe sensor
in FM-AFM mode. The height scale is blown up by
20 times relative to the lateral scale. The data was
acquired during a live demonstration at the M&M
conference 2011 in Nashville, USA.
20
15
Z[nm]
10
5
-0
-0
1
2
3
X[µm]
4
5
6
AFM height profile along the line indicated above.
Curlew SPM

Curlew SPM Operated inside SEM
Specifications
7
SEM images of Akiyama-Probe cantilever tip
above patterned surface prepared by SEM e-beam
lithography. The AFM tip is navigated to the region
of interest by real-time SEM imaging.
Curlew SPM Head
XY Scan Range (Sample)
Z Scan Range (Tip)
XYZ Sensor Resolution
(Closed-Loop Option)
Coarse Tip Positioning
Range
Coarse Tip Positioning
Min. Step Size
Coarse Tip Positioning
Absolute Accuracy
UHV Compatibility
10 μm x 10 μm,
50 μm x 50 μm optional
2 μm,
8 μm optional
< 100 pm rms
@ 1 kHz BW
± 5 mm (X,Y), 5 mm (Z)
Approx. 30 nm
± 5 μm
Bakeout Temperature 120 °C
Load-Lock Compatibility
SPM Tip/Sensor
Weight
Temperature Control
optional
< 2 x 10 -9 mbar
Sample and SPM tip/
sensor replacement via
load-lock
Etched and cut metal
wire tunneling tips.
Quartz tuning fork based
cantilever AFM sensor
(Akiyama- Probe).
Approx. 350 g
Resistive heater and
temperature sensor
integrated in the SPM
chassis.
Separate temperature
controller for thermal
stabilization of SPM head
at room-temperature.
Customization is the key to its flexibility.
Please discuss your individual needs with us.
AFM topography data in the region of interest
(4 μm x 4 μm) measured inside the SEM.
Dimensions of standard Curlew SPM stage

SPECS Surface Nano Analysis GmbH
Voltastrasse 5
13355 Berlin / Germany
www.specs.com
T +49 30 46 78 24-0
F +49 30 46 42 083
E support@specs.com