Tutorial - Semiconductor Wafer Test Workshop
Tutorial - Semiconductor Wafer Test Workshop
Tutorial - Semiconductor Wafer Test Workshop
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June 9-12, 2013 San Diego, CA, USA<br />
<strong>Tutorial</strong> (Part 2): Methods of analyzing/predicting scrub margin for pads and<br />
bump applications<br />
The tutorial will discuss methods of specifying and measuring scrub capability of probe cards.<br />
The material will compare and contrast the commonly used scrub margin approach of<br />
establishing specifications for various probe card elements and worst-case stack-up of those<br />
probe card parameters with a more direct scrub mark measurement approach and quantification<br />
of scrub capability.<br />
Presenters: Tom Watson and Amy Leong<br />
Tom Watson is a currently a FormFactor Manufacturing Fellow having joined FormFactor in<br />
September of 2000. Tom received his bachelor’s degree from the University of California at<br />
Berkeley (Go Bears!) in Electrical Engineering and his master’s degree from the University of<br />
Santa Clara also in Electrical Engineering. His work history includes 13 years at IBM where he<br />
held various equipment, process engineering, and managerial positions in the disk storage<br />
technology division and 8 years at thin film disk manufacturer Komag Inc., where he was<br />
responsible for test engineering and later product engineering and product qualification. Since<br />
joining FormFactor, Tom has served in multiple areas including Development Program<br />
Management, Assembly and <strong>Test</strong> Engineering, Device Engineering, Product Performance, and<br />
Product Integration. Additionally, Tom developed and delivers statistical process control training<br />
within FormFactor.<br />
Amy Leong is currently Vice President of Marketing at Form Factor MicroProbe Business<br />
Unit. She has been with Form Factor and MicroProbe for more than 8 years. Prior to<br />
FormFactor, Ms. Leong worked in a variety of semiconductor process engineering and product<br />
marketing roles at KLA-Tencor, IBM and Gartner. Ms. Leong is part of SWTW program<br />
committee, and a regular presenter at the conference. Ms. Leong holds an M.S. in Material<br />
Science and Engineering from Stanford University and a B.S. in Chemical Engineering from the<br />
University of California, Berkeley.<br />
SWTW 2013 Office<br />
1 Marsh Elder Lane, Savannah, GA 31411<br />
Phone: 540-937-5066 • Fax: 540-937-7848
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