A Brief MEMS History - Caltech Micromachining Laboratory
A Brief MEMS History - Caltech Micromachining Laboratory
A Brief MEMS History - Caltech Micromachining Laboratory
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Surface-micromachined<br />
Coriolis-Force Gyroscope<br />
S = 2,200 μV ° /sec<br />
(Juneau et. al., UC Berkeley, Transducers’97)<br />
Others: Boeing, JPL, Draper Lab, Analog Devices, Samsung<br />
Electronics, IMIT (in Germany), etc.
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