A Brief MEMS History - Caltech Micromachining Laboratory
A Brief MEMS History - Caltech Micromachining Laboratory
A Brief MEMS History - Caltech Micromachining Laboratory
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A <strong>Brief</strong> <strong>MEMS</strong> <strong>History</strong><br />
BJT<br />
Transistor<br />
IC<br />
Anodic Bonding<br />
HNA<br />
Pressure Sensor<br />
(Honeywell)<br />
EDP<br />
Si as a mechanical material (Petersen)<br />
Thermo-pneumatic valve (Redwood)<br />
Si Pressure<br />
Sensor<br />
(Motorola)<br />
KOH<br />
SFB Pressure Sensor<br />
(NovaSensor)<br />
SFB<br />
TMAH<br />
DRIE !!<br />
XeF 2<br />
/BrF 3<br />
1950 1960 1970 1980 1990 2,000<br />
Bio <strong>MEMS</strong><br />
Metal sacrificial<br />
LIGA<br />
process (US Patent)<br />
PolySi beams<br />
RF <strong>MEMS</strong><br />
(Howe, Muller)<br />
Si Gyro (Draper)<br />
DMD (TI)<br />
RGT (Nathanson et al)<br />
ADXL Accelerometer<br />
PolySi Micromotor<br />
(Tai, Muller)<br />
IR imager (Honeywell)<br />
Metal Light Valve (RCA)<br />
PolySi Comb Drive (Tang, Howe)
(100) Example<br />
Silicon Fusion Bonded Pressure Sensor<br />
Fabrication Process<br />
(Petersen et. al., NovaSensor, 1988)
(110) Example<br />
Area = 1 cm 2<br />
• W w = W c = 57 μm, Z = 365 μm<br />
• Water Flow: 10 cm 3 /s<br />
• Power Dissipation Capability: 600 W/cm 2<br />
• Thermal Resistance: 0.1 °C/W<br />
(Kendall et. al, 1985) (Tuckerman et. al, Standford, 1981)
Deep RIE<br />
• RIE - Dry Plasma-Based Etch<br />
• Deep RIE (STS, Plasma-Therm, Alcatel)<br />
– Excellent Selectivity to Mask Material (>30:1)<br />
– High Etch Rate (1-10 microns/min)<br />
– High Aspect Ratio (>20:1)<br />
20 μm<br />
Trenches - Surface Technology Systems Spring - Klaassen, et al 1995
photo-polymerization<br />
2 microns<br />
acrylate monomer is mixed with AIBN azo initiator, and undergoes photoinduced<br />
free radical polymerization locally, by a deep red 2 photon process
Polysilicon Micromotors<br />
(Tai and Muller, 1989)
<strong>MEMS</strong> For Wireless Communication<br />
Coupling<br />
Springs<br />
Balanced<br />
Electrodes<br />
Balanced<br />
Electrodes<br />
Resonators<br />
Sixth-Order Bandpass Filter with Audio Center Frequency<br />
Fourth-Order<br />
Bandpass Filter<br />
with 71 MHz<br />
Center Frequency<br />
(Ngu, 1999)
gears
Accelerometer Examples<br />
ADXL-50: surface micromachined, integrated<br />
BiCMOS<br />
(Analog Devices, 1995)
Surface-micromachined<br />
Coriolis-Force Gyroscope<br />
S = 2,200 μV ° /sec<br />
(Juneau et. al., UC Berkeley, Transducers’97)<br />
Others: Boeing, JPL, Draper Lab, Analog Devices, Samsung<br />
Electronics, IMIT (in Germany), etc.
<strong>MEMS</strong>-based Smart Tires<br />
• Pressure Sensor<br />
• Radio chip<br />
•ID<br />
•Pressure warning<br />
(Goodyear, 1998)
HP <strong>MEMS</strong> Inkjet Nozzle
HP <strong>MEMS</strong> Inkjet Nozzle
(IBM, 1997-)
cantilever for DMD
Digital Light Processing<br />
L. J. Hornbeck<br />
Digital Micromirror Device (DMD)<br />
Resolution: 848 ´ 600<br />
Pixel Size: 16 μm´16 μm<br />
Switching Time: 2 ms<br />
(TI, 1996)
Micro-Contact Printing (μCP)
Micro-Transfer Molding (μTM)
io<strong>MEMS</strong> for neural circuits
medical applications in bio<strong>MEMS</strong><br />
www.chiprx.com<br />
smart pill
fluorescent flow<br />
cytometry<br />
http://thebigone.caltech.edu/quake/research/dnasort.html
<strong>MEMS</strong> can be Low Cost:<br />
Top <strong>MEMS</strong> Products (Forbes 4/28/2008)<br />
HP is the Top <strong>MEMS</strong><br />
Manufacturer in 2007<br />
($850M)<br />
DLP<br />
Accelerometers<br />
20M<br />
Units<br />
2007<br />
<strong>MEMS</strong> Microphones<br />
Wu-3<br />
Gyroscopes<br />
©2009. University of California<br />
Tire Pressure Sensors
Many Similar Products<br />
Optoma (joint launch with Apple)<br />
VGA, 11 lumens<br />
Samsung Pico Projector Phone<br />
(DLP)<br />
Wu-8<br />
©2009. University of California
E-Ink<br />
Electronic Paper Display (EPD)<br />
www.eink.com/<br />
Portable<br />
Reader<br />
(600x800,<br />
167 ppi)<br />
Amazon<br />
Kindle<br />
Flexible<br />
Wall Clock<br />
Citizen<br />
Wu-38<br />
©2009. University of California
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