Russ Doerner - Controlled Fusion Atomic Data Center
Russ Doerner - Controlled Fusion Atomic Data Center
Russ Doerner - Controlled Fusion Atomic Data Center
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If alloy formation (carbide or beryllide) is responsible for Be<br />
layers, then subsequent Be deposition should be quickly<br />
re-eroded. Be alloy layers should be thin.<br />
C sample, 175°C, f Be<br />
~0.15%<br />
W sample (AES data)<br />
f Be<br />
= 0.1%, 5000 sec., T W<br />
= 300°C<br />
100<br />
90<br />
Composition (at. %)<br />
80<br />
70<br />
60<br />
50<br />
40<br />
30<br />
20<br />
10<br />
0<br />
Be (at %)<br />
O (at %)<br />
W (at %)<br />
0 5 10 15 20<br />
Sputtering Time (min)<br />
0 10 20 30 40<br />
Estimated Thickness (nm)<br />
50 60<br />
UCSD<br />
University of California San Diego<br />
R. <strong>Doerner</strong>, March 22, 2005<br />
PSIF workshop, ORNL