12.11.2014 Views

Russ Doerner - Controlled Fusion Atomic Data Center

Russ Doerner - Controlled Fusion Atomic Data Center

Russ Doerner - Controlled Fusion Atomic Data Center

SHOW MORE
SHOW LESS

You also want an ePaper? Increase the reach of your titles

YUMPU automatically turns print PDFs into web optimized ePapers that Google loves.

If alloy formation (carbide or beryllide) is responsible for Be<br />

layers, then subsequent Be deposition should be quickly<br />

re-eroded. Be alloy layers should be thin.<br />

C sample, 175°C, f Be<br />

~0.15%<br />

W sample (AES data)<br />

f Be<br />

= 0.1%, 5000 sec., T W<br />

= 300°C<br />

100<br />

90<br />

Composition (at. %)<br />

80<br />

70<br />

60<br />

50<br />

40<br />

30<br />

20<br />

10<br />

0<br />

Be (at %)<br />

O (at %)<br />

W (at %)<br />

0 5 10 15 20<br />

Sputtering Time (min)<br />

0 10 20 30 40<br />

Estimated Thickness (nm)<br />

50 60<br />

UCSD<br />

University of California San Diego<br />

R. <strong>Doerner</strong>, March 22, 2005<br />

PSIF workshop, ORNL

Hooray! Your file is uploaded and ready to be published.

Saved successfully!

Ooh no, something went wrong!