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ISA CXO Conclave<br />

Nov 5, 2012 – New Delhi<br />

Nov 7, 2012 – Bangalore<br />

Role of Semiconductor Fab in<br />

Electronic Systems Design &<br />

Manufacturing<br />

Dr. Gary Patton<br />

Vice President, IBM Semiconductor<br />

Research & Development Center<br />

IEEE Fellow<br />

1<br />

© 2012 IBM Corporation


Chip Technology is Changing the World<br />

4 billion<br />

Power<br />

30 billion<br />

Number of RFID tags that will be embedded into Server/Network<br />

our world and across entire ecosystems<br />

Number<br />

by<br />

of<br />

2010<br />

connected devices in the world,<br />

constituting an “internet” of things<br />

2 billion<br />

Digital<br />

Camcorder<br />

Smart<br />

Tablet<br />

Video<br />

Game<br />

Devices<br />

1 trillion<br />

225,000 Data terabytes/month<br />

Processing<br />

Navigation<br />

System<br />

Estimated number of mobile<br />

Global mobile data traffic … more than 2x growth<br />

phone subscribers worldwide Digital TV over 2009, growing at 10x rate of voice traffic<br />

100 per day<br />

Number of texts the average<br />

Estimated number Phoneof people<br />

13- Speed to 17-year-old sends & receives<br />

on the internet by 2011<br />

Internet of Things<br />

ISA CXO Conclave –Nov 2012 2


Recent Smart phone / tablet phenomenon is fueling the<br />

mobile transformation<br />

Cell Phones Now Used More for Data<br />

Than for Calls 4<br />

“Instead of talking ….people are using<br />

it to …browse the web, listen to music,<br />

watch TV, play games, send e-mail and<br />

text messages.”<br />

Users expect mobile phones to<br />

replace GPS systems, MP3 players,<br />

and/or digital cameras by 2015. 5<br />

They want the ability to monitor and<br />

manage our home’s electricity use<br />

via mobile phones. 5<br />

Global Health Apps market to grow 24%<br />

Annually through 2014; Aged patients as well<br />

as patients suffering from chronic diseases<br />

prefer remote patient monitoring 2<br />

2<br />

1<br />

One of every three college students and employees surveyed<br />

Globally believes the Internet is a fundamental<br />

resource for the human race -- as important as air, water, food and shelter<br />

1. http://www.youtube.com/watch?v=lFZ0z5Fm-Ng&NR=1<br />

2. http://www.mobilehealthcaretoday.com/news/2011/09/<br />

3. Cisco connected world technology report 9/2011<br />

4. http://www.nytimes.com/2010/05/14/technology/personaltech/14talk.html?partner=rss&emc=rss<br />

5. “Opportunity Calling – The Future of Mobile Communications”, Oracle, 9/ 2010<br />

ISA CXO Conclave –Nov 2012 3<br />

3


Accelerating Advances in Technology<br />

Moore’s Law: doubling of chip<br />

integration every 12-18 months<br />

ISA CXO Conclave –Nov 2012 4


Exponential Technology Change<br />

If automobiles were like chips:<br />

1970 - 6 KM per Liter of gasoline<br />

1975 - 60 KM per Liter<br />

1980 - 600 KM per Liter<br />

1990 - 60,000 KM per Liter<br />

2000 - 6 Million KM per Liter<br />

ISA CXO Conclave –Nov 2012 5


Driving Force: Economics<br />

• Business Dynamics of the Semiconductor Industry in<br />

a 10 Year Cycle<br />

SCALING<br />

Exponential Growth in<br />

Investment in R&D and<br />

Manufacturing<br />

4x in 10 Years<br />

Exponential<br />

Improvement in<br />

Cost/Function:<br />

100x in 10 Years<br />

ELASTICITY<br />

Exponential Growth<br />

in Consumption of CEs<br />

400x in 10 Years<br />

Exponential Growth<br />

in Revenue:<br />

4x in 10 Years<br />

ISA CXO Conclave –Nov 2012 6


Advanced Technology for a wide range of applications<br />

MD’s selected semiconductor<br />

market segments (2011 total: $16.4B)<br />

Dollars (Billions)<br />

$18<br />

$16<br />

$14<br />

$12<br />

$10<br />

$8<br />

$6<br />

$4<br />

$2<br />

$0<br />

Auto<br />

A&D<br />

DP<br />

Industrial<br />

2009 2010 2011<br />

Wired<br />

Consumer<br />

Wireless<br />

These three<br />

segments make<br />

up 70% of MD’s<br />

OEM opportunity.<br />

Servers<br />

<strong>Smartphone</strong>s<br />

Routers &<br />

Switches<br />

WiFi, WiMAX<br />

Infrastructure<br />

Wireless<br />

Base Stations<br />

Storage<br />

TV Tuners,<br />

Video Processors<br />

Video<br />

Game Consoles<br />

Radio Network<br />

Controllers<br />

Optical<br />

Networks<br />

Communication<br />

Satellites<br />

7<br />

8 November 2012 IBM Confidential


End‐to‐end View of Semiconductor Application Market<br />

<strong>Smartphone</strong>s<br />

Game Consoles<br />

Internet of Things<br />

Smart<br />

surveillance<br />

Smart<br />

thermostats<br />

Smart<br />

lighting<br />

Radio<br />

Access<br />

Network<br />

Base<br />

station<br />

Backhaul<br />

(Copper,<br />

µwave<br />

or fibre)<br />

Radio<br />

Network<br />

Controller<br />

Wireless<br />

Core Network<br />

Mobile Operator<br />

Data Centers<br />

Internet/<br />

VPN<br />

Smart<br />

appliances<br />

Example applications<br />

Custom Processors<br />

Custom logic<br />

Specialty foundry<br />

Common Platform technology<br />

IBM systems & software<br />

ISA CXO Conclave –Nov 2012 8


<strong>Semiconductors</strong> in Servers and Supercomputers<br />

7 Oct 2009: Pres. Obama presented<br />

the 2008 National Medal of<br />

Technology and Innovation to IBM,<br />

the only company so honored, for<br />

the Blue Gene family of<br />

supercomputers…<br />

IBM Z<br />

Mainframe<br />

9<br />

ISA CXO Conclave –Nov 2012<br />

9


<strong>Semiconductors</strong> <strong>Inside</strong> a <strong>Smartphone</strong><br />

Power<br />

control<br />

PA<br />

PA<br />

Antenna tuner<br />

Switch<br />

PA<br />

PA<br />

Cellular front-end module (FEM)<br />

• Increasing bandwidth driven by new standards (4G/LTE)<br />

• Increasing complexity driving component integration and<br />

performance<br />

Key technologies:<br />

•RF CMOS, RF SOI, & SiGe<br />

Cellular transceivers /<br />

Analog baseband<br />

Wireless SoC<br />

transceiver<br />

(GPS, BT, Wi-Fi)<br />

TV tuner<br />

Power<br />

management<br />

Wi-Fi<br />

switch /<br />

LNA<br />

PA<br />

Digital baseband<br />

processors<br />

Applications<br />

processors<br />

Memory<br />

Wi-Fi FEM & TV Tuner<br />

• Becoming a standard on most<br />

phones to help offload data<br />

demand on base stations<br />

Key technologies:<br />

•RF CMOS, RF SOI, & SiGe<br />

Processor back-end module<br />

& Power Management<br />

Key technologies:<br />

•32/28 nm HKMG<br />

•HV CMOS<br />

*IBM MD Marketing estimates extrapolated from IBS<br />

12-11 NLT Foundry Mkt Trends data & IDC stats.<br />

ISA CXO Conclave –Nov 2012 10


<strong>Semiconductors</strong> <strong>Inside</strong> a <strong>Smartphone</strong><br />

32nm LP High‐k Metal Gate First Process<br />

Jointly developed with IBM<br />

Enabled to deliver twice the logic density of 45nm processes<br />

while maintaining low power, making it ideal for mobile applications<br />

Source: http://www.samsung.com/global/business/semiconductor/minisite/Exynos/products4quad.html<br />

11<br />

8 November 2012 IBM Confidential<br />

ISA CXO Conclave –Nov 2012 11


Classical Scaling and Reality<br />

• To maintain generational performance gains, supply voltage is not scaled<br />

ideally, leaving us with major power issues<br />

Voltage<br />

V / <br />

Ideal Scaling<br />

n+<br />

source<br />

tox/<br />

GATE<br />

WIRING<br />

n+<br />

drain<br />

W/<br />

L/<br />

xd/<br />

p substrate, doping *NA<br />

> 1<br />

Reality Scaling<br />

Voltage<br />

V / 1/2<br />

tox/<br />

n+<br />

source<br />

1/2<br />

GATE<br />

L/<br />

n+<br />

drain<br />

p substrate, doping *NA<br />

WIRING<br />

W/<br />

xd/<br />

gate<br />

source SiO 2 drain<br />

n+ channel n+<br />

p-type substrate<br />

Oxide down to only<br />

4 monolayers<br />

SCALING:<br />

Channel L L/<br />

Voltage: V/<br />

Oxide: tox /<br />

Wire width: W/<br />

Gate width: L/<br />

Diffusion: xd /<br />

Substrate: * NA<br />

On Current: <br />

RESULTS:<br />

2<br />

Higher Density: ~<br />

Higher Speed: ~<br />

2<br />

Power/ckt: ~1/<br />

Electric Field 1<br />

Power Density: ~1<br />

SCALING:<br />

Channel L L/<br />

1/2<br />

Voltage: V/<br />

1/2<br />

Oxide: tox /<br />

Wire width: W/<br />

Gate width: L/<br />

Diffusion: xd /<br />

Substrate: * NA<br />

On Current: 1/2<br />

<br />

RESULTS:<br />

2<br />

Higher Density: ~<br />

Higher Speed: ~<br />

Power/ckt: ~1/<br />

1/2<br />

Electric Field ~<br />

Power Density: ~<br />

Innovation, scaling, and power to drive performance !<br />

12


CMOS Scaling Realities: Pitch Degradation<br />

Significant innovation in performance‐enhancing elements required<br />

Node<br />

(nm)<br />

PC Pitch<br />

(m)<br />

180 0.7<br />

130 0.5<br />

90 0.35<br />

65 0.23<br />

45 0.18<br />

32 0.13<br />

22 0.1<br />

Relative Performance<br />

1.40<br />

1.35<br />

1.30<br />

1.25<br />

1.20<br />

1.15 Scaling In The Past…<br />

1.10<br />

1.05<br />

1.00<br />

0.95<br />

0.90<br />

0.85<br />

0.80<br />

Higher Capacitance<br />

Reduced Stress<br />

Scaling Now<br />

Channel Scaling<br />

High-k / Metal Gate<br />

Body Controlled Devices<br />

Reduced Gate Height<br />

Advanced BEOL Dielectric<br />

Higher Resistance<br />

Scaling<br />

Requirements<br />

ISA CXO Conclave –Nov 2012 13


Materials Innovations : Increased Complexity<br />

•Elements Employed in Silicon Technology<br />

Before 90’s<br />

Since the 90’s<br />

Beyond 2006<br />

ISA CXO Conclave –Nov 2012 14


Silicon Technology Roadmap<br />

• Major technology innovations “saturate” after about a decade<br />

• “Disruptive” Innovations will enable the next decades of progress<br />

Nanowire devices,<br />

3D multi-chip stacking &<br />

Photonics<br />

Performance, Density<br />

Planar CMOS<br />

Planar CMOS w/<br />

material & memory<br />

innovations<br />

3D Devices & 3D chip<br />

stacking, Adv. Power Mgt,<br />

Design-Tech Co-Optimization<br />

Emerald<br />

eDRAM<br />

Sapphire<br />

eDRAM<br />

Package<br />

Bipolar<br />

Bipolar<br />

Power<br />

Limit<br />

Gate<br />

Oxide<br />

Limit<br />

Planar<br />

Device<br />

Limit<br />

1980 1990 2000 2010 2020<br />

Atomic<br />

Dimension<br />

Limit<br />

ISA CXO Conclave –Nov 2012 15


Changing Innovation Requirements<br />

Atoms<br />

still don’t<br />

scale<br />

Traditional scaling is reaching its limits…but the<br />

economics of Moore’s Law are still holding…<br />

Yes, scaling<br />

can still drive<br />

down cost<br />

BUT<br />

It’s exponentially<br />

more costly<br />

to develop<br />

Continued advances mean changing the way we think about innovation<br />

Innovation<br />

Technical Innovation<br />

Business Model Innovation<br />

• Material & Process innovation must be able<br />

to counter the limits of traditional scaling<br />

• Long-term R&D focus/investment needed to<br />

drive this innovation and sustain roadmap<br />

• Design technology must be able to support &<br />

leverage materials and process innovation<br />

(Design-Technology Co-Optimization)<br />

• Collaborative R&D replaces independent<br />

R&D<br />

• Collaboration needs to include all functions<br />

(semiconductor manufacturers, equipment<br />

vendors, & material suppliers)<br />

• Shared investments / learning fosters<br />

breakthroughs beyond what would be<br />

possible for a single company / function<br />

ISA CXO Conclave –Nov 2012 16


Elements of an Open Collaborative Ecosystem:<br />

IBM Micro<strong>electronics</strong> Example<br />

• Mission: Provide world class semiconductor products<br />

through research, development, and manufacturing<br />

excellence to enable IBM systems and clients<br />

• Semiconductor Manufacturing Capabilities:<br />

– 200mm Manufacturing: 250nm+, 180nm, 130nm, 90nm nodes<br />

– 300mm Manufacturing: 90nm, 65nm, 45nm, 32nm nodes<br />

– Packaging: TSV 3D, flip chip, chip package interaction, Pb Free<br />

– Mask House: Capability for manufacturing nodes and advanced<br />

development<br />

– Yield / Factory Automation Software<br />

– Environmentally Friendly Manufacturing<br />

– Product Design / EDA capabilities<br />

Burlington, VT: 200mm Dev and Mfg<br />

Fishkill, NY: 300mm Dev and Mfg<br />

Bangalore, India: 200mm/300mm Dev<br />

• Research and Development Capabilities & Model:<br />

– Research and Development: 22nm, 14nm, 10nm =><br />

– World class technology research for materials, process,<br />

equipment, systems, and software<br />

– Collaboration model to create advanced semiconductor and<br />

packaging technologies with a range of partners<br />

• Process: Samsung, ST Micro, Global Foundries,…<br />

• Material: JSR, Rohm and Haas, BASF, etc<br />

• Equipment: Applied Materials, TEL, ASML, etc<br />

• Design / EDA: ARM, Cadence, Synopsis, Mentor Graphics, etc<br />

17 For Discussion Purposes only<br />

Albany NanoTech: 300mm R&D<br />

Watson Research Center (Yorktown,NY)<br />

Almaden Research Center (San Jose, CA)<br />

ISA CXO Conclave –Nov 2012 17


Government & University Partnerships to build Ecosystem:<br />

Albany Nanotech Research Center Example<br />

Litho Technology<br />

Leader<br />

#2 Equipment<br />

Supplier<br />

#1 Equipment Supplier<br />

Other JDA Partners<br />

Other Supplier Donations<br />

Fab Bld/Fit-Up / IMPLSE /<br />

CSR Tools<br />

Lam Research @ ANT<br />

IBM's Pre-T0 Partners<br />

CSR Tool Contributions<br />

(Phase 1, 2 and 3)<br />

Equipment Development Center (EDC)<br />

Other Equipment Supplier<br />

CSR Tool Contributions<br />

ISA CXO Conclave –Nov 2012 18


Innovation, Collaboration, & Government Partnership<br />

IBM Packaging Technology Corridor Example<br />

NY State Partnership<br />

C2MI Center<br />

CNSE CCIC Center<br />

East Fishkill PRDC<br />

IBM Research<br />

•Stand alone Bond and assembly line used to develop and<br />

launch products based upon JDA ecosystem technology<br />

•Focus on Product qualification & Process<br />

optimization for rapid manufacturing scale-up<br />

•Follow Silicon model & create world class packaging<br />

Research facility fostering collaboration between public and<br />

private entities<br />

•Current focus is W2W 3D integration<br />

•World class packaging interconnect and Bond & Assembly<br />

development facility in East Fishkill<br />

•Development of evolutionary and revolutionary<br />

packaging technology<br />

•World wide research across multiple labs, including Watson<br />

(NY), ZRL (Zurich) and TRL (Tokyo), ARL (Austin) and BRL<br />

(Brazil)<br />

•Fundamental research exploring new<br />

materials/process/paradigms<br />

ISA CXO Conclave –Nov 2012 19


IBM Semiconductor Research and Development<br />

Centers ‐ Around the World<br />

Almaden<br />

Malta (GF)<br />

Albany<br />

Fishkill<br />

Yorktown<br />

Bromont<br />

Burlington<br />

Zurich<br />

Crolles, France<br />

(STM)<br />

Korea<br />

(SEC)<br />

Bangalore<br />

IBM Research<br />

IBM SRDC<br />

IBM Teams based at Partner Locations<br />

ISA CXO Conclave –Nov 2012 20


Semiconductor Research & Development Center (SRDC)<br />

Bangalore, India<br />

TCAD Development<br />

Ab-initio Modeling<br />

Compact Modeling<br />

Computational<br />

Lithography<br />

Process & Device Characterization<br />

Process Window Analysis<br />

Fail Rate<br />

Electrical Data vs<br />

Design Electrical / Process Data<br />

Metrology Design / Data Process<br />

Metrology Data<br />

ISA CXO Conclave –Nov 2012<br />

21


Silicon through Systems –India Technology &<br />

Hardware Development<br />

Systems Engineering<br />

• Post Silicon Validation<br />

• Validation Tools Development<br />

• Memory, Processor, System Characterization<br />

• Processor & System Performance Modeling<br />

Core 0<br />

MC<br />

IOs<br />

L2<br />

MCU<br />

CoP<br />

L2<br />

MC<br />

IOs<br />

Core 1<br />

L3B<br />

L3_0<br />

L3_0<br />

L3_0 Controller<br />

L3_1 Controller<br />

L3B<br />

L3_1<br />

L3_1<br />

Core 2<br />

GX<br />

IOs<br />

L2<br />

CoP<br />

GX<br />

L2<br />

GX<br />

IOs<br />

Core 3<br />

Processors and System ASICs<br />

Logic Design and Verification<br />

• Server ASICs<br />

• Server Processors<br />

• Pervasive Design & Verification<br />

Physical Design and Layout<br />

• POWER & System Z processors<br />

Custom Logic – ASICs & IP<br />

• Delivery - ASIC Design Centre<br />

• IP - High Speed Serial Links & Analog Cores, Memory Compilers<br />

• Enablement - Test Manufacturing Data, Foundry / ASIC Enablement & Library Development<br />

EDA<br />

• Physical Design & Timing: Place & Route Flows, Layout Automation, Library charc., Timing tools & methodology<br />

• Front End & Verification: DFT methodology, Functional & Formal Verification debug tools<br />

• Enablement & Support: System Test, Data Management, Customer Support<br />

<strong>Semiconductors</strong><br />

200mm Enablement<br />

* Compact Modeling<br />

* Enablement<br />

Lithography<br />

* Pattern Correction<br />

* OPC Modeling<br />

Nanotechnology<br />

* MultiScale Modelling<br />

* TCAD Development<br />

eDRAM<br />

* eDRAM Design<br />

* Characterization<br />

Technology Software Engg<br />

* CAYCE<br />

* MD Parts<br />

Technical Breadth & Delivery across the System Hardware stack<br />

ISA CXO Conclave –Nov 2012 22


From Atoms to Supercomputers<br />

End-to-End Materials and Technology<br />

Innovation and Enablement<br />

for Semiconductor Chips and<br />

Computing Systems<br />

Servers and Supercomputers<br />

Atoms and<br />

Molecules :<br />

Materials<br />

Innovation<br />

NanoDevice<br />

technology<br />

Electronic<br />

Design and<br />

Processor<br />

Enablement<br />

Power 7+ Process Chip<br />

– 567mm2 32nm SOI eDRAM technology<br />

– Eight processor cores<br />

– 80MB on chip eDRAM shared L3<br />

– Equivalent function of 5.4B transistors<br />

ISA CXO Conclave –Nov 2012 due to eDRAM efficiency


Growing an Ecosystem<br />

Key Elements<br />

Market expertise<br />

SoC reference designs<br />

Turn‐key design services<br />

Design services –front end,<br />

back end, test, packaging<br />

RTL to GDSII reference flows<br />

Industry standard design<br />

tools<br />

Segment based IP –USB,<br />

HDMI, LPDDR, SATA….<br />

Foundation IP – libraries,<br />

memories, IO, PLLs…<br />

Foundry services –masks,<br />

MPWs, packaging, test<br />

Industry compatible PDK<br />

Competitive base technology<br />

India<br />

Product<br />

Development<br />

India<br />

Design<br />

services<br />

Design<br />

flows<br />

IP<br />

enablement<br />

Foundry<br />

technology<br />

India fab services<br />

Leverage<br />

Grow internal system design,<br />

architecture, product<br />

marketing, & field applications.<br />

3’rd party SoC ecosystem –<br />

ARM processors, Synopsys<br />

DesignWare<br />

Existing Indian design services<br />

infrastructure<br />

3’rd party EDA tools, reference<br />

flows, & sign-off solutions<br />

3’rd party IP, already designed<br />

& verified in existing industry<br />

technology<br />

Existing IBM foundry<br />

manufacturing ecosystem<br />

IBM technology &<br />

manufacturing expertise<br />

24 ISA CXO Conclave –Nov 2012 IBM Confidential 24


Semiconductor Industry Enablement Offerings<br />

For an end‐to‐end Semiconductor Modules Manufacturing Industry base<br />

• Ongoing access to a leadership CMOS wafer process technology roadmap<br />

– Including design enablement<br />

– Multiyear technology delivery commitment from IBM to Client<br />

• Semiconductor Manufacturing methodology / controls<br />

• Semiconductor Yield methodology<br />

• Technology Ramp/Training<br />

– Round robin wafer exchange<br />

– Failure analysis technology/methodology<br />

– Ongoing rotational training assignment in East Fishkill<br />

• Technology, manufacturing, logistics, controls, organizational<br />

– Product level transfer/yield compare<br />

• Dependent on initial product identified by Partner<br />

• IT Infrastructure<br />

– Servers, middleware, data warehouse<br />

– Manufacturing Execution system<br />

– Manufacturing yield, test, control software<br />

• Design IP<br />

• Design Tools<br />

• Wafer Bumping Technology<br />

• Wafer & Module Test Methodology<br />

• Packaging Technology<br />

Foundry<br />

Design House<br />

Packaging Assembly<br />

& Testing Company<br />

ISA CXO Conclave –Nov 2012 25


What will a Semiconductor Manufacturing Ecosystem<br />

do for India?<br />

– Address Import/Export Supply Gap<br />

• Domestic electronic products demand is projected to be $400B in 2020.<br />

• Domestic production expected to cover only $100B.<br />

• Import/Export Gap: $300B! (projected to exceeds India’s oil import bill<br />

in 2020!!)<br />

– Address National and information security<br />

– Create Sourcing stability and self‐reliance<br />

– Launch a Platform for scientific innovation and R&D based industries –<br />

Build on India’s current talent pool and design<br />

– Job creation: MANYjobs created beyond direct fab operations<br />

– Possible focus area : Set top boxes, Smart Phones, Tablets, Smart Meters,<br />

micro‐ATMs, Smart Cards, Sensors<br />

ISA CXO Conclave –Nov 2012 26


Summary<br />

• CMOS scaling will continue, requiring innovation and<br />

optimization in lithography, materials and device<br />

structures<br />

• New “disruptive” technologies coupled with CMOS<br />

scaling will enable performance growth to exascale<br />

• Solutions designed to deliver maximum value to the<br />

customer<br />

• Fab can be a catalyst for broad Electronic Systems Design<br />

and Manufacturing ecosystem<br />

27<br />

ISA CXO Conclave –Nov 2012 27


Thank You<br />

ISA CXO Conclave –Nov 2012 28

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