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DETERMINATION OF THIN FILM'S MECHANICAL PROPERTIES

DETERMINATION OF THIN FILM'S MECHANICAL PROPERTIES

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3<br />

from surface, Fe 2 B phase forms in deeper region because of decreasing boron<br />

concentration form surface to inside of substrate. Upper part of multilayer<br />

consists of FeB phase which is more brittle than lower layer (Fe 2 B).<br />

Mechanical properties (Young’s modulus, Hardness, Yield strength) of FeB<br />

layer are difficult to characterize through uniaxial or other standard tests. So,<br />

micro indentation method became useful for determination of mechanical<br />

properties of layers.

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