DETERMINATION OF THIN FILM'S MECHANICAL PROPERTIES
DETERMINATION OF THIN FILM'S MECHANICAL PROPERTIES
DETERMINATION OF THIN FILM'S MECHANICAL PROPERTIES
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3<br />
from surface, Fe 2 B phase forms in deeper region because of decreasing boron<br />
concentration form surface to inside of substrate. Upper part of multilayer<br />
consists of FeB phase which is more brittle than lower layer (Fe 2 B).<br />
Mechanical properties (Young’s modulus, Hardness, Yield strength) of FeB<br />
layer are difficult to characterize through uniaxial or other standard tests. So,<br />
micro indentation method became useful for determination of mechanical<br />
properties of layers.