(Microsoft PowerPoint - \351coleaNW_ayari2.ppt) - IEMN

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At the micron scale Detector Accelerometer for airbag Mechanical springs Width 50nm 1 µm Electrostatic combs Gap width 150nm Actuator Digital micromirror device in video projector
materials Si, SiN, GaAs standard in microelectronic Nanowire Pt, SiC AlN, ZnO piezo- electric carbone nanotubes 300 nm Pt SiN J.A.P. 99,124304(2006) A.P.L. 83,1240(2003)
Page 1 and 2: Introduction to nano-electromechani
Page 3: Electro Mechanical Systems What is
Page 7 and 8: Nano Electro Mechanical Systems ISS
Page 9 and 10: Optical coupling 2µm Need flat su
Page 11 and 12: SEM SiC Nanowire rest fundamental h
Page 13 and 14: Field emission Experimental set up
Page 15 and 16: What’s new? Non-linearity Frequ
Page 17 and 18: Non-linear effects Amplitude Freque
Page 19 and 20: Role of Electric Field Electrostat
Page 21 and 22: Casimir forces PRL 87, 211801 (2001
Page 23 and 24: Quantum limit H=½mv 2 + ½kx 2
Page 25 and 26: Performances Damping Mass sensing
Page 27 and 28: Nanobalance nano letters 6, 583 (20
Page 29 and 30: Self-oscillations What is self osc
Page 31 and 32: SEM Experiments Ayari et al., Nano
Page 33 and 34: Why did it work ? V R, k C, k Y , m
Page 35 and 36: Why did it work ? Mechanical equat
Page 37 and 38: Why did it work ? Mechanical equat
Page 39 and 40: Summary First observation of self-

(Microsoft PowerPoint - \351coleaNW_ayari2.ppt) - IEMN

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