Zeiss Libra 120 en_brief_V10.vp

Brief Manual
Nano Technology Systems Division
LIBRA® 120
Transmission Electron Microscope
Enabling the Nano-Age World

User´s manual
Nano Technology Systems Division
LIBRA 120
Operating Manual
344200-0000-016

© Carl Zeiss NTS GmbH
A Carl Zeiss SMT AG Company
Carl-Zeiss-Str. 56
73447 Oberkochen
Germany
This manual is designed for users (operators) who have been trained in the use of
the instrument by an authorized professional. Users of this instrument may not
deviate from the instruction provided in this documentation.
Carl Zeiss NTS GmbH holds all copyrights and rights of exploitation, including all
translations of this material. The license rights for the software provided with this
instrument are noted in an agreement that becomes a permanent part of the
instrument file.
No part of this documentation may be reproduced, edited, or provided to a third
party without written permission from Carl Zeiss NTS GmbH.
If the user modifies the instrument without the manufacturer´s consent, the
manufacturer will not be liable for any damage that may result. Such modifications
will also void the warranty.
Carl Zeiss NTS GmbH reserves the right to terminate the user´s license and sue for
damages if the terms of this agreement are violated.
Carl Zeiss NTS GmbH reserves the right to make modifications as part of the
technical development process.
Carl Zeiss NTS GmbH
A Carl Zeiss SMT AG Company
Carl Zeiss Straße 56
D-73447 Oberkochen
GERMANY
Tel: +497364/205991
Fax: +497364/943226
info-nts@smt.zeiss.com
Carl Zeiss SMT Ltd.
Coldhams Lane
Cambridge CB1 3JS
UK
Tel: +44 1223/414166
Fax: +44 1223/412776
info-uk@smt.zeiss.com
Carl Zeiss SMT Sarl.
86, Avenue du 18 juin 1940
92500 Rueil-Malmaison
France
Tel: +33 1 41/39 92 10
Fax: +33 1 41/39 92 29
info-fr@smt.zeiss.com
Carl Zeiss SMT Inc.
One Zeiss Drive,Thornwood
New York 10594
USA
Tel: +1 914 747 7700
Fax: +1 914 747 7443
info-usa@smt.zeiss.com

Brief Manual LIBRA 120
1. EM System Turn-ON
• Push the green button (On) at the console.
• Start the EM PC.
• Click on the icon WinTEM on the Desktop.
• Type in user ID and password.
2. Check Vacuum Readiness
− Column, Gun, and Camera chamber
are green.
3. Turn On High Tension
• Open Gun tab sheet.
• Click on the icon HT On.
− HT is ramping up to the selected
high voltage step.
4. Turn On Filament
• Click on the icon Fil On.
− The filament is ramping up according to the
gun profile.
• Adjust emission step until the emission current
is ≥ 1 µA.
1

5. Check Status of the Specimen Holder
• The holder must be inserted, otherwise the
gun blanker cannot be opened.
6. Open Gun and Column Valve
• Click on Column Valve Open (if closed).
− If not possible, remove holder from the airlock
and insert it again.
7. Check Status of the Beam Blanker
• Click on the beam blanker icon that the frame
around the icon is gone ⇒ Beam Blanker Off.
− The status is also diplayed in the status bar
and can be changed there.
• Check also that no other device is blanking the
beam externally.
8. Retract Specimen Holder
• Retract holder untill it stops (1) and turn it a
few degrees to the left (2) that it stays retracted.
− Make sure that WinTEM still recognizes the
holder to be inserted.
2

9. Check Mag and Ill Angle
• Set mag to 10k and illumination angle to 0.5 mrad.
☞
NOTICE:
If there is fluorensence on the screen, continue with point 12.
If there is no fluorensence on the screen, continue with point 10.
10. Retract Apertures
• Retract spectrometer slit aperture.
− Mostly the beam is visible on the screen.
− If so, continue with 11.
• Retract objective aperture.
• Retract condenser aperture.
11. Calibrate Deflecting Systems
• Select Img Shft and calibrate it with R in the
right lower corner of the nav. box.
• Select Calibrate All , if no fluoresence is
visible on the screen.
This way is recommended, if the status of the
LIBRA 120 is not known.
3

12. Turn AIS Mode to Off
• Click on AIS Off in the tab sheet TEM.
− Display in the status bar.
• Set brightness to 0.5 mrad.
13. Select Magnification
• Select mag 31.5 k with knob (3).
M8
M7
M6
M5
2
3
14. Check Spot Position
• Switch to Spot mode with button (20).
• Calibrate spot with button Cal (25).
• Center spot to index point with knobs (1,6).
• Switch back to TEM illumination with button (20).
M4
M3
M2
M1
20
25
5
43
30
31
1 6
15. Insert Condenser Aperture
• Turn condenser aperture holder to the 3. clickstop
and center the central AIS aperture (37.5 µm).
•
4

16. Check Spectrum Position
• Switch to EELS mode with button (23).
− If the spectrum tip is not visible on the large
screen, start the magnetic reset as described
in point 17.
• Shift spectrum tip to the index point
of the screen with knobs (1, 6).
• Switch to ESI mode with button (23).
M4
M3
M2
M1
23
43
30 31
1 6
Index point
17. Start Magnetic Reset
• Click on Start Magnetic Reset to formate the
OMEGA filter.
− Only necessary, if spectrum is not visible
on the screen.
− This can take 1-2minutes.
18. Turn AIS Mode to Auto
• Click on AIS Auto in the TEM tab sheet.
− Display in the status bar.
19. Center Spectrometer Entrance Aperture
• Insert aperture (2. clickstop) and center it to
the large screen.
5

20. Adjust Spot
• Increase magnification to 100k with knob (3)
• Switch to Spot mode with button (20).
• Increase spot size to 100 nm with knob (5).
• Push Cal (25).
• Shift spot to the index point with knobs (1, 6).
M4
M3
M2
M1
20
25
5
43
30
31
1 6
• Recenter spot to index point with knobs (1, 6).
• Switch back to TEM mode with button (20)..
21. Center Condenser Aperture
• Click on AIS Off in the tab sheet TEM.
− Display in the status bar.
• Center condenser aperture (37.5 µm) to the
large screen mechanically.
22. Insert Specimen Holder
• Insert objective aperture (1. clickstop).
− see point 25 for adjustment.
• Lower mag to 50 k.
• Move holder back into the column and look
for a specimen detail.
• Center detail to the index point.
23. Adjust Eucentric Height
• Switch on Foc Aid with button (26).
• Calibrate the objective lens with button (25).
− The sample is moving forth and back, if it is
not in the eucentric plane.
• Adjust Z with the focus knob (4).
M4
M3
M2
M1
25
22
26
4
5
• Turn off Foc Aid with button (26).
6

24. Check Illumination Tilt
• Move a specimen detail to the screen center
with the joystick.
• Turn on the wobbler Objective in the group box
Wobbler.
• Minimize the oscillating movement of the sample
with knobs (1, 6).
• Turn off the wobbler with Off.
25. Check Beam Alignment
• Select Diff mode with button (22).
• Set illumination angle (brightness)
to 0.06 mrad (60 µrad) with knob (5).
• Adjust diffraction spot to index point with
knobs (1) and (6).
• Activate Gun Tilt in the group box Alignment.
− Gun Tilt is displayed on the hardpanel (43).
• Increase illumination angle (brightness) to
1.6 mrad with knob (5).
• Shift diffraction spot to the index point with
knobs (1) and (6).
• Save settings with Store Gun Alignment.
26. Check Diffraction Spot
• Select Diff mode (22) and set camera length
to 720 mm with knob (3) on the left hardpanel.
• Shift diffraction spot to the index point with
knobs (1, 6).
• Insert an objective aperture and center it to
the diffraction spot.
• Switch back to IMG mode with button (22).
M4
M3
M2
M1
J1
22
43
30
31
1 6
7

27. Turn AIS Mode to Auto
• Click on AIS Auto.
− Display Auto in the status bar.
If the AIS alignment was done and saved earlier, there is nothing to do on AIS.
☞
NOTICE:
If an AIS alignment is necessary, go to chapter AIS Alignment in the extended manual.
8

Enabling the Nano-Age World
Carl Zeiss NTS GmbH
A Carl Zeiss SMT AG Company
Carl Zeiss Straße 56
D-73447 Oberkochen
GERMANY
Tel: +497364/205991
Fax: +497364/943226
info-nts@smt.zeiss.com
Carl Zeiss SMT Ltd.
Coldhams Lane
Cambridge CB1 3JS
UK
Tel: +44 1223/414166
Fax: +44 1223/412776
info-uk@smt.zeiss.com
Carl Zeiss SMT Inc.
One Zeiss Drive,Thornwood
New York 10594
USA
Tel: +1 914 747 7700
Fax: +1 914 747 7443
info-usa@smt.zeiss.com
Carl Zeiss SMT Sarl
86, avenue du 18 juin 1940
Rueil-Malmaision
FRANCE
Tel: +33 1 41399210
Fax: +33 1 41399229
info-fr@smt.zeiss.com
Plus a worldwide network
of authorised distributors
www.smt.zeiss.com
Due to policy of continuous
development, we reserve the
right to change specifications
without notice.
© Carl Zeiss SMT, Oberkochen