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Catalog 2010

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Vacuum Valves<br />

Gas Dosing Systems<br />

Gas Dosing Systems<br />

Gas Dosing Systems<br />

User Advantages<br />

■ Higher yield<br />

■ Optimized cycle time<br />

■ Excellent reproducibility<br />

■ Easy system integration<br />

GAS DOSING SYSTEMS<br />

e.g. PC, IPC,<br />

PLC, MC<br />

Pressure Gauge<br />

Controller<br />

VCC500-Z<br />

Process Chamber<br />

Control Valve<br />

VDE016-X<br />

e.g. PC, IPC,<br />

PLC, MC<br />

Interface Module<br />

VCA200-Z<br />

Control Valve<br />

VDM005-X<br />

Vacuum Control <strong>Catalog</strong> <strong>2010</strong> - C44

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