Catalog 2010

Vacuum Gauges
High Pressure Hot Ionization Pirani Gauge
High Pressure Hot Ionization Pirani Gauge
HPG400
The INFICON High Pressure Hot Ionization Pirani Gauge, HPG400, combines
High Pressure Hot Ionization and Pirani sensors in a single, compact, economical
package to measure pressure from 2 x 10 -6 mbar to atmosphere (1.5 x 10 -6 Torr
to atmosphere). The HPG400 provides highly repeatable and reproducible pressure
measurement for accurate sputter process pressure control.
Advantages
■ HPG400 saves cost and tool space and reduces the complexity of vacuum
system installation and setup
■ The high pressure hot ion gauge delivers accurate, reliable pressure
measurements from 1 x 10 -5 … 1 mbar for improved process control
■ User selectable hot ion emission activation between 5 x 10 -2 and 1 mbar
■ Pirani interlock protects the hot filament from premature burnout
■ Optional graphic display and Fieldbus interfaces available
■ Automatic high vacuum Pirani adjustment reduces operator interventions
Applications
■ Sputter applications in semiconductor manufacturing, electronics and media industry
■ Industrial coating
■ General vacuum measurement and control in the low to high vacuum range
Ordering Information
Type HPG400 HPG400 HPG400-SP HPG400-SD
without LCD display with LCD display with Profibus DP 1) with DeviceNet 1)
DN 25 ISO-KF 353-520 353-521 353-525 353-527
DN 40 CF-F 353-522 353-523 353-526 353-528
Replacement sensor 25 ISO-KF 354-487 354-487 354-487 354-487
Replacement sensor 40 CF-F 354-488 354-488 354-488 354-488
1)
not available with LCD display
Accessories
Power supply 24 V DC / RS232C line 353-511
Vacuum Control Catalog 2010 - A38