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Soft Lithography

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Microcontact printing SAMs for wet etching metal substrates<br />

SAMs spread on substrate,<br />

restricting feature sizes to<br />

>100nm.<br />

SAM layer is thin (2-3 nm) so<br />

only serves as mask for<br />

isotropic wet etching<br />

Wilbur, J. L., Kumar, A., Kim, E. & Whitesides, G. M. Adv. Mater. (1994).<br />

25

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