Directed Self Assembly (DSA) - Sokudo
Directed Self Assembly (DSA) - Sokudo
Directed Self Assembly (DSA) - Sokudo
SHOW LESS
You also want an ePaper? Increase the reach of your titles
YUMPU automatically turns print PDFs into web optimized ePapers that Google loves.
550 Million Vias inspected on 300mm wafer<br />
Chris Bencher, et.al. “<strong>Directed</strong> <strong>Self</strong>-<strong>Assembly</strong> Defectivity Assessment,”<br />
Alternative Lithographic Technologies IV, Proc. of SPIE Vol. 8323 © 2012 SPIE<br />
16 SKD-120711(L1)<br />
Applied Materials<br />
UVision 3
Change language