Directed Self Assembly (DSA) - Sokudo

13.02.2015 • Views

Share Embed Flag

Directed Self Assembly (DSA) - Sokudo

Directed Self Assembly (DSA) - Sokudo

DOWNLOAD ePAPER

sokudo.com

You also want an ePaper? Increase the reach of your titles

YUMPU automatically turns print PDFs into web optimized ePapers that Google loves.

START NOW

Track is key tool in center of <strong>DSA</strong> process flow<br />

4<br />

SKD-120711(L1)

1
2
3
4
5
6
7
8
9
10
11
12
13
14
15
16
17
18
19

High Throughput Maskless Lithography - Sokudo

MAPPER Sokudo breakfast forum 2011

Double Patterning Jumps the 200wph Hurdle: Coat ... - Sokudo

Extension of 193 Immersion Lithography - Sokudo

Backend Process Exposure Tool Backend Process ... - Sokudo

Self-Aligned Double Patterning for 3xnm Flash Production - Sokudo

EUVL Scanners Operational at Chipmakers - Sokudo

X - Sokudo

Applications of DSA for lithography - Sokudo

Cost effective scaling: next-generation lithography ... - Sokudo

Holistic View of Lithography for Double Patterning - Sokudo

Advanced Sub-20nm 450mm Lithography - Sokudo

Shooting for the 22nm Lithography Goal - Sokudo

PDF file - Sokudo

Track is key tool in center of <strong>DSA</strong> process flow 4 SKD-120711(L1)

<strong>DSA</strong> Process Development on SOKUDO Track Platforms 2010 2011 2012 2013 300mm <strong>DSA</strong> Pilot Line SOKUDO Track 6 SKD-120711(L1)

Page 1 and 2: “Defect Free” DSA Patterning Sp
Page 3: Next 3 Years - Key Lithography Tech
Page 7 and 8: SOKUDO RF3 Coat/Develop Track @ App
Page 9 and 10: 2011 … 300mm Full-Wafer DSA Proce
Page 11 and 12: Chemo-Epitaxy Pre-Pattern CD DSA D
Page 13 and 14: Contact Hole DSA Shrink Process …
Page 15 and 16: 550 Million Vias inspected on 300mm
Page 17 and 18: DSA Defect Density: 1 per 25 millio
Page 19: SOKUDO DUO DSA Track Conclusions