MicroE Systems

High Performance Encoders 

MicroE Systems 

HIGHER PERFORMANCE 

SMALLER 

FASTER 

EASIER 

SMARTER 

MORE VERSATILE 

CUSTOMIZATION 

FLEXIBLE DELIVERY 

RESPONSIVE TECH SUPPORT

Innovative Encoder Systems 

that Deliver Performance 

and Value 

Superior performance. World-class reliability. Responsive support 

and delivery. Focusing on what customers want most is why MicroE 

Systems is growing so quickly and introducing new products faster 

than any other encoder company. With a growing product 

line of over 30 models to match your specific 

application requirements, and direct sales and 

distributor offices in 13 countries, we give 

you a world of encoder solutions. 

Product Range 

Pages 4-14 

Pages 12-14 

Incremental Encoders for 

All Applications 

Mercury II 

Tape scales or glass 

scales for a wide range of 

applications. Linear or 

rotary. Resolutions from 

5µm to 1.2nm. 

Incremental Encoders for 

Compact Motion Systems 

Mercury and ChipEncoder 

Screw mount or PC board 

mount. Linear or rotary. 

Resolutions from 10µm 

to 5nm. Atmospheric 

or vacuum. 

Data Storage 

Ultra-high performance 

encoders, positioners, 

and servo control for 

Data Storage applications. 

MicroE Systems’ Technology: 

Creating the Best Encoders 

It takes a powerful combination of an advanced optical system, 

signal processing technology, and state of the art optoelectronic 

integration to make industry-leading encoders. And that’s just what 

MicroE Systems has done, achieving many industry firsts: 

• First 1.2nm resolution encoder with all electronics in the sensor 

• First 20µm encoder with cyclical error of only ±20nm 

• First PC Board-mount encoder with 78nm resolution 

• First sub-micron encoder with ±2° setup tolerance 

• First encoder with one sensor for tape or glass, linear or rotary 

• First encoder with user-programmable settings and software 

• First stick-on index and limits 

PurePrecision Optics 

Gives Mercury the 

Sensor Size Advantage 

MicroE Systems’ patented 

sensor creates a high-fidelity 

signal with very compact 

optics. The result is a 

miniature, high-performance 

sensor that’s just 8.4mm tall, 

weighing only 5 grams. 

Page 15 

Page 15 

Packaged Encoders 

DRC 

Housed rotary encoders 

with bearings. Rugged and 

reliable. Resolutions from 

400 to 360,000 CPR. 

PurePrecision Optics – 

Faster Setup, Better Accuracy 

Our PurePrecision optical layout gives our 

sensors the widest alignment tolerances 

in the industry: ±150µm in the Z axis and 

±2° for theta Z. That’s 300% better than 

competing encoders, and that means 

faster setup and better long-term motion 

system reliability. High signal quality 

means better accuracy – cyclical error 

as low as ±20nm – and interpolation that 

provides up to 1.2nm of resolution. 

2

About MicroE Systems 

Encoder Innovation Starts Here 

MicroE Systems, a division of GSI Group, was founded in 1994 to 

advance encoder technology. Seizing the trend toward smaller 

motion systems, our patented optical designs have led to over 30 

different encoder models today. These innovations make encoders 

that achieve higher accuracy and speed while also being smaller, 

easier to install, and use less power. That’s why so many OEM’s 

are putting our encoders in their designs. 

Due to robust sales growth, we have made extensive investments 

in our manufacturing operations: a new, larger facility in 2008; use 

of lean manufacturing and six-sigma principles to achieve rapid 

response to customer orders while achieving superior quality; tight 

controls on cleanliness and ESD on the shop floor; and the training 

and quality systems to be ISO9001:2008 certified. 

Focus on Technology and New Products 

MicroE Systems builds 

encoders and servotrack 

writing subsystems for one 

of the world’s most leading 

edge industries: Data 

Storage. In fact, most hard 

disk drives manufactured 

throughout the world today 

are made using MicroE Systems’ technology. Plus, we build the most 

widely used encoders for sub-micron compact motion systems - 

Mercury encoders. Add to that our growing range of Mercury II 

encoders and tape scale solutions. These successes stem from 

our ongoing R&D commitment to create more accurate, faster, 

smaller encoders. 

Best Performance and Value 

MicroE Systems’ encoders 

are renowned for their 

small size, ease of setup 

and features. But more 

customers are also 

discovering their worldclass 

performance – lower 

cyclical error for better 

velocity control, accuracy to ±1µm, and resolution that’s stable up to 

1.2nm. All of this performance comes from a 20µm-pitch encoder 

system that’s a fraction of the cost of 4µm and 2µm pitch encoders – 

now that’s value. 

Customization and Technical Support 

At MicroE Systems, we recognize the importance of customization. 

Many applications require a specific cable length, connector or 

pinout. Our manufacturing processes make your “customized” part 

just like a standard assembly. You get encoders that exactly match 

your application, and the reliability, quality and responsive lead 

times you would expect with standard products. 

Motion system customers require fast, effective support and that’s 

where our Odyssey program comes in. Engineered to support 

Our new, larger facility in Massachusetts is ISO 9001:2008 certified. 

customers during each of four critical product development phases, 

we support you from over 30 direct sales and sales partner locations. 

Headquarters 

Direct Sales Offices 

Sales Channel Partners 

Technology Center 

Global locations provide technical support in your language and time zone. 

Flexible Delivery 

Modern OEM 

customers must have 

their orders filled in 

1-2 weeks with little 

forecast visibility. 

MicroE Systems has 

professional supply 

chain management, 

world-class quality 

systems and a linear manufacturing process specifically designed to 

fill new OEM orders rapidly. Product designs that are modular and 

configurable complete the story, making MicroE Systems one of the 

most responsive suppliers you can specify. 

Quality and Reliability Engineered in from the Start 

Encoder applications require the highest levels of reliability. 

That’s why we perform so many tests during product development – 

design validation testing, environmental robustness, EMI immunity, 

mechanical shock, and a host of further tests. We manufacture in 

the USA to the highest quality standards in compliance with 

ISO9001:2008, and our encoders are CE and RoHS compliant. 

3

TM 

Mercury II Family of Encoders: 

The Next Generation 

Superior Performance. 

World-Class Reliability. 

Mercury II 

MicroE Systems revolutionized encoder 

technology with the original Mercury encoder 

family. Smaller, faster, and smarter than 

anything before, it set the standard for 

innovation. Now, the growing Mercury II 

line of encoders takes another giant step 

forward by giving you all this, plus more performance, 

tape scales, dual limits and more. Comprehensive testing and 

manufacturing to ISO9001:2008 quality standards makes for worldclass 

robustness and reliability. 

PERFORMANCE WITHOUT COMPROMISE 

Mercury II’s encoder technology achieves the highest resolution and 

accuracy in its class, with low cyclical error, low jitter and low 

power consumption. 

Model Resolution Output Maximum Speed Scales 

MII 6000 5µm - 1.2nm Digital 10m/s Tape or Glass; 

Linear & Rotary 

MII 5000 5µm - 1.2nm Digital 10m/s Tape or Glass; 


MII 1900 5µm - 1.2nm Analog 7.2m/s Tape or Glass; 

Linear 

MII 1600 5µm - 0.5µm Digital 20m/s Tape; Linear 

Accuracy Cyclical Error* Long Travel 

With Tape Scale ±30nm typical ≤ ±5µm** 

(Linear) 

With Glass Scales ±20nm typical High accuracy grade: 

(Linear) up to ±1µm † 

Standard accuracy grade: 

±1.5µm † 

* MII 6000/5000 accuracy within a 20µm signal period † See data sheets for full specifications 

**Over any one meter of travel after slope correction in the customer’s controller 

Mercury II’s low cyclical error surpasses every other 20µm encoder. 

The result: smoother velocity control for linear motors and wire 

bonders, better linear positioning, and more. 

Mercury II Cyclical Error with Glass Scales 

UNSURPASSED EASE OF USE 

• Broadest Alignment Tolerances 

• Setup LEDs 

• Built-in or Stick-on Optical Index and Limits* 

• Cut-to-Length Tape Scale 

Broadest Alignment Tolerances 

for Easy Installation and Setup 

Mercury II has the broadest 

alignment tolerances in the 

industry, a full ±2 degrees. That 

makes it the easiest and the fastest 

sensor to align and setup; you can 

align the Mercury II sensor in 

under 30 seconds. 

±2 o 

Built-in or Stick-on Optical Index 

and Limits* 

Order tape or linear glass scales 

with built-in markers for fastest 

installation, or install stick-on index 

and limit markers anywhere on cutto-length 

tape scales. Mercury II’s 

optical index is bi-directional and 

repeatable at full speed. 

*Limits available on MII 6000 & MII 5000 models 

PurePrecision TM Tape Scale 

in Continuous Lengths 

up to 30 Meters 

The Tape Scale’s cut-to-length 

capability reduces inventory 

costs and lead times. The 

unique dispenser makes 

handling and storage easy. You 

can also order pre-cut lengths. 

4

Innovative 

TM 

Mercury II 

Technology 

Integrated Sensor Design for 

Less Power Consumption, 

Smaller Sensors 

LOWEST POWER CONSUMPTION IN THE INDUSTRY 

• Mercury II’s patented optical system and integrated sensor design 

dramatically cuts power consumption - and sensor size 

ROBUSTNESS WITHOUT COMPROMISE 

• Advanced Optical Design 

– Contamination Resistant 

– Automatic Gain Control 

• Separate Left and 

Right Limits (MII 6000 & 

MII 5000 Models) 

VERSATILITY WITHOUT COMPROMISE 

• Low Z-Height Sensor: as low as 8.2mm 

• Low Mass Sensor: as low as 3g 

• Cut-to-Length Tape Scale up to 30 Meters Long 

• SmartPrecision II Software 

MII 6000 MII 5000 MII 1900 MII 1600 

Power 0.90W* 0.90W 0.24W 0.24W 

Consumption *0.25 for sensor 

Sensor 8.2mm 11.0mm 8.7mm 8.7mm 

Height 

• High Noise Immunity 

– Double-Shielded Cable 

– Differential Outputs 

• RoHS Compliant 

• CE Compliant 

Small Sensor for Faster, More Compact 

Motion Systems 

With Mercury II, you get the smallest 1.2nm 

capable sensor for compact system designs; 

plus, you can select the best scale for your 

application: tape or glass, linear or rotary. 

Mercury II Encoder Models 

MERCURY II 6000 

Smallest Sensor, Ultra-High 

Resolution and Accuracy, 

Tape or Glass Scales 

• Programmable Resolution: 

5µm – 1.22nm Linear, 

to 268M CPR Rotary 

• Output: Digital A-quad-B or High Speed Serial 

• Scales: 20µm Tape or Glass, Linear or Rotary 

• Vacuum models for up to 10 -8 torr 


Ultra-High Performance, 

Digital Output from the 

Sensor, Tape or 

Glass Scales 


5µm – 1.2nm Linear, 

to 268M CPR Rotary 


• Scales: 20µm Tape or Glass, Linear or Rotary 


High Performance, Analog 

Output from the Sensor, 

Tape or Glass Scales 

• Resolution: 

5µm – 1.2nm Linear 

• Output: Analog Sin/Cos 1Vpp 

• Scales: 20µm Tape or Glass 

Mercury II 

SmartPrecision II Software 

for Unmatched Monitoring 

and Diagnostics 

Our encoder software enables 

setup, real time monitoring, 

and a variety of data plots; 

programmable resolution, 

output frequency and output 

filtering can be set with MII 6000 and MII 5000 models. 


Up to 0.5µm Resolution, 


Sensor, Tape Scales 


5µm - 0.5µm Linear 

• Output: Digital A-quad-B 

• Scales: 20µm Tape 

5

Mercury II 6000 

I 

H 

Mercury II 

Smallest Sensor, Ultra-High Resolution 

and Accuracy Digital Output Encoder 

Uses Metal Tape, Linear Glass, or Rotary Glass Scales 

Mercury II 6000’s programmable resolutions range from 5µm to 1.2nm, 

with accuracy up to ±1µm; the same sensor works with tape or glass 

scales, either linear or rotary. Excellent cyclical error (short-range 

accuracy) means smooth velocity control. Performance, small sensor 

size, robustness, versatility and ease of use make MII 6000 the 

high performance choice. 

System Performance 

A 

6 

Resolution Linear Rotary 

MII 6000 IS THE ONLY DIGITAL-OUTPUT ENCODER WITH 

ALL THESE FEATURES: 

• 8.2mm sensor Z-height 

• Stick-on index and limits 

• Programmable resolution 

and settings 

MII 6000 APPLICATIONS 

• Nanometer-Scale Motion 

• Piezo-Motor Stages 

• Wafer Inspection & Processing 

• Automated Optical Inspection 

Compact Z Height Design 

MII 6000’s sensor is only 

8.2mm high, enabling more 

compact motion systems. 

5µm to 1.2nm 20k CPR to 268M CPR 

Accuracy Cyclical Error* Long travel 


(Linear) 



Std. accuracy grade: 

up to ±1.5µm † 

*Accuracy within a 20µm signal period 

† See data sheet for full specifications 


±2 o B 

• Integral dual limits 

• Up to 1.2nm resolution 

• A-quad-B or high speed 

serial word outputs 

• Metrology 

• XY Stages 

• Tunable Optic Systems 

• Microscope Stages 

Broadest Alignment 

Tolerances in the 

Industry 

Mercury encoders have 

the widest Z and theta-Z 

tolerances for fast setup. 

C 

D 

E 

F 

G 

H 

I 

E 

C 

F 

B 

A 

Next-Generation Sensor 

for Resistance to Contamination 

Mercury II’s sensor has an improved optical design and Automatic 

Gain Control for contamination resistance: fingerprints, oil, dust, etc. 

One Sensor: Tape or Glass, Linear or Rotary Scales 

With MII 6000, the same sensor works with tape and 

glass scales, saving design time and reducing the number 

of unique parts. 

PurePrecision TM Tape or High Accuracy 

Linear Glass Scales 

PurePrecision tape scale is the easiest tape to install and use. 

Cut it to any length you need; adhesive backing and our 

unique application tool make installation fast and accurate. 

Use linear glass scales for the highest accuracy and precise 

thermal management. 

Built-In or Stick-On Optical Index and Limits 

Choose from built-in index and limit markers for 

fastest installation, or stick-on markers for placeanywhere 

flexibility with cut-to-length tape scale 

applications. Mercury II’s space-saving index and 

limit markers fit within the 6mm width of the tape 

scale. The bi-directional optical index provides 

1 LSB repeatability at all speeds, while left and right 

optical limits enhance safety and reduce cabling. 

Programmable Features for System Flexibility 

MII 6000 provides user programmable or factory-set resolution, 

output bandwidth, and low-pass filtering. No other encoder offers 

this capability to accelerate motion system prototyping or greater 

flexibility for complex motion systems. 

Status LEDs Show System Status at a Glance 

Status LEDs show signal strength and index/limits conditions 

at all times. 

SmartPrecision TM II Software 

Adds Unique Functionality 

MII 6000’s optional software allows 

setup, monitoring, diagnostics and 

data plots. Ethernet connectivity 

enables secure, remote viewing 

of parameters. 

F 

F 

D 

G 

F 

F


I 

Miniature, Ultra-High Resolution 

and Accuracy Digital Output Encoder 

Ideal for High Performance 0.1µm Digital 

From-the-Sensor Applications 

Uses Metal Tape, Linear Glass, or Rotary Glass Scales 

Mercury II 5000’s programmable resolutions range from 5µm to 1.2nm, 

with accuracy up to ±1µm; the same sensor works with tape or glass 

scales, either linear or rotary. Excellent cyclical error (short-range 

accuracy) means smooth velocity control. Performance, robustness, 

versatility and ease of use make MII 5000 the high performance choice. 

F 

G 

G 

C 

B 

A 

D 

E 

H 

G 

G 

Mercury II 


Resolution Linear Rotary 

MII 5000 IS THE ONLY DIGITAL-OUTPUT ENCODER WITH 

ALL THESE FEATURES: 

• 11mm sensor Z-height 

• Stick-on index and limits 

• Programmable resolution 

and settings 


• Linear Motors 

• FPD Manufacturing 

• Wafer Inspection & Processing 

• Automated Optical Inspection 

5µm to 1.2nm 20k CPR to 268M CPR 

Accuracy Cyclical Error* Long travel 


(Linear) 



Std. accuracy grade: 

up to ±1.5µm † 

*Accuracy within a 20µm signal period 

† See data sheet for full specifications 


• Integral dual limits 

• Up to 1.2nm resolution 

• A-quad-B or high speed 

serial word outputs 

• Metrology 

• XY Stages and Gantries 

• Tunable Optic Systems 

• Microscope Stages 

C 

D 

E 

F 

G 

Digital Output Right From the Sensor 

All electronics are in the sensor, including programmable 

features and interpolation up to x16384. You get the highest 

system reliability, the smallest footprint, and a variety of 

connector options - even your own connector. 

Next-Generation Sensor for Resistance to Contamination 

Mercury II’s sensor has an improved optical design and Automatic 

Gain Control for contamination resistance: fingerprints, oil, dust, etc. 

One Sensor: Tape or Glass, Linear or Rotary Scales 

With MII 5000, the same sensor works with tape and 

glass scales, saving design time and reducing the number 

of unique parts. 

PurePrecision TM Tape or High Accuracy Linear Glass Scales 

PurePrecision tape scale is the easiest tape to install and 

use. Cut it to any length you need; adhesive backing and our 

unique application tool make installation fast and accurate. 



Built-In or Stick-On Optical Index and Limits 

Choose from built-in index and limit markers for 

fastest installation, or stick-on markers for placeanywhere 

flexibility with cut-to-length tape scale 

applications. Mercury II’s space-saving index 

and limit markers fit within the 6mm width of 

the tape scale. The bi-directional optical index 

provides 1 LSB repeatability at all speeds, while 

left and right optical limits enhance safety and 

reduce cabling. 

G 

A 



11mm high, enabling more 

compact motion systems. 

H 

Programmable Features for System Flexibility 

MII 5000 provides user programmable or factory-set resolution, 

output bandwidth, and low-pass filtering. No other encoder offers 

this capability to accelerate motion system prototyping or greater 

flexibility for complex motion systems. 

I 

B Broadest Alignment 

Tolerances in the Industry 

Mercury encoders have the 

widest Z and theta-Z 

±2 o tolerances for fast setup. 


Adds Unique Functionality 

MII 5000’s optional software allows 

setup, monitoring, diagnostics and 

data plots. Ethernet connectivity 

enables secure, remote viewing 

of parameters. 

7

Mercury II 


Miniature, High Performance 

Analog Output Encoder 

All Electronics in the Sensor 

Uses 20µm Metal Tape or Linear Glass Scales 

to Achieve the Highest Resolution with Your 

Interpolation Electronics 

For high performance with linear tape or glass scales, 

the Mercury II 1900 analog encoder delivers. It fits compact 

designs and provides high accuracy, speed, and high-fidelity 

signals for resolutions from 5µm to 1.2nm, depending on 

your controller. Cut-to-length tape scale applies quickly; 

linear glass scales provide high accuracy – up to ±1µm. 

The stick-on index and broad sensor alignment tolerances 

mean setup in seconds. 


• 1Vpp sin/cos output 

• Speeds up to 7.2m/s 

• Bi-directional optical index with repeatability at full system speed 

• High EMI noise immunity and tolerance to contamination 

• XY Stages and Gantries 

• FPD Manufacturing 

• Wire & Die Bonders 

• Pick and Place Systems 

A 

8 



MII 1900’s sensor is only 8.7mm 

high, enabling more compact 

motion system designs. 

±2 o 

Resolution 

Accuracy 

B 

• Linear Motors 

• Wafer Processing 

• Metrology 

Linear 

5µm to 1.2nm, depending on 

customer interpolation 

Long travel 

With Tape Scale (Linear) 

≤ ±5µm* 

With Glass Scales (Linear) High accuracy grade: up to ±1µm † 

Standard accuracy grade: up to ±1.5µm † 

*Over any one meter of travel after slope correction 

in the customer’s controller 

†See data sheet for full specifications 

• Wafer Inspection 


Tolerances 

in the Industry 

Our next-generation sensor 

design has the widest Z and 

theta-Z tolerances for fast setup. 

C 

D 

E 

F 

G 

H 

A 

B 

D 

C 

Analog Output Right from the Sensor 

All electronics are in the sensor. You get the highest system 

reliability, the smallest footprint, and a variety of connector 

options - even your own connector. 

Next-Generation Sensor for Resistance 

to Contamination 

Mercury II’s sensor has an improved optical design and 

Automatic Gain Control for contamination resistance: 

fingerprints, oil, dust, etc. 

F 

PurePrecision TM Tape or High Accuracy Linear 

Glass Scales 


Cut it to any length you need; adhesive backing and our unique 

application tool make installation fast and accurate. 



With MII 1900, the same sensor works with both types of 

scales, saving design time and reducing the number of unique 

parts in your system design. 

Built-In or Stick-On Optical Index 

Choose from a built-in index mark for fastest installation, or a 

stick-on marker for place-anywhere flexibility with cut-to-length 

tape scale applications. Mercury II’s space-saving index marker 

fits within the 6mm width of the tape scale. The bi-directional 

optical index provides 1 LSB repeatability at all speeds. 

Choice of Connector Styles 

Choose from a fully-shielded 15-pin D-sub connector or 

customer-specified connector. 


Optional software adds 

capability to perform setup, 

monitoring, diagnostics and 

data plots. 

E 

F 

G 

H


G 

Up to 0.5µm Resolution 

Digital Output Encoder 

All Electronics in the Sensor 

H 

Uses Metal Tape Scales for Economical 

Motion Control Designs 

The Mercury II 1600 digital output sensor, combined with the 

cut-to-length tape scale, provides repeatability and resolution of 

5µm to 0.5µm. The stick-on index and broad sensor alignment 

tolerances mean that setup takes seconds, high EMI immunity 

and tolerance to contamination translate to reliable operation, and 

high bandwidth provides speeds up to 20m/s. MII 1600 is the best 

choice for applications requiring 5µm to 0.5µm of resolution. 

F 

E 

C 

D 

B 

A 

Mercury II 


• Resolution and repeatability: 5µm to 0.5µm 

• Accuracy: ≤ ±5µm (over any one meter of travel after slope 

correction in the customer’s controller) 

• Speeds up to 20m/s 

• Bi-directional optical index with repeatability at full speed 

• High EMI noise immunity and tolerance to contamination 


• Linear Motors and Stages 

• Lab Automation 

• Metrology and Inspection 

• Medical Equipment 

• XY Positioning Tables 

• Assembly Automation 

• Pick and Place Systems 

• Printing Equipment 

C 

D 

E 

Digital Output Right from the Sensor 

All electronics are in the sensor, including up to x40 

interpolation. You get the highest system reliability, the 

smallest footprint, and a variety of connector options - even 

your own connector. 

Next-Generation Sensor for Resistance to Contamination 

Mercury II’s sensor has an improved optical design and 

Automatic Gain Control for contamination resistance: 

fingerprints, oil, dust, etc. 

PurePrecision TM Tape, the Next Generation Tape Scale 


Cut it to any length you need; adhesive backing and our unique 

application tool make installation fast and accurate. 

A 

B 



8.7mm high, enabling more 

compact system designs. 


Tolerances in the Industry 

F 

Built-In or Stick-On Optical Index 

Choose from a built-in index mark for fastest installation, or a 

stick-on marker for place-anywhere flexibility with cut-to-length 

tape scale applications. Mercury II’s space-saving index marker 

fits within the 6mm width of the tape scale. The bi-directional 

optical index provides 1 LSB repeatability at all speeds. 

Mercury encoders have 

the widest Z and theta-Z 

tolerances for fast setup. 

±2 o 

G 

Choice of Connector Styles 

F 

Choose from a fully-shielded 15-pin D-sub connector or 

customer-specified connector. 

H 


Optional software adds capability 

to perform setup, monitoring, 

diagnostics and data plots. 

9

PurePrecision TM Tape and Glass Scales For 

TM 

Mercury II Encoders 

Mercury II 

For Easy Installation and 

Superior Performance 

Tape Scales 

PurePrecision tape is the easiest tape scale to install and 

use. Cut it to any length you need from a coil, or order pre-cut 

lengths with built-in index and limits to make installation even 

faster. Its adhesive backing makes application easy and accurate. 

• Cut to any length at the time of installation, or order pre-cut 

• Measuring length up to 30m 

• Only 6mm wide, including index and limits; low profile 

• Choose from built-in or stick-on optical index and limit markers 

• Resists effects of scale contamination – dust, dirt, fingerprints, oil spots, etc. 

Glass Scales 

Use linear glass scales for the highest accuracy and precise thermal 

management. Rotary glass scales are available with or without hubs, 

and in arc segments. 

• Highest accuracy – up to ±1µm 

• Only 6mm wide, including index and limits (applications ≤130mm) 

• Custom options – special widths, thicknesses, near-zero CTE materials, 

diameters, or rotary arc segments 

Note: Contact MicroE Systems for tape-on-a-radius rotary and MII 1900/1600 rotary applications 

10 

SPECIFICATIONS FOR MERCURY II SCALES 

SCALES & INDEX / LIMIT MARKERS FOR MERCURY II MODELS 

Model Tape Linear Glass Rotary Stick-On Stick-On 

Scale Scales Scales Index Limits 

MII 6000 • • • • • 

MII 5000 • • • • • 

MII 1900 • • • 

MII 1600 • • 

Linear Tape Linear Glass Rotary Glass 

Scales Scales Scales 

Length 50mm - 30m 18mm - 1m 44mm - 121mm dia. 

Cut to any length 

• 

from a dispenser 

Order pre-cut to a • • 

a specified length 

Accuracy ≤ ±5µm* up to ±1µm up to ±2.1 arc-sec. 

CTE 13ppm/°C** 8ppm/°C 8ppm/°C 

Built-in index and limits • • • 

Stick-on index and limits • • 

* Over any one meter of travel after slope correction in the customer’s controller 

** Thermal expansion of the tape scale is matched to the substrate by fixing the ends 

of the scale with epoxy 

Mercury II Accuracy: 

±1µm with High-Accuracy Grade Scales

PurePrecision Tape Scales 

CUT TO LENGTH OR PRE-CUT TAPE SCALES 

The Best Tape Scale Solution Available 

PurePrecision Marker Tape 

and Laser Tape scales set the 

standard for flexibility and 

ease of use. Order tape with 

built-in index and limit* 

markers, or cut any length 

needed from a coil and apply 

stick-on markers. There are 

no index magnets to install 

and adjust. Adhesive-mount 

PurePrecision tape scale has 

a 20µm pitch and is available in lengths up to 30 meters. 

* Limits available on MII 6000 and MII 5000 models 

Easy Tape Installation 

Simply feed the tape scale into 

the installation tool and roll it 

out along a benching edge to 

perform adhesive mounting. 

The tape can then be epoxied 

at its ends, matching it to the 

thermal response of the 

substrate. Mounting is that 

simple. PurePrecision tape scale 

is made of nickel alloy for corrosion resistance, immunity to cleaning 

solvents and long-term reliable performance. 

CHOOSE FROM BUILT-IN OR STICK-ON INDEX AND LIMITS 

Built-In Markers 

PurePrecision Marker Tape 

has built-in index and limit 

marks to speed installation. 

Manufactured into the tape 

scale to your specifications 

using a laser etch process, 

installation of the tape scale 

is reduced to one simple step: 

just apply the adhesive-mount 

tape scale to your system’s 

mounting surface and you are 

done. There is no need to 

mount index or limit markers 

Enlargement showing built-in index 

or magnets. The laser-written 

marks are placed in the exact locations you specify – index location, 

number of index marks and limit mark lengths can all be specified at 

the time of ordering. PurePrecision Marker Tape may be ordered in 

pre-cut lengths for the fastest installation, or in continuous form for 

cutting at your site. 

tape scale and then stick on the markers. The stick-on markers even 

work on linear glass scales. 

Mercury II’s stick-on optical index 

SMALLEST TAPE SCALE SYSTEM AVAILABLE 

USE GLASS SCALES WHEN YOU NEED: 

• Highest accuracy – to ±1µm 

• Uniform thermal behavior 

• Ultra-smooth velocity control 

Index magnet used by other encoders 

Unlike other encoders, Mercury II’s optical index and limits require 

no additional space. They mount directly on the 6mm wide tape 

scale - no unwanted magnets or mounting hardware taking up space. 

Brand X 

22mm 

Brand Y 

13.5mm 

Mercury II 

6.0mm 

PurePrecision Glass Scales 

• Short travel lengths 

• Custom configurations 

• Rotary scales 

Mercury II 

Stick-On Markers 

PurePrecision Laser Tape works with Mercury II ’s stick-on index and 

limit markers when the flexibility and inventory savings of cut-tolength 

capability is required. Stick-on index and limit markers can be 

placed anywhere in seconds: there is no need to mix epoxy or drill 

holes to mount bulky magnets or limit switches. Just apply the 

Mercury II’s 20µm pitch glass scales are available in lengths from 

10mm to 1m and rotary diameters up to 121mm. Custom scales are 

also available for OEM orders – special thicknesses, widths, rotary 

arc segments, and specialized materials such as near-zero CTE 

glass. Linear glass scales can have built-in or stick-on index and 

limit markers. 

11

Mercury TM : The Original 

Miniature Encoders 

Mercury 

Incredible Performance 

from Such a 

Small Package 

MicroE Systems introduced Mercury encoders to help 

equipment designers achieve smaller and faster systems. Originally 

three models, the Mercury series of encoders has grown to 11 

models due to an expanding range of applications requiring more 

resolution, speed and even smaller sensors. Motion system 

engineers around the world specify Mercury encoders when their 

linear or rotary applications demand high performance from the 

smallest possible sensor. Comprehensive testing and manufacturing 

to ISO9001:2008 quality standards ensure long-term reliability. 

±2 o achieved with one sensor – 

SMALLER SENSORS FOR SMALLER, LIGHTER MOTION SYSTEMS 

Mercury’s patented optical system 

results in the most compact sensors 

in their class. Achieve low mass 

motion systems with more rapid 

HIGH PERFORMANCE FROM ULTRA-SMALL SENSORS 

Mercury’s encoder technology achieves high resolution and low 

power consumption with the smallest possible sensors. 

accelerations and higher system 

throughputs using Mercury’s 6mm 

wide linear scales, rotary scales as 

small as 12mm in diameter, lowmass 

rotary arc segments, and sensors as small as 5.6mm high 

Model Resolution Output Features Scales weighing only 2.6 grams. Plus, the same sensor models work in both 

M 3500 5µm - 5nm Digital Programmable Glass; linear and rotary applications. 

Linear & Rotary Low power consumption – as low as 0.17 Watts – provides further 

M 1500 5µm - 0.5µm Digital Digital from Glass; advantages in thermal stability and for portable equipment. 

the Sensor Linear & Rotary 

M 1000 5µm - 78nm Analog 1Vpp Output Glass; 


Model Height Weight Power Consumption 

M 1200 5µm - 78nm Analog PCB Mount Glass; 


M 1200 5.6mm 2.6g 0.17W 

M 1500P 5µm - 0.5µm Digital PCB Mount Glass; 

M 1500P 5.6mm 2.6g 0.17W 

Linear & Rotary ChipEncoder 3.1mm 0.6g 0.18W 

ChipEncoder 10µm - 1µm Digital PCB Mount Glass; 


Accuracy 

Long Travel 

DUAL-AXIS MODELS 

With Glass Scales (Linear) High accuracy grade: up to ±1µm † 

Standard accuracy grade: ±3µm † 

Mercury 3000 Dual Axis 

Averager models combine 

† See data sheets for full specifications 

feedback from two sensors 

and average them in real 

time. The result is higher 

UNSURPASSED EASE OF USE 

accuracy in rotary 

applications than can be 

scale eccentricity errors are 

virtually eliminated. Outputs 

can be A-quad-B or high speed serial. 

Broadest Alignment Tolerances for 

Easy Installation and Setup 

Mercury has the broadest alignment 

tolerances in the industry, a full ±2 

degrees. That makes it the easiest and 

the fastest sensor to align and setup. 

No instrumentation is needed; you can 

align the Mercury sensor in under 

30 seconds. 

12

Innovative 

Mercury TM Technology 

Less Power Consumption, 

Smaller Sensors 

PC BOARD MOUNT 

Mercury 1200, Mercury 1500P and 

ChipEncoder models mount directly on 

your PC board – providing significant 

space and cost savings through design 

integration. Mercury 1200’s analog 

outputs can be interpolated by your 

electronics – or a chipset available from 

MicroE Systems for use on your PC board 

– for resolution up to 78nm (linear). 

Mercury 1500P and ChipEncoder have 

built-in interpolation that produces digital 

outputs with up to 0.5µm resolution 

(linear). All models work with rotary 

scales as small as 12mm diameter. And 

all this comes in the smallest packages. 

Mercury & ChipEncoder Models 

MERCURY 3500, 3000, 2000 

Small Sensor, High 

Resolution and Accuracy 


5µm – 5nm Linear 

Up to 67M CPR Rotary 


or High Speed Serial 

• Scales: 20µm Glass, Linear or Rotary 

• Multi Axis Models 

MERCURY 1500 

Digital Output 

from the Sensor 


5µm – 0.5µm Linear 

Up to 665k CPR Rotary 



Mercury 

WIDE RANGE OF SCALES 

Linear and rotary 20µm 

pitch glass scales are 

available in lengths from 

13mm to 2m, and diameters 

up to 121mm. Accuracy of 

±1µm is available using 

high accuracy grade linear 

scales. Widths as low as 6mm compliment Mercury’s space-efficient 

sensors for the smallest possible motion systems. Built in index 

marks complete your application. Custom widths, thicknesses, 

diameters, arc segments, index configurations, and near-zero CTE 

materials are available for OEM orders. 

Linear 

Standard 

Lengths 

13mm 

25mm 

50mm 

75mm 

100mm 

125mm 

150mm 

. 

2020mm 

Rotary 

Standard 

Outer Dia. 

12.00mm 

19.05mm 

31.75mm 

57.15mm 

107.95mm 

139.7mm 

Rotary 

Hub 

Available 

Yes 

Yes 

Yes 

Yes 

Yes 

Yes 

Rotary Segments 

Arc Segment 

Radius: 6mm or greater 

MERCURY 1000 

1Vpp Analog Output 



Up to 4.2M CPR Rotary 

• Output: 

Analog Sin/Cos 1Vpp 


MERCURY 1200 & 1500P 

PCB Mount, Analog 

or Digital Output 



5µm-78nm Linear (M 1200) 

5µm – 0.5µm Linear (M 1500P) 



CHIPENCODER 

PCB Mount, Digital Output 



10µm – 1µm Linear 



13

The Smallest Vacuum Encoders 

High Performance at High 

Vacuum with the 

Smallest Encoders 

Mercury and Mercury II vacuum 

encoders are specified in a wide range of applications 

due to their combination of performance, small size, and high 

vacuum rating. Choose from models with programmable digital 

output, analog output, or digital output right from the sensor, all 

constructed using vacuum-compatible materials rated up to 10 -8 torr. 

All sensors can be used with linear, rotary and arc segment scales. 

Mercury Vacuum Models 

HIGH PERFORMANCE IN THE SMALLEST PACKAGE 

With sensors only 8.2mm tall, capable of resolutions up to 1.2nm 

and cyclical error of ±20nm, unsurpassed motion system performance 

is achieved in the most compact vacuum applications. Plus, thermal 

effects are minimized due to the low power consumption of Mercury 

encoder sensors – only 0.25W for most models. 

All models perform at 10 -8 torr with negligible outgassing. Bake out 

is rated at 150°C for 48 hours. And Mercury and Mercury II vacuum 

encoders perform in high magnetic field environments. 

MERCURY II 6800V 

Small Sensor, Ultra-High 


Glass Scales 


5µm – 1.2nm Linear 


• Output: Digital A-quad-B or High Speed Serial; dual limits 

• Vacuum up to 10 -8 torr; 150°C bakeout at 48 hours 

Vacuum Encoders 

WIDE RANGE OF SCALES 

Vacuum-compatible linear 

and rotary 20µm pitch 

glass scales are available 

in lengths from 13mm to 

2m, and diameters up to 

121mm. Accuracy of ±1µm 

is available using high 

accuracy grade linear scales. Widths as low as 6mm compliment 

Mercury’s space-efficient sensors for the smallest possible motion 

systems. Built in index and limit marks* complete your application. 

Custom widths, thicknesses, diameters, arc segments, index / 

limit configurations, and near-zero CTE materials are available 

for OEM orders. 

* Limits available on MII6800V models 

Linear 

Standard 

Lengths 

13mm 

25mm 

50mm 

75mm 

100mm 

125mm 

150mm 

. 

2020mm 

Rotary 

Standard 

Outer Dia. 

12.00mm 

19.05mm 

31.75mm 

57.15mm 

107.95mm 

139.7mm 

Rotary 

Hub 

Available 

Yes 

Yes 

Yes 

Yes 

Yes 

Yes 

Rotary Segments 

Arc Segment 

Radius: 6mm or greater 

MERCURY 3500V, 2000V 

Small Sensor, High 


Glass Scales 






MERCURY 1000V 

High Performance Analog 

Output, Glass Scales 




• Output: Analog Sin/Cos 1Vpp 


MERCURY 1500V 

Up to 0.5µm Resolution, 


Sensor, Glass Scales 


5µm - 0.5µm Linear 




14

Data Storage Products 

MicroE Systems has more than a decade of experience designing 

and manufacturing critical components and ultra-precision 

positioning systems for the data storage industry. Today we supply 

these components to the majority of hard disk drive (HDD) 

manufacturers around the world, enabling cost-effective 

manufacturing of HDD’s with capacities exceeding 1TB. 

PRODUCTS 

• G1400 and G1600 High Accuracy Rotary Encoders 

• PE100 High Speed Rotary Encoders 

• PA200G and PA2046G Rotary Positioners 

• MP7000 Positioner for Media Writers 

• MCB2 and SA200a Motion Control Subsystems 

DRC TM 

Encoders 

Based on decades of field-proven reliability and performance, DRC 

incremental encoders are well known for fast and easy installation 

using industry-standard mechanical and electrical interfaces. 

Choose from sealed or kit-style rotary encoders, kit-style linear 

encoders, or sealed linear length gages featuring: 

• Optical encoder technology with LED light source for long life 

and highest performance 

• Differential digital outputs with available zero reference 

• Custom versions available for OEM applications 

• Sealed Rotary Shaft and Hollow Shaft Encoders 

• Rugged, reliable incremental rotary motor encoders 

• Resolutions from 400 to 360,000 Counts per Rev., with a wide 

range of shaft / coupling sizes, mounting options, connector 

styles and cable lengths 

• High accuracy, high temperature, high shaft load and extra high 

vibration-resistant models 

Data Storage and DRC 

PRODUCTS 

• 25D, 25B, S15, H15 and F15 Shaft and Hollow-Shaft Sealed 

Rotary Encoders; Resolutions up to 200,000 CPR 

• HT30, T23B, and TK91 Kit-style Rotary Encoders for Motors; 

Resolutions up to 100,000 CPR 

• LDK Kit-style Linear Encoders; Resolutions up to 0.5µm 

• SST Sealed Linear Length Gages; Resolutions up to 1µm 

15

Encoder Selector Chart 

Model Features Specifications 

MERCURY II ENCODERS 

• Digital or analog output from 

the sensor 

• Tape or glass scales with 

index & limits 


Series Encoders 

page 6 


Series Encoders 

page 7 

Smallest sensor, programmable 

resolution and filtering, stick-on 

index and limits, easy alignment, 

setup software, vacuum models 

for up to 10 -8 torr 

Programmable resolution and 

filtering, small sensor, stick-on 

index and limits, easy 

alignment, setup software 

• Linear Resolution: 5µm – 0.0012µm* 

• Rotary Resolution: 20k CPR – 268M CPR* 

• Output: A-quad-B, Index, Dual Limits 

and Alarm; High Speed Serial Interface 

• Tape, Linear Glass or Rotary Glass Scales 


• Rotary Resolution: 20k CPR – 268M CPR* 

• Output: A-quad-B, Index, Dual Limits 

and Alarm; High Speed Serial Interface 

• Tape, Linear Glass or Rotary Glass Scales 


Encoders 

page 8 

Analog output encoder, 

resolution set by customer 

controller; small sensor; stick-on 

index; easy alignment; setup 

software 

• Linear Resolution: 5µm – 0.0012µm 

• Output: Analog Sin/Cos with Index 

• Linear Tape or Glass Scales 


Encoders 

page 9 

Digital output with up to 

0.5µm resolution, small sensor, 

stick-on index, easy alignment, 

setup software 


• Output: A-quad-B with Index 

• Tape Scales 

MERCURY ENCODERS 

• Smallest sensors 

• Glass scales 

• Screw mount or PC board mount 

Mercury 

Programmable 

Encoders 

page 12 

Programmable resolution, 

output frequency & alarms; 

small sensor; easy alignment; 

setup software 


• Rotary Resolution: 6.6k CPR – 67.1M CPR* 

• Output: A-quad-B with Index; 

Serial Interface 

• Linear or Rotary Glass Scales 

Mercury 

Digital Output 

Encoders 

page 12 

Digital output with fixed 

resolution, small sensor, easy 

alignment, setup software 

• Linear Resolution : 5µm – 0.5µm 

• Rotary Resolution: 6.6k CPR - 655k CPR 



Mercury 

Analog Output 

Encoders 

page 12 

Analog output encoder, 

resolution set by customer 

controller; small sensor; easy 

alignment; setup software 


• Rotary Resolution: 6.6k CPR - 4.2M CPR 

• Output: Sin/Cos with Index 


MERCURY VACUUM ENCODERS 

• Smallest vacuum sensors 

• Glass scales 

Mercury 

Vacuum 

Encoders 

page 14 

Small sensor; programmable 

resolution, output frequency & 

alarms; easy alignment; setup 

software; rated to 10 -8 torr 


• Rotary Resolution: 6.6k CPR – 268M CPR* 

• Output: A-quad-B with Index; Serial 

Interface; Analog Sin/Cos with Index 


CHIPENCODER 

• Smallest PC board 

mount sensor 

ChipEncoder 

page 12 

Digital output with up to 

1µm resolution, small PC 

board mount sensor 

• Linear Resolution : 10µm – 1µm 

• Rotary Resolution: 3k CPR - 327k CPR 



See data sheets and interface drawings on web site for detailed specifications. 

MicroE Systems 

*Resolution, output and scale options vary by model. 

125 Middlesex Turnpike · Bedford, MA 01730 USA 

Tel: 781-266-5700 · Fax: 781-266-5112 

Catalog Rev. A3 www.microesys.com · Email: info@microesys.com © 2011 MicroE Systems

MicroE Systems

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