Interface Drawings - MicroE Systems

Mercury 2000V, 3000V Encoder SystemInterface Drawing: Short Linear ScalesTHESE DRAWINGS AND SPECIFICATIONS ARE THE PROPERTY OF MicroE Systems Corp. AND SHALLNOT BE REPRODUCED OR COPIED OR USED AS THE BASIS FOR MANUFACTURE OR SALEOF APPARATUS WITHOUT EXPRESS WRITTEN AUTHORIZATION FROM MicroE Systems Corp.D.250 6.35.650±.00316.51±0.08.334±.003 8.48±0.082X 2-56UNC-2BREVISIONSECOLTR DESCRIPTION DATE APP'DA --- RELEASE TO PRODUCTION7/8/02 MFB 960 DIMS REF., SCALE THK WAS .037, 9/24/02 MFSNOUT REF.C 1426 UPDATED MODEL WITH SHRUNKEN HYBRID. ADDED NOTE 8. 5/31/05 SBD 1492REMOVED NOTE 8.10/5/05 SBE 1517 UPDATED NOTE 2. SEE ECO11/28/05 MFF 1939 CHANGED CABLE CONNECTOR ON ADAPTER. ADDED HOTMELT. 11/30/07 MFD7.DIRECTION "A"SCALE ORIENTED FOR END INDEX.072 1.83.391 9.93.325 8.26SENSOR MOUNTING PLATE RECOMMENDATIONSCALE: 1:1C1.375 9.53C.098 2.50.250 6.35D=.5BBASCALE ORIENTED FOR CENTER INDEXDATUM D AND DATUM B ARE COPLANERAND MUST BE MAINTAINED WITHIN .005BA.058 1.47SENSOR MTG SURFACE.550 13.97.272 6.91.166 4.22.132 3.35B2B1.130 3.30 .132 3.3559.06 [1500] ±.50 [12.7]ASEE TABLE 1.FOR COLORAND FUNCTIONSSCALES SHOWN IN THESE VIEWS TRANSLATED IN X AXISOUT OF OPERATING RANGE FOR CLARITY19.69 [500] ±.50 [12.7].25 6.4PIN 9NOTE ORIENTATIONOF KEYPIN 1SCALE MTG SURFACE.187 4.75SCALEPATTERN SURFACE.13 3.4(.036 0.91 )BAHEX SHAPEDALUMINUM SLEEVE(MAX OD .20 [5.1].38 9.6VACUUM ADAPTER CABLENOTES:1. RECOMMENDED MOUNTING HARDWARE:2-56 OR M2 SCREWS w/ 4 FLAT WASHERS (2 ON EACH SCREW)(OD OF WASHER NOT TO EXCEED .150 [3.81])2. THIS CONNECTOR (FCI p/n 87012-605 or SAMTEC p/n SFM-105-03-S-D)IS INSIDE THE SMARTPRECISION ELECTRONICS ENCLOSURE(see Interface drawings).6. RECOMMENDED SENSOR MOUNTING PLATE THICKNESS:MINIMUM- 4 SCREW THREADSMAXIMUM- ALLOW CLEARANCE FOR SCALE AND SCALEMOUNTING HARDWARE (BENCHING SURFACES, CLAMPS,HUBS, ETC.)7. WHEN SCALE MOVES IN DIRECTION "A" WITH RESPECT TO ASTATIONARY READHEAD, OUTPUT SIGNAL COS+ (BROWN[PIN 5]) LEADS OUTPUT SIGNAL SIN+ (YELLOW [PIN 1]).PIN 101.73 [43.9]3. IF BENCHING PINS ARE TO BE USED, PINS MUST BE PLACED ALONG DATUMEDGES OF BOTH THE SENSOR AND THE SCALE FOR PROPER ALIGNMENT.(REFERENCE DATUMS B1, B2 AND C1 FOR SENSOR BENCHING PINS).4. HEIGHT OF SENSOR BENCHING PINS MUST BE A MINIMUMOF .170 [4.32] IN HEIGHT FROM DATUM A.5. HEIGHT OF SCALE BENCHING PINS NOT TO EXCEED THE THICKNESS OF THE SCALE.PIN 2SEE TABLE 1.FOR COLORAND FUNCTIONS(SEE NOTE 2.)SCALE IDENTIFICATION AND SIZE.Scale Dim A. Dim B.Identification Mea # sured Length Scale LengthLXX XX mm-5mm XXmmL30 30mm-5mm = 25mm 30mm(max) L130 130mm-5mm = 125mm 130mmTHESE ARE EXAMPLES2XB.033 0.84.083 2.11(.155 3.93 ).277 7.03.334 8.48.500 12.70.106 2.69 THRU4X R.030 0.76TABLE 1.Wire Color Function PinYellow SIN+ 1Green SIN- 3Brown COS+ 5Orange COS- 7Blue INDEX WINDOW - 2Red +5V 8Violet INDEX W INDOW + 6Black GND 4Gray N/C 9White N/C 10UNLESS OTHERWISE SPECIFIEDALL DIMENSIONS ARE IN INCHES [millimeters]DIM. APPLY AFTER PROCESSINGINTERPRET ALL GEOMETRIC TOLS.PER ANSI Y14.5M-1994TOLERANCES ARE:DECIMALS: ANGULAR:.XX [.X] .01 [.25] 30 MIN..XXX [.XX] .005 [.13].810 20.57.650 16.51APPROVALSDRAWNS.BUTURLIACHECKEDENGRG.D.GRIMESMFG ENGG.ANGELOPOULOSQAJ.FARNAM.555 14.10(.40510.29 ).255 6.48.080 2.03DATEC6/24/027/3/027/3/027/3/02R.071 1.88x1.00[25.4]DESCRIPTION:SIZEBSCALE:DWG. NO..25 6.2INTERFACE, ENCODER, 20um,SHORT LINEAR, MERCURY2000/3000 VACUUM SENSOR2:1CAD FILE:SEE TABLE 1.FOR COLORSAND FUNCTIONSID-00237UNITS: .in [mm]MicroE SystemDivision of GS8 Erie DriveNatick, MA 017603rd ANGLEPROJECTIONREV.FSHEET 1 OF 1

Mercury 2000V, 3000V Encoder SystemInterface Drawing: Long Linear ScalesTHESE DRAWINGS AND SPECIFICATIONS ARE THE PROPERTY OF MicroE Systems Corp. AND SHALLNOT BE REPRODUCED OR COPIED OR USED AS THE BASIS FOR MANUFACTURE OR SALEOF APPARATUS WITHOUT EXPRESS WRITTEN AUTHORIZATION FROM MicroE Systems Corp.DREVISIONSECOLTR DESCRIPTION DATE APP'DA --- RELEASE TO PRODUCTION7/8/02 MFB 960 SNOUT DIMS CHANGED TO REF. 9/24/02 MFC 1426 MODEL UPDATED WITH SHRUNKEN HYBRID. ADDED NOTE 8. 5/25/05 SBD 1492 REMOVED NOTE 8.10/5/05 SBE 1517 UPDATED NOTE 2. SEE ECO11/23/05 MFF 1939 CHANGED ADAPTER CABLE CONNECTOR. ADDED HOTMELT. 11/30/07 MFD.519 13.17C1C17.DIRECTION "A"SCALE ORIENTED FOR END INDEXB.375 9.53.098 2.50BASCALES SHOWN IN THESE VIEWS TRANSLATEDIN X AXIS OUT OF OPERATING RANGEFOR CLARITY.132 3.35A.550 13.97.130 3.30.787 20.00CDSEE TABLE 1.FOR FUNCTIONAND COLOR=.5B19.69 [500] ±.50 [12.7].269 6.83SCALE ORIENTED FOR CENTER INDEX.25 6.4 PIN 9BNOTE ORIENTATIONOF KEYPIN 1ASENSOR MTG SURFACESCALE MTG SURFACE.249 6.33.166 4.22.132 3.35.058 1.47.272 6.91B2B1SCALE PATTERNSURFACE59.06 [1500] ±.50 [12.7].13 3.4(.098 2.50 )8X 1.00 [25.4]BAHEX SHAPEDPIN 10PIN 2ALUMINUM SLEEVE1.73 [43.9](MAX OD .20 [5.1] SEE TABLE 1..38 9.6FOR FUNCTIONVACUUM ADAPTER CABLEAND COLORNOTES:(SEE NOTE 2)1. RECOMMENDED MOUNTING HARDWARE:2-56 OR M2 SCREWS w/ 4 FLAT WASHERS (2 ON EACH SCREW)(OD OF WASHER NOT TO EXCEED .150 [3.81]).650±.00316.51±0.082. THIS CONNECTOR (FCI p/n 87012-605 or SAMTEC p/n SFM-105-03-S-D) .334±.003 8.48±0.08IS INSIDE THE SMARTPRECISION ELECTRONICS ENCLOSURE(see Interface drawings).3. IF BENCHING PINS ARE TO BE USED, PINS MUST BE PLACEDALONG DATUM EDGES OF BOTH THE SENSOR AND THE SCALE.072 1.83FOR PROPER ALIGNMENT. (REFERENCE DATUMS B1, B2 AND.325C1 FOR SENSOR BENCHING PINS).4. HEIGHT OF SENSOR BENCHING PINS MUST BE A MINIMUMOF .170 [4.32] IN HEIGHT FROM DATUM A.5. HEIGHT OF SCALE BENCHING PINS NOT TO EXCEED THE THICKNESSOF THE SCALE.6. RECOMMENDED SENSOR MOUNTING PLATE THICKNESS:MINIMUM- 4 SCREW THREADSMAXIMUM- ALLOW CLEARANCE FOR SCALE AND SCALEMOUNTING HARDWARE (BENCHING SURFACES, CLAMPS, HUBS, ETC.)7. WHEN SCALE MOVES IN DIRECTION "A" WITH RESPECT TO ASTATIONARY READHEAD, OUTPUT SIGNAL COS+ (BROWN[PIN 5]) LEADS OUTPUT SIGNAL SIN+ (YELLOW [PIN 1]).8.26SENSOR MOUNTINGPLATE RECOMMENDATIONSCALE: 1:1LXX XX mm-5mm XXmmL155 155mm-5mm = 150mm 155mm(max) L2025 2025mm-5mm = 2020mm 2025mmTHESE ARE EXAMPLES2X 2-56UNC-2B.391 9.93SCALE IDENTIFICATION AND SIZE.Scale Dim A. Dim B.Identification #Mea sured Length Scale LengthB.500 12.70.083 2.11(.155 3.93 ).277 7.03.334 8.48.033 0.84.810 20.572X .106 2.69 THRU.080 2.034XR.030 0.76TABLE 1.Wire Color Function PinYellow SIN+ 1Green SIN- 3Brown COS+ 5Orange COS- 7Blue INDEX WINDOW - 2Red +5V 8Violet INDEX WINDOW + 6Black GND 4Gray N/C 9White N/C 10.650 16.51UNLESS OTHERWISE SPECIFIEDALL DIMENSIONS ARE IN INCHES [millimeters]DIM. APPLY AFTER PROCESSINGINTERPRET ALL GEOMETRIC TOLS.PER ANSI Y14.5M-1994TOLERANCES ARE:DECIMALS: ANGULAR:.XX [.X] .01 [.25] 30 MIN..XXX [.XX] .005 [.13]APPROVALSDRAWNS.BUTURLIACHECKED.555 14.10(.40510.29 ).255 6.48CENGRG.D.GRIMESMFG ENGG.ANGELOPOULOSQAJ.FARNAMR.071 1.8DATE6/24/027/3/027/3/027/3/02DESCRIPTION:SIZEBSCALE:DWG. NO..24 6.2SEE TABLE 1.FOR COLORSAND FUNCTIONS8 Erie DriveNatick, MA 01760INTERFACE, ENCODER, 20um,LONG LINEAR, MERCURY2000/3000 VACUUM SENSORID-00238F2:1CAD FILE:UNITS: .in [mm]MicroE SystemDivision of GS3rd ANGLEPROJECTIONREV.SHEET 1 OF 1

VACUUM ADAPTER CABLEMercury 2000V, 3000V Encoder SystemInterface Drawing: Rotary Scales with HubDCTHESE DRAWINGS AND SPECIFICATIONS ARE THE PROPERTY OF MicroE Systems Corp. AND SHALLNOT BE REPRODUCED OR COPIED OR USED AS THE BASIS FOR MANUFACTURE OR SALEOF APPARATUS WITHOUT EXPRESS WRITTEN AUTHORIZATION FROM MicroE Systems Corp.NOTE:1. RECOMMENDED MOUNTING HARDWARE:2-56 OR M2 SCREWS w/ 4 FLAT WASHERS (2 ON EACH SCREW)(OD OF WASHER NOT TO EXCEED .150 [3.81])2. THIS CONNECTOR (FCI p/n 87012-605 or SAMTEC p/n SFM-105-03-S-D)IS INSIDE THE SMARTPRECISION ELECTRONICS ENCLOSURE(see Interface drawings).3. IF BENCHING PINS ARE TO BE USED, PINS MUST BE PLACEDALONG DATUM EDGES OF SENSOR FOR PROPER ALIGNMENT.(REFERENCE DATUMS B1, B2 AND C1).4. HEIGHT OF SENSOR BENCHING PINS MUST BE A MINIMUMOF .170 [4.32] IN HEIGHT FROM DATUM A.5. RECOMMENDED SENSOR MOUNTING PLATE THICKNESS:MINIMUM- 4 SCREW THREADSMAXIMUM- ALLOW CLEARANCE FOR SCALE AND SCALEMOUNTING HARDWARE (BENCHING SURFACES, CLAMPS,HUBS, ETC.)6. WHEN SCALE MOVES IN DIRECTION "A" WITH RESPECT TO ASTATIONARY READHEAD, OUTPUT SIGNAL COS+ (BROWN [PIN 5]) LEADSOUTPUT SIGNAL SIN+ (YELLOW [PIN 1]).ABABC.272 6.91.166 4.22.132 3.35.151 3.84.405±.003 10.29±0.08D.550 13.97B2B1.130 3.30EMACHINE AXISDIRECTION "A"6.C1.375 9.5359.06 [1500] ±.50 [12.7]REVISIONSLTR ECODESCRIPTION DATE APPROVEDA --- RELEASE TO PRODUCTION7/8/02 MFB 954 CORRECTED DIMS IN TABLE (Dim D), mm CONVERSION INCORRECT 8/29/02 MFC 960 SNOUT DIMS REF., ADDED R1206 TO TABLE. 9/24/02 MFD 1124 UPDATED SCALE TABLE, ADDED HUB I.D., AND HEIGHT TO R1206. SEE ECO 6/26/03 MFE 1159 SCALE THICKNESS TOLERANCE WAS ±.008. SEE ECO 3/8/04 MFF 1492 REMOVED HUB AND UPDATED TABLE.10/5/05 SBG 1517 UPDATED NOTE 2. UPDATED TITLE BLOCK. SEE ECO11/28/05 MFH 1939 CHANGED ADAPTER CABLE CONNECTOR. ADDED HOTMELT. SEE ECO 11/30/07 MFSEE TABLE 1. FORFUNCTION AND COLORS.132 3.35A.13 3.4.25 6.4HEX SHAPEDALUMINUM SLEEVE(MAX OD .20 [5.1].38 9.619.69 [500]±.50 [12.7]SENSOR MTG SURFACEBA.650±.00316.51±0.08.334±.003 8.48±0.08.072 1.832X 2-56UNC-2B.391 9.93.325 8.26SENSOR MOUNTING PLATE RECOMMENDATIONSCALE: 1:1SCALE MTG SURFACESCALE SIZE AND MOUNTING OPTIONS. DIMENSIONS IN INCHES [MILLIMETERS]B.500 12.702X.058 1.47.083 2.11(.155 3.93 ).277 7.03Scale Counts/ Dim. A Dim. B Dim. C Dim. D Dim. EIdentificationRev Scale O.D. Optical Dia.Mounting Dim. Scale D. I. Scale ThicknessR1206 1,650 0.472 0.413 0.348+/-.002 .250+/-.005 .036+/-.002[12.00] [10.50] [8.84+/-.05] [6.35+/-.13] [.91+/-.05]R1910 2,500 0.750 0.627 0.454+/-.002 .375+/-.005 .090+/-.004[19.05] [15.92][11.53+/-.05][9.53+/-0.13] [2.29+/-.10]R3213 4,096 1.250 1.027 0.654+/-.002 .500+/-.005 .090+/-.004[31.75] [26.08][16.62+/-.05][12.70+/-0.13][2.29+/-.10]R5725 8,192 2.250 2.053 1.168+/-.002 1.000+/-.005 .090+/-.004[57.15] [52.15][29.66+/-.05][25.40+/-0.13][2.29+/-.10]R10851 16,384 4.250 4.106 2.194+/-.002 2.000+/-.005 .090+/-.004[107.95] [104.30] [55.73+/-.05][50.80+/-0.13][2.29+/-.10].334 8.48.033 0.84.106 2.69 THRU.4X R.030 0.76SCALEPATTERN SURFACE.810 20.57.650 16.51.555 14.10(.40510.29 ).255 6.48.080 2.03CE4X R.07 1.8.25 6.28x1.00 [25.4]SEE TABLE 1.FOR COLORSAND FUNCTIONSUNLESS OTHERWISE SPECIFIED APPROVALSALL DIMENSIONS ARE IN DRAWNINCHES [MILLIMETERS] S.BUTURLIADIM. APPLY AFTER PROCESSING CHECKEDINTERPRET ALL GEOMETRIC TOLS.PER ANSI Y14.5M-1994ENGRG.TOLERANCES ARE: D.GRIMESDECIMALS: ANGULAR: MFG ENG.XX [.X] .01 [.25] 30 MIN. G.ANGELOPOULOS.XXX [.XX] .005 [.13]QAJ.FARNAMNOTE ORIENTATIONOF KEYDATE6/24/027/3/027/3/027/3/02PIN 10SEE TABLE 1.FOR FUNCTIONAND COLOR(SEE NOTE 2)PIN 21.73 [43.9]PIN 9PIN 1TABLE 1.Wire Color Function PinYellow SIN+ 1Green SIN- 3Brown COS+ 5Orange COS- 7Blue INDEX W INDOW - 2Red +5V 8Violet INDEX WINDOW + 6Black GND 4Gray N/C 9White N/C 10UNITS: .in [mm]MicroE SystemDivision of G8 Erie DriveNatick, MA 0176DESCRIPTION:INTERFACE, ENCODER, 20um,ROTARY, MERCURY2000/3000 VACUUM SENSORSIZE DWG. NO.REV.B ID-00239H3rd ANGLESCALE: 2:1 CAD FILE:PROJECTION SHEET 1 OF 11

Mercury 2000V, 3000V Encoder SystemInterface Drawing: SmartPrecision Electronics Module (Interpolator)THESE DRAWINGS AND SPECIFICATIONS ARE THE PROPERTY OF MicroE Systems Corp. AND SHALLNOT BE REPRODUCED OR COPIED OR USED AS THE BASIS FOR MANUFACTURE OR SALEOF APPARATUS WITHOUT EXPRESS WRITTEN AUTHORIZATION FROM MicroE Systems Corp.2.11 53.52.03 51.5REVISIONSECOLTR DESCRIPTION DATE APPROVED---RELEASE TO PRODUCTIONA 1/23/02 PDB 862 UPDATED ENCLOSURE HEIGHT 5/14/02 PDC 879 6/5/02 MFONE INTERFACE, UPDATED TABLE 1. CREATED SEE ECOD 9609/24/02 MFADDED SS350c TO TABLE, ADDED NOTES PIN 6 AND PIN 10E 1058 ADDED SS350cSi TO TABLE, SEE ECO 2/14/03 MFF 1156ADDED NOTE 1.9/5/03 SBG 1517 CHANGED SMARTSIGNAL TO SMARTPRECISION.11/28/05 MF1.89 48.0.82 20.82.18 55.41.50 38.12X .13 3.3TABLE 1.THRU. DB15-HD PINOUTSPin Functions Functions Functions Functions(SS200c) (SS300c/SS350c) (SS300cSi) (SS350cSi)1 GND GND GND GND2 Transmit Transmit Transmit TransmitPIN 13 Receive Receive Receive ReceivePIN 54 A- A- SDO- SDO-5 A+ A+ SDO+ SDO+PIN 66 Reserved Reserved Reserved Reserved7 Reserved Reserved N_CS+ N_CS+8 Reserved Reserved N_CS- N_CS-.85 21.59 B- B- Trigger- SCK_FBK-10 B+ B+ Trigger+ SCK_FBK+11 Reserved Alarm Alarm AlarmPIN 1012 +5V +5V +5V +5V13 GND GND GND GND.46 11.6PIN 1114 Index+ Index+ SCK+ SCK+PIN 15.46 11.615 Index- Index- SCK- SCK-.10 2.41.NOTES:1. PIN 1 IS A "RESERVED" PIN THAT SHOULD BE GROUNDED FOR PROPER SYSTEMPERFORMANCE. THE GROUND CONNECTION SHOULD BE MADE TO PIN 13 INTHE MATING CONNECTOR.UNLESS OTHERWISE SPECIFIED APPROVALSDRAWNALL DIMENSIONS ARE IN INCHES [millimeters]DIM. APPLY AFTER PROCESSING PAUL DEVINECHECKEDINTERPRET ALL GEOMETRIC TOLS.PER ANSI Y14.5M-1994ENGRG.TOLERANCES ARE:DECIMALS: ANGULAR: PAUL REMILLARDMFG ENG.XX [.X] .01 [.25] 30 MIN..XXX [.XX] .005 [.13]MIKE SKWIRAQAJACK FARNAMUNITS: .in [mm]DATEMicroE SystemsDivision of GSI1/10/028 Erie DriveNatick, MA 017601/23/02 DESCRIPTION:1/23/021/23/02SIZEINTERFACE, SMARTPRECISIONINTERPOLATORBDWG. NO.ID-002201REV.G3rd ANGLESCALE: 1X CAD FILE:PROJECTION SHEET 1 OF 1