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ICPT 2009 in JapanInternational Conference onPlanarization/CMP TechnologyDate Nov. 19-21, 2009Venue Kyushu University Nishijin Plaza (Fukuoka, Japan)Organized byJapan Planarization and CMP Technical Committee,The Japan Society for Precision Engineering (JSPE)In cooperation withKorea CMP User Group (KCMPUG)Northern California Chapter AVS (NCCAVS) CMPUGGerman CMP User Group (GCMPUG)Chemical Mechanical Planarization User Group Taiwan (CMPUGTW)Copyright © International Conference on Planarization/CMP Technology 2009

■ Call for Paper- ApplicationICPT2009 will accept two types of presentations: ORAL presentations and POSTER presentations.Authors can select oral or poster presentations at the time of application.Papers submitted for the oral presentations will be reviewed, examined and decided as acceptedpapers or not, based on the submitted abstracts by the Program Committee.Authors, interested in planarization/CMP technology are invited to submit contributions forpresentations at the conference. Submitted papers have to be unpublished and not to be underreview for any publications. All papers will be reviewed by peers and the Technical Committee ofICPT 2009 reserves the right to accept or reject papers.The Technical Committee of ICPT 2009 strongly welcomes student’s submission. Please take thisgreat opportunity to exchange research interests among outstanding engineers and scientists in theworld.- Subjects of InterestPapers, reports, and poster submissions are welcome on a wide range of planarization topics, suchas:Copper/low-k CMP process and control Dielectric/STI CMP process and controlCorrosion control during CMP process CMP process integration issues and reliabilityCMP defectsPost CMP cleaningCMP consumables (polishing pads, slurries) CMP equipment and metrologyCMP modeling, simulation and theory Chemical and physical mechanism of CMPMetrology, characterization and test Advanced CMP process control techniquesLow pressure CMPAdvances in ECD/ECP/ECMP process and toolsCMP in emerging technologyCMP applicationMEMS CMP3D-IC / TSV (Through Silicon Via)Others- Electrical submissionThe official language at all sessions is English(1) Abstract submissionAuthors have to submit the abstract. The Technical Committee will review the abstracts and will notifyit’s acceptance or not. Abstract have to be submitted as electronic form in MS-Word or PDF format intwo pages of specified format appeared on the conference web-site.Please click to download the abstract format.Please indicate the preference of oral or poster presentation when submitting the abstract. Postersare for the presentation of project or research under developing.For those authors who cannot electronically submit their abstracts, please contact the conferencesecretariat on the web-site.Abstracts will be submitted only via e-mail to : icpt2009@convention.co.jpThe subject of the e-mail should be "icpt2009- abstract".Deadline for abstract submission is June 14, 2009. (GMT+0900)(2) Abstract acceptance notificationThe author of those abstracts accepted will be notified via e-mail by July 19, 2009.

(3) Full paper submissionAuthors are requested to send camera-ready full length papers including figures, tables andreferences for oral and poster presentation through the conference web-site upon the acceptedabstract.Full papers must be submitted in PDF format, and be submitted through the conference web-siteelectronically at http://www2.convention.co.jp/icpt2009.Accepted papers will be published in proceedings without revisions.Deadline for full paper submission is September 13, 2009. (GMT+0900)(4) Final notice of acceptanceFinal notice of acceptance will be by September 30, 2009. Accepted papers must be presented byone of the authors at the conference in English, and will be limited to 20 minutes including time fordiscussion. All presenters are requested to register for the conference.■ Important DatesDeadline for abstract submission : June 14, 2009Acceptance notification : July 19, 2009Deadline for full paper submission : September 13, 2009Final notice of acceptance : September 30, 2009■ Conference FeeEarly bird registration (before September 30, 2009) : JPY 38,000Ordinary registration (After October 1, 2009 ) : JPY 42,000Student registration : JPY 8,000■ BanquetConference participants will be invited to the banquet on the evening of November 19, 2009.■ Hotel & ToursHotel and tour information during the conference will be announced by May, 2009.■ ContactICPT2009 Secretariatc/o Japan Convention Services, Inc.Kyushu Branch Fukuoka Daido Seimei Bldg.,12-33, Nishinakasu, Chuo-ku, Fukuoka,810-0002 JapanTel: +81-92-712-6201 Fax: +81-92-712-6262E-mail: icpt2009@convention.co.jp

■ Exhibition-Booth & PanelTechnology Exhibitions by companies, research institutes and laboratories are welcomed toparticipate in the ICPT2009. Exhibitors can choose between a) Booth type or b) Panel typedisplay. Exhibitors can exhibit their products at the display table of their booth, and haveexhibition staff, and privileged guests. Exhibitors who prefer panel displays can exhibit with panels.More importantly, the exhibitor’s company logo marks will be printed in proceedings, documents,banners and on the web-site.[A] Booth DisplaySize of booth : 1800×900×2100(H) with panel and display tableFacility : electric power (AC 100V/200W),Exhibition fee :a) JPY 300,000 : 1 booth, 2 exhibition staff and 2 guestsb) JPY 400,000 : 1 booth, 2 exhibition staff and 3 guestsc) JPY 500,000 : 1 booth, 2 exhibition staff and 6 guests[B] Panel DisplaySize of panel : 900×1800(H)Exhibition fee :d) JPY 100,000 : 1 panel and 1 exhibition staff- Deadline for applicationDeadline of the application for the Technology Exhibition is July 31, 2009- Apply to Exhibitions/SponsershipPLEASE click to download the Application formApplication will be submitted via e-mail to : icpt2009@convention.co.jp■ BanquetConference participants will be invited to the banquet on the evening of November 19, 2009.■ ContactICPT2009 Secretariatc/o Japan Convention Services, Inc.Kyushu Branch Fukuoka Daido Seimei Bldg.,12-33, Nishinakasu, Chuo-ku, Fukuoka,810-0002 JapanTel: +81-92-712-6201 Fax: +81-92-712-6262E-mail: icpt2009@convention.co.jp