HFM-210 / HFC-212 - Chell Instruments Limited

TELEDYNE HASTINGSLOW CAPACITY FLOWMETERS ANDCONTROLLERSINSTRUMENTSModels HFM-210,HFC-212FEATURES• ±1% of Full-ScaleAccuracy 1• Proven Reliability• Range — 10 to 30,000sccm (N 2Equivalent)• NIST TraceableCalibration• Tylan ® FC-280 FootprintAPPLICATIONS• Leak Testing• Medical Research• Vapor Deposition• R&D and Process Flows• Semiconductor Processes• Pollution Monitoring• Gas Blending• ChromatographyHFM-210 / HFC-212DESIGN FEATURESThe Teledyne Hastings Instruments (THI)Model HFM Mass Flowmeter and HFC MassFlow Controller represent over 55 years ofexperience in designing and manufacturingreliable, high quality mass flow instruments.The HFM/HFC Series flow instrument can beset up to measure and control any of a widevariety of gases under many different pressureconditions as required.The Models HFM-210 and HFC-212 werespecifically designed to meet the footprintdimensions of the Tylan ® FC-280 model. Theyare based on refinements to the existing Hastings200 Series flow product line.The HFM/HFC Series of flow instruments isbased on a modular design. At the heart ofeach instrument is an insulated thermo electricsensor which provides enhanced zero stabilityand allows installation in any orientation planein most low pressure applications. This sensoris designed to be removable/replaceable in thefield to virtually eliminate long down time dueto clogging. Additionally, the HFM/HFC designfeatures an integral filter and an easily replaceableclosed loop electronics card.* The HFCalso features an externally adjustable valvewith easily replaceable flow orifices.All of these standard features, when coupledwith the instrument’s inherent linear responseto flow changes and THI’s long-proven reputationfor quality, result in the finest flowmetersand flow controllers available today.Optional FeaturesFittingsO-ring sealsEnhanced response timeEnhanced EMF stabilityHigh pressure rating (1000 psig)4-20 mA convertersCleaned for oxygen serviceAccessoriesPower supplies/readoutsInterconnecting cables*Note: After changing components, instruments require recalibration tomeet accuracy specifications.Tylan ® is a registered trademark of the Mykrolis Corporation.

MODELS HFM-210, HFC-212SPECIFICATIONS HFM-210Accuracy 1 and Linearity ±1% F.S.Repeatability±0.05% F.S. (max.)Standard Pressure Rating 500 psigPressure Coefficient +0.0067% Rdg/psi (0-1000 psig N 2)High-Pressure Option Proof tested to 1500 psigLeak Integrity< 1x10 -9 sccsTemperature Coefficient Zero ±0.08% F.S./ o C (max.)(0°-50°C)Span ±0.15% Rdg/ o C (max.)STP0°C and 760 TorrInput Power±15 VDC at ±30 mA (max.)Flow Signal0-5.00 VDC or 4-20 mA (inherently linear)Wetted Material316 SS, Viton ® , 87/13 Au/Ni BrazeConnector15 pin Subminiature DFittings AvailableSwage (1/8”, 1/4” & 3/8”), VCO, VCRWeight (approx.)1.8 lb (0.82 kg)SPECIFICATIONS HFC-212Accuracy 1 and Linearity ±1% F.S.Repeatability±0.05% F.S. (max.)Standard Pressure Rating 500 psigPressure Coefficient +0.0067% Rdg/psi (0-1000 psig N 2)Control Valve DPPer customer requestHigh-Pressure Option Proof tested to 1500 psigLeak Integrity< 1x10 -9 sccsTemperature Coefficient Zero ±0.08% F.S./ o C (max.)(0°-50°C)Span ±0.15% Rdg/ o C (max.)STP0°C and 760 TorrInput Power±15 VDC at +60 mA/-185 mA (max.)Flow Signal0-5.00 VDC or 4-20 mA (inherently linear)Command Input0-5.00 VDC or 4-20 mA availableWetted Material316 SS, Nickel, Viton ® , 87/13 Au/Ni BrazeConnector15 pin Subminiature DFittings AvailableSwage (1/8”, 1/4” & 3/8”), VCO, VCRWeight (approx.)1.8 lb (0.82 kg)Teledyne Hastings Instruments reserves the right to change or modify the design of its equipmentwithout any obligation to provide notification of change or intent to change.Kalrez ® is a registered trademark of Dupont Dow Elastomers L.L.C.Swagelok ® is a registered trademark of Crawford Company.VCR ® is a registered trademark of Cajon Company.VCO ® is a registered trademark of Cajon Company.Viton ® is a registered trademark of Dupont Dow Elastomers L.L.C.1See Product Manual for critical informationon instrument accuracy and theuse of GCFs (gas conversion factors).Stated accuracy is for nitrogen or othergas specific calibration and use withthis gas only.

MODELS HFM-210, HFC-212Model HFM-210Model HFC-212All dimensions shown are in inches [mm].

MODELS HFM-210, HFC-212Selection ChartTypical instrument ordering/options number:Model No. Circuit Output Fittings O-Rings Working CalibrationBoard Pressure TypeHFM-210 01 01 01 01 01 01Order No.OptionsCircuit Board01 Standard02 Fast ResponseOutput01 0-5 Volts (Standard)02 4-20mAFittings01 1/4” Swagelok (Standard)02 1/8” Swagelok03 VCR ® 1/4”04 VCO ® 1/4”05 1/4” Elbow06 No FittingsSelection ChartTypical instrument ordering/options number:Order No.OptionsO-Rings01 Viton (Standard)02 Kalrez ®03 NeopreneWorking Pressure01 500 psig (Standard)02 1000 psigCalibration Type01 NIST 5 Point (Standard)02 NIST 10 Point03 NIST 20 PointModel No. Circuit Output Fittings O-Rings Working CalibrationBoard Pressure TypeHFC-212 01 01 01 01 01 01Order No.OptionsCircuit Board01 StandardOutput01 0-5 Volts (Standard)02 4-20mA Output03 4-20mA I/OFittings01 1/4” Swagelok (Standard)02 1/8” Swagelok03 VCR 1/4”04 VCO 1/4”05 1/4” Elbow06 No FittingsOrder No.OptionsO-Rings01 Viton (Standard)02 Kalrez03 NeopreneWorking Pressure01 500 psig (Standard)02 1000 psigCalibration Type01 NIST 5 Point (Standard)02 NIST 10 Point03 NIST 20 PointRange InformationRange _____________________________Flow Units __________________________Gas _______________________________Standard Conditions* _________________*Referenced to standard temperature and pressure(0°C and 760 Torr, respectively).Range InformationRange _____________________________Flow Units __________________________Gas _______________________________Upstream Pressure ___________________Downstream Pressure _________________Is downstream pressure dependent on flowresistance? Y/N ___________________Standard Conditions* _________________*Referenced to standard temperature and pressure(0°C and 760 Torr, respectively).Your Customer Service RepresentativePB 162-10/05 © Teledyne 2005 All Rights Reserved.Telephone: (757) 723-6531Toll Free: (800) 950-2468Fax: (757) 723-3925World Wide Web: http://www.teledyne-hi.comE-mail:hastings_instruments@teledyne.comP.O. Box 1436Hampton, VA 23661