Glancing Angle X-ray Diffraction (GAXRD) Technique

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Useful Applications • By reducing the angle of incidence, hence penetration of x-rays in to the specimen, the contribution of substrate to the diffraction pattern can be minimized. • Alternatively, a specimen can be probed through its thickness by varying the angle of incidence. • (a) As deposited 20 nm Ir metal film deposited on Si wafer. XRD curve for αα=0.5 =0.5 o and 1.0 o shows the peaks for cubic iridium metal phase represented by (+) • (b) Ir film annealed at 873K for 1hr. XRD curve for αα=0.5 =0.5o shows the presence of the dominating IrO 2 phase (*). As αα was increased to 1.0°, 1.0 the contribution from the underlying layer of Ir metal increased and the Ir peaks dominated the XRD curve. The results indicate the presence of an overlying oxidized layer of Ir metal GAXRD: Example 15 16
Experimental Issues • The diffraction peaks appear to shift to higher angles at small glancing angles. • For ααC, shift due to refraction caused by penetration of x-ray beam is approximately given as ( ) ( ) 1 θ α α α ∆ 2 − − C 2 2 2 • In order to estimate crystallite size from FWHM, somewhat higher glancing angle than the α C for film should be used. 17
Page 1 and 2: Glancing Angle X-ray X ray Diffract
Page 3 and 4: Scattering Consider two homogenous
Page 5 and 6: Glancing Angle For high energy x-ra
Page 7: Penetration Depth Vs Angle of Incid

Glancing Angle X-ray Diffraction (GAXRD) Technique

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