High & Ultrahigh Vacuum Thin Film Deposition Technology

High & Ultrahigh VacuumThin Film Deposition TechnologyVACUUM PRODUCTS CORPORATION

Frame 6 Electron Beam SourceMighty Source mounted on a 6-inch CF flangeXY Programmable Sweep Controllere-Vap ® SummaryVacuum coating technology has evolvedfrom an art form to a precise science overthe past 40 years. It is now commonplaceto evaporate metals, alloys, compoundsand polymers, and control their desiredthicknesses from mere atomic layers toactual microns.Thin Film DepositionMDC produces state-of-the-art thin filmvacuum coating equipment. We currentlysupply users in the optical, metallurgical,medical, semiconductor, research &development, university and OEMmarketplace.Numerous applications include sunglasses,mirrors, laser optics, camera lenses, opticalfilters, infrared detectors, anti-reflectivecoatings, nano-technologies, medicaldevices, superconductors, telecommunications,automotive decorative trim,costume jewelry, corrosion resistantcoatings, stage & entertainment lighting,fiber optic coating, display technologiesand MEMs technology.The e-Vap ® Product LineMDC offers a wide range of choices andoptions. We understand that every vacuumsystem configuration may be different. Weoffer many standard off-the-shelfcomponents as well as customized designsto suit your particular deposition equipmentneed. The e-Vap ® product line supportstwo distinct evaporation methods: the firstbeing thermal or resistive evaporation andthe second being electron beamevaporation.Resistive EvaporationThe Re-Vap resistive sources are by farthe most economical and reliable methodof depositing thin films onto surfaces. Ingeneral terms, electric current passesthrough a resistive element that generatessufficient heat to melt and evaporatevarious coating materials. Materialscommonly evaporated include iron, nickel,aluminum, copper, tin, silver, gold andchrome. Three basic resistive elementdesigns are offered: filament coil, metal foiland oxide crucible types. Filament coildesigns are the most popular. All resistiveelements are relatively inexpensive andcan be discarded after each use or afterseveral uses.Electron Beam EvaporationMDC offers an unprecedented selection ofelectron beam evaporation sources andcontrol electronics. Electron beamevaporation is the most versatile means ofvacuum evaporation and deposition. Thistechnique allows the production of thin filmcoatings from pure elements, numerousalloys and compounds. Electron beamevaporation offers several advantages overcompeting processes including precisecontrol of low or high deposition rates,excellent material utilization, sequential &co-deposition and uniform low temperaturedeposition. It also offers relatively highevaporation rates, freedom from sourcecontamination, precise film compositionsand cooler substrate temperatures. Thematerials used for evaporation areavailable in near limitless shapes andforms, the most common being pellets,slugs and disks. Since the 1950s, thedevelopment of higher performance filmsand complex coating processes has beenobstructed by the lack of modern electronbeam evaporation equipment andtechnology. The e-Vap ® product line hastaken this challenge head-on and provideselectron beam evaporation sources andcontrol electronics that incorporate leadingedge technologies unmatched in theindustry.CVS High Voltage Power SupplyCopyright © 2005 MDC Vacuum Products CorporationReproduction in any manner, in whole or in part, in English orin other languages, is prohibited. All rights reserved.

Thin FilmDepositionIntroduction 2Thermal EvaporationRe-Vap 900 4Re-Vap 3000 6Miniature Evaporation Systemse-Vap ® 100 10e-Vap ® 3000 12Mighty Source 14Modular Evaporation SourcesIndividual Source 17Horizontal Source Assembly 23Vertical Source Assembly 25Power Supplies 27Controls & MeasurementSource Control Module 28XY Programmable Sweep Controller 29Deposition Monitoring and Control 33Crucible Indexer 36Evaporation Source Accessories 37HF Emitter Assembly 41Ordering Information 43Index 441

e-Vap ®IntroductionThin Film DepositionThin Film DepositionThin film deposition of metallic, insulating,conductive and dielectric materials playsan important role in a large number ofmanufacturing, production and researchapplications. Resistance heating, sputteringand electron beam are the processes mostwidely used. Techniques employed toperform these processes differ in degree ofsophistication and quality of film produced.A resistance heated evaporation source isrelatively simple and inexpensive, but thematerial capacity is very small. Sputterdeposition can be used to coat large areasand complex surfaces in productioncoating environments utilizing time andpower for rate control.Electron beam evaporation is the mostversatile means of vacuum evaporationand deposition. This technique allows theproduction of thin film coatings from pureelements, including most metals, as wellas numerous alloys and compounds.Electron beam evaporation offers severaladvantages over competing processesincluding precise control of low or highdeposition rates, excellent materialutilization, co-deposition and sequentialdeposition systems and a uniform lowtemperature deposition. Electron beamoffers higher evaporation rates, freedomfrom contamination, precise rate control atvery low deposition levels, precise filmcomposition and cooler substratetemperatures. The materials used forevaporation are available in near limitlessshapes and forms, the most commonbeing pellets, slugs and disks. Since theintroduction of electron beam evaporationin the 1950s, the development of higherperformance films and complex coatingprocesses has been delayed by the lack ofmodern electron beam equipment andtechnology. MDC’s e-Vap ® product linehas taken this challenge head-on andprovides electron beam evaporationsources and control electronics thatincorporate leading edge technologiesunmatched in the industry.Thin Film ApplicationsThin film applications requiring electronbeam evaporation are continuallyincreasing. Applications are found in themedical, metallurgical, telecommunication,micro-electronic, optical coating andsemiconductor industries. Electron beamevaporation sources are employed in theproduction of a multitude of low and hitechproducts including: sunglasses,camera lenses, optical filters, infrareddetectors, superconductors, automotivedecorative trim, costume jewelry, corrosionresistant surfaces and many others.Electron beam deposition is ideal forresearch and production applications dueto its widespread material availability,efficient material utilization and unmatchedfilm purity and uniformity.e-Vap ® Product LineThe e-Vap ® product line is as vast as theapplications requiring electron beamevaporation. Each and every e-Vap ®source is designed to meet or surpass thestringent requirements put forth by thevacuum coating world. As a leader andinnovator in this field, MDC holds variouspatents in electron-beam evaporationtechnology. Two notable patents includeU.S. patent numbers 5,418,348 and5,473,627. The first is for MDC’s uniqueelectron source design, which incorporateshigher material capacity with adramatically smaller source footprint. Thesecond, for an ingenious coolant deliverysystem incorporated into MDC’s UHV multipocketrotary sources. e-Vap ® electronbeam sources are available in six basicsizes, called Frames, which canaccommodate small research as well aslarge production coating requirements withcrucible capacities from 2cc to 400cc. Thesources are offered individually or ascomplete turn-key, flange-mountedsystems with all necessary serviceconnections, including fluid and electricalfeedthroughs. These state-of-the-artevaporation sources are powered andcontrolled with equally advanced solidstate switching power supplies, beamsweepers and control electronics. Thehighest rated power supply is capable of a15,000 Watt output at negative 10,000Volts, fits on a standard 19" rack, is only10-1/4" tall and weighs 100 pounds.Flange-mounted units are factoryassembled and tested including allfeedthroughs. A range of standard optionsinclude a watercooled collimator roof, astepper motor indexer and aprogrammable XY sweep controller.Miniature Evaporation SystemsMiniature evaporation systems include thee-Vap ® 100, a precision wire fed electronbeam source designed specifically fordepositing monolayer thin films in ultrahighvacuum environments. It can depositrefractory metals at an atomic level.e-Vap ® 3000 is a 2cc capacity, miniatureelectron beam evaporation system with a3kW power supply. This is a versatiledeposition tool used for thin film coatingprocesses in high and ultrahigh vacuumenvironments. The e-Vap ® 3000 systemevaporates virtually all rare earth refractoryand dielectric materials. It providesresearchers a simple, relatively low-costmeans of depositing high purity thin filmcoatings.Re-Vap resistive heater sources are alsopart of the miniature product line. Thesesources are available with filament boatsor coils and oxide crucibles. Re-Vap sources are by far the most economicalmethod of depositing thin films.Evaporation MaterialsMDC e-Vap ® sources are rugged, reliableand easy to maintain. Electron beamevaporation is an extremely versatilemeans of depositing uniform high-puritythin films. Capable of reaching elevatedtemperatures in excess of 3500°C,evaporation of virtually any material can beaccomplished.The Silica, Hafnia and Magnesium Fluoridematerials shown at right were producedusing an e-Vap ® power supply, e-Vap ®Source controller and e-Vap ®Programmable Sweep Controller with astandard figure-eight pattern at 200Hzsweep frequency. The continuous andsuperior performance of this arrangementpermits the routine evaporation of theseand other difficult materials.All dimensions in this catalog are given ininches unless specified otherwise.2 Phone 800-443-8817 www.mdcvacuum.com MDC Vacuum Products Corporation

e-Vap ®IntroductionMaterial SamplesTypical e-Vap ® InstallationSilica (SiO2)Fixed-Pocket UHV SourcewithManual ControlsRotary-Pocket UHV SourcewithAutomatic ControlsSubstrate FixtureCrystal SensorFeedthroughWater CooledRoofSilica (SiO2) Carousel SourceShutterHafnia (HfO2)Single-PocketSourceMulti-PocketSourceThin Film DepositionAuto IndexerDriveDepositionRate MonitorProgrammableX-Y SweepDepositionRate MonitorProgrammableX-Y SweepMagnesium Fluoride (MgF2)SourceControl ModuleSourceControl ModuleFilamentTransformerFilamentTransformerPower SupplyElectronic components fit on standard 19" rack. Filament transformer can bemounted remotely as shown or directly on source flange.MDC Vacuum Products Corporation www.mdcvacuum.com Phone 800-443-88173

Re-Vap Thermal Evaporation SystemsThin Film DepositionResistive Heater EvaporationFeatures■ 900W power supply■ 2-3/4" Del-Seal CF flange mount■ Ideal for organic material evaporation■ Contact factory for higher current modelsSpecificationsCoolingInput powerVoltage outputCurrent outputWeightDimensionsPower SupplyOutput CableAir cooled208 V ±10%, Single-phase, 50/60 Hz, 7 Amperes0 to 6 VAC0 to 150 A45lb16" W x 6" H x 12" L2 AWG x 10' LMDC’s Re-Vap resistive filament heater evaporation is an economicaland reliable method of depositing thin film coatings in vacuum.Current passing through a resistive element generates sufficientheat to melt and evaporate various coating materials. Materials commonlyevaporated using resistive heating include iron, nickel, aluminum,copper, tin, silver, gold and platinum. Re-Vap resistiveevaporation can be used for decorative metallizing as well asdemanding research applications. Three basic resistive elementdesigns are offered: filament coil, metal foil boat and oxide crucibletypes. Filament coil designs are by far the most popular. Re-Vap heater elements are economical and disposable. They can be discardedafter each use to prevent material contamination.coil. To minimize dripping of the molten material, the filament coiltemperature must be increased rapidly to 1200-1500°C. Using thistechnique, the molten material will climb or cling to the hot wire andvaporize efficiently. Another type of element coil is the filament basket,used to evaporate pellets or chips of materials which either sublimeor do not wet the filament wire upon melting. If wetting occurs,the coils of the basket are shorted and the temperature of the sourcedrops.Metal foil boat type resistive elements are yet another choice forsmall evaporation applications. Metal foil boats are made from thinrefractory metal stampings, usually tungsten, molybdenum or tantalum.These boats have dimples which hold the evaporation material.Their miniature size and small capacity make them ideal for smallevaporation jobs. Metal foil boats operate at very high temperaturesand may cause alloying to occur with certain types of evaporationmaterials. Wetting of the metal surface by the molten evaporant isdesirable in the interest of good thermal contact, however, themolten metal will lower the electrical resistance of the foil in the meltarea, thereby causing a drop in temperature. This problem can beeliminated by using a boat which has been coated with a thin layerof aluminum oxide. The oxide coating will not allow wetting of themolten metal evaporant to the metal foil element.Crucible heaters are an open circular wound filament which allowcrucibles to be inserted inside the windings. The crucibles are commonlymanufactured from alumina, carbon, quartz and boron nitride.Crucibles have insulating properties which form a thermal barrierbetween the filament and melt, allowing a uniform melt temperature.Crucible evaporation is very stable because of its uniform heating. Awide range of low to moderate temperature metals like palladium,tin, selenium, arsenic, indium and organic materials evaporate wellfrom crucibles. Crucibles are less prone to failure compared to metalfoil boats because of the complete isolation between the evaporantand the heater element, thus eliminating shorting or alloying.Re-Vap 900 Watt Power SupplyRe-Vap coiled filaments are typically three stranded tungsten wireslooped into coils. Multistrand filaments are generally used becausethey offer a greater surface area than single wire filaments. Underthese conditions, the evaporant charge should be small comparedwith the mass of the filament. The filament can hold up to 1 gram ofevaporant material which is formed into staple-like shapes and hungon the central helix of the tungsten filament. Upon melting, the evaporantwets to the filament and is held in place by surface tension.Spreading of the molten evaporant across the wire is desirable toincrease evaporation surface area. This is accomplished by distributingthe initial charge evenly over the entire length of the filament004221-2.7x3.64 Phone 800-443-8817 www.mdcvacuum.com MDC Vacuum Products Corporation

Re-Vap Thermal Evaporation SystemsRe-Vap Source AssemblyDESCRIPTIONCOMPLETE SYSTEM 1900W POWER SUPPLYRESISTIVE SOURCE ASSEMBLY 2CONDUCTOR EXTENSION KITPOWER SUPPLY SPARE PARTS KITMETAL FOIL BOAT, TUNGSTENMETAL FOIL BOAT, TANTALUMMETAL FOIL BOAT, MOLYBDENUMCOATED FOIL BOAT, TUNGSTENCOATED FOIL BOAT, MOLYBDENUMFILAMENT COILFILAMENT BASKETOXIDE CRUCIBLE, ALUMINAOXIDE CRUCIBLE, BORON NITRIDEOXIDE CRUCIBLE, QUARTZREFERENCERH-900RH-PS-900RH-F-900RH-CEK-900RH-PSPK-900RH-MFB-900TURH-MFB-900TARH-MFB-900MRH-CFB-900TURH-CFB-900MRH-FC-900RH-FB-900RH-OC-900ARH-OC-900BNRH-OC-900QPARTNUMBER992626991256992625992619991257-08992624-01992624-02992624-03992623-01992623-02992622992621992620-01992620-02992620-03PRICE$34502450110024520172813252514172025201 Includes power supply and resistive source assembly.2 Includes filament coil heater element.Conductor Extension KitHeater ElementsResistive Heater Source AssemblyCoated Metal Foil Boat5.002.75Del-Seal CF Flange.77Thin Film DepositionFilament CoilStandard Elements7.253.75Oxide CrucibleAcrylicHigh-VoltageShield2.75MDC Vacuum Products Corporation www.mdcvacuum.com Phone 800-443-88175

e-Vap ®Thermal Evaporation SystemsPower SupplyWeighs only20 poundsFeatures■ 3000 Watt output■ Designed for industrial / production applications■ Compact size - mounts underneath chamber■ High frequency switching power supply■ 5 or 10 Volt tap option■ Connects to Sigma or Inficon rate controllers —making it stand-alone capable■ CE compliant■ 6000 Watt stack optionPower Supply SpecificationsThin Film DepositionRe-Vap Power SupplyDescriptionMDC’s high powered Re-Vap resistive evaporation system is a highlyindustrial, robustly designed, economical method of depositing thin filmcoatings. The current passing through a resistive element (filament, boat,etc.) is produced by a unique high current, low voltage switch-mode highfrequency power supply that produces ample amounts of current needed toevaporate materials such as iron, nickel, aluminum, copper, silver, gold andplatinum. Silicon-monoxide, magnesium fluoride, as well as zinc selenideare readily evaporated.Re-Vap Power Supply & ControllerMDC has taken advantage of its extensive knowledge of high frequencysolid-state switching power supplies by incorporating that technology into apatent applied high-powered 3000 watt Re-Vap power supply. Tremendoussize and weight reductions are the result. With overall dimensions of 5" x 8"x 13" and a total weight of 20-pounds, the power supply can be mountedunderneath the vacuum coating system just inches away from the high currentfeedthroughs. The power supply is only one-eighth the size and onetenththe weight of a typical 3000 watt resistive power supply. Two uniqueadvantages include higher power efficiency and floor space savings. Powerefficiency is greater because the output cable length is reduced with aresulting lower power loss. The Re-Vap controller is a half-rack width displaymodule displaying the current, voltage, safety interlock and status/operationindicators. For automated coating processes, it may be connected to arate/thickness controller for precise control. Power can also be controlledthrough the front panel or with the hand-held remote control.CoolingInput powerPower outputOption:CableWeightDimensionsAir cooled208/220/240 VAC, Single-phase, 50/60 Hz, 25 Amperes0 to 5 VDC @ 600 amps0 to 10 VDC @ 300 amps6-foot cable included30 lb shipping5" W x 8" H x 13" DRe-Vap clamp, High Current feedthrough and Z-bar extensionsThe Re-Vap positive clamping method is universally designed for heavy useand quick-change capability. Thumbscrews are provided for fast installationof boats or filaments. Air-side clamping uses silver-plated battery clampstylehard copper connections designed for maximum surface contact andhigh current carrying capacity.The Re-Vap high current 3/4-inch feedthroughs are rated at 600 amps. Ituses high purity alumina ceramic as the dielectric material, which is hermeticallysealed to a flexible metal transition using vacuum grade braze alloysin a vacuum brazing furnace. Additionally, a removable snap-on groundshield provides protection from line-of-sight coating on exposed ceramicsurfaces. Re-Vap feedthroughs are fitted with Del-Base baseplate mountsin standard one-inch, 32mm or 34mm sizes for use in most vacuum coatingsystems, including Balzers and Leybold systems.Z-bar extensions are used in cases where normally an evaporation sourcecannot be positioned because of spacing limitations. The modular Z-bar extensions allow you to maneuver your evaporation sources around fixedequipment inside your vacuum coating system. Its versatility allows you touse them singularly or in multiples for those hard to reach locations.6 Phone 800-443-8817 www.mdcvacuum.com MDC Vacuum Products Corporation

e-Vap ®Thermal Evaporation SystemsResistive Heater EvaporationRe-Vap typical source installation, shown with two Z-bars and boat clampsFeatures■ Industrial design■ Feedthroughs rated at 600 amps■ Removable snap-on ground shield protectsagainst coating build-up■ Z-bars allow installation of sources in difficult orhard to reach locations■ Z-bars may be used singularly or in multiples■ Clamp designed for virtually any type ofcommercial heater elements up to 1.25" wide■ Ultra positive clamping methodTypical Heater ElementsTypical Installation SchematicMetal Foil BoatRe-Vap rigid clampRe-Vap rigid clampZ-bar Thin Film DepositionFilamentResistive sourceIn-vacuumshield1" Bolt hole mountfeedthroughSilver platedairside clampsBaffled Boat• Only one Z-bar shown ~ may be used inmultiplesRe-Vap clamp & Z-bar extensionStandard ElementsAll dimensions are given in inchesunless specified otherwise.MDC Vacuum Products Corporation www.mdcvacuum.com Phone 800-443-88177

e-Vap ®Thermal Evaporation SystemsResistive ControllerFeatures■ Front panel LED displays current and voltage■ On-Off switch■ Safety interlock■ Hand-held remote control■ Contact factory for CE complianceRe-Vap Resistive ControllerThin Film DepositionDescriptionThe Re-Vap Resistive Controller is designed for use with theRe-Vap 3000 Power Supply. The controller is a half-rack widthdisplay module displaying the current, voltage, safety interlock andstatus/operation indicators. For automated coating processes, itmay be connected to a rate/thickness controller for precise control.Power can also be controlled through the front panel or with thehand-held remote control. Cabling and connectors are provided.Ordering InformationResistive Controller SpecificationsConstructionCaseAluminum sheetReadoutLED displayMountHalf-rack standard electronics cabinetInput power110 volts, 50/60 HzWeight11 poundsDimensions8.5" W x 5.25" H x 14" DComplete SystemA complete Re-Vap 3000 system includes:• One 3000 watt power supply• One resistive controller• Two high current electrical feedthroughs, 1-inch bolt style• Two electrical airside clamps• Two Z-bars with bolts• Two rigid boat clamp assemblies• One metal foil boat heater elementDESCRIPTIONWTLBCOMPLETE SYSTEM 50POWER SUPPLY 30RESISTIVE CONTROLLER 10REFERENCERV-3000-SYSRV-3000-PSRV-3000-RCPARTNUMBER992970991301991303PRICE$61503000975Components may be purchased as a complete systemor individually.Metal Foil BoatFilamentBaffled BoatREFERENCEMETAL FOILFILAMENTBAFFLEDPARTNUMBER993037993038993039PRICE$161550Resistive heater elements are soldindividually.8 Phone 800-443-8817 www.mdcvacuum.com MDC Vacuum Products Corporation

e-Vap ®Thermal Evaporation SystemsHigh Current FeedthoughStandard 1" bolt mount1.50Hex1.00Metric style for 32mmand 34mm bolt mount1.613/8-16 UNC-2A 1-14 UNS-2A1.882.253.32 4.683/8-16 UNC-2A.75 dia.30 x 1.5mm thread.75 dia.REFERENCE1-IN. BOLT32MM BOLT34MM BOLT32MM - 1"PARTNUMBER992966993040993041991813PRICE$45045045095High current feedthroughs are availablefor mounting to baseplates inthree standard sizes. A removableshield protects ceramic insulatorfrom contamination during deposition.An adapter is available to mount a1-inch bolt feedthrough to a 32mmbolt hole. Adapter not shown.Two feedthroughs required. Soldindividually.2.125 dia.1.002.252.003.32 4.68Airside Clamps1.251.00REFERENCEPARTNUMBERPRICE$5.192.19 .94.25Fits 3/4"conductor.56 dia(2 places)1.002.00.375-16 bolt,nut andwasher (x2)1.75.63HCC-750 640070185Made of OFE copper with silverplate to minimize oxidation andcontact resistance. Two 9/16-inchholes are provided for fasteningeyelet-fitted power cables. Soldindividually.Thin Film Deposition.8132 places1.8752 places .3862 placesREFERENCEPARTNUMBERZ-BAR 992969PRICE$295.500Z-bar .500R .188 typ.2.8136.250R .812 typ.2.8131.6251.000MDC Z-bar extensions are usedwhere normally an evaporationsource cannot be positionedbecause of spacing limitations. Maybe used singularly or in multiplesfor hard to reach locations. Soldindividually.Boat ClampsRigid clamp1-1/4" width3-1/2" length.50F.25.250-20 Thread inHelicoil insertREFERENCEPARTNUMBERRIGID 992968-02PRICE$325Boat clamps use thumbscrews forfast installation of boats or filaments.Two boat clamps are required.Includes bolts. Sold individually.MDC Vacuum Products Corporation www.mdcvacuum.com Phone 800-443-88179

e-Vap ®Miniature Evaporation Systemse-Vap ® 100 SystemSpecificationsMeteringDigital Emission CurrentCoolingAir cooledInput power208 V ±10%, Single-phase, 50/60 Hz, 3 AmperesVoltage output2 kV DC negative polarityOutput RippleLess than 2% RMSVoltage Regulation 1%Current output0 to 0.05 AmperesEmission Current Regulation 1%Efficiency 85%Weight20lbDimensions19" W x 3.5" H x 18" LFeatures■ 100 Watt power supply■ Monolayer E-Beam deposition■ Precision control deposition rates■ 1mm wire feed mechanism, 2mm optional■ Refractory materials evaporation■ UHV compatible to 10 -11 Torr■ Bakeable to 250°C■ No water cooling required■ Mounted on 2-3/4" Del-Seal CF flangee-Vap ® 100 is a precision monolayer deposition source employed forevaporative coatings in UHV applications. Its unique design uses anelectron beam power source for thermionic emission and pinpointelectrostatic focusing of an electron beam onto a 1-millimeter diameterwire. The wire being evaporated is at ground potential and servesas the source anode, thus attracting electron bombardment. The constantstream of electrons heats the wire tip to its melting point forminga very small liquid ball, which is subsequently vaporized. The wireMonolayer Deposition RatesThin Film DepositionLi0.4LithiumNa0.4SodiumBe1.3BerylliumMg0.6MagnesiumNumbers indicate the time, in minutes, required to deposit one monolayer of the specified elements.Deposition rates are calculated at element melting point, using a substrate area of 1cm 2 , a source tosubstrate distance of 10cm and a vapor pressure of 10 -3 Torr. These values are intended as referenceonly, actual rates may vary from those listed.B2.2BoronAl1.2AluminumC2.8CarbonSi1.5SiliconNNitrogenPPhosphorusOOxygenSSulfurK0.3PotassiumCa0.6CalciumSc1.2ScandiumTi1.6TitaniumV2.0VanadiumCr2.0ChromiumMn1.7ManganeseFe2.1IronCo2.2CobaltNi2.2NickelCu2.1CopperZn0.9ZincGa1.8GalliumGe2.1GermaniumAsArsenicSeSeleniumRb0.4RubidiumSr0.7StrontiumY1.4YttriumZr2.1ZirconiumNb2.7NiobiumMo2.8MolybdenumTc3.0TechnetiumRu3.1RutheniumRh2.8RhodiumPd2.4PalladiumAg1.9SilverCd1.1CadmiumIn1.9IndiumSnTinSb1.4AntimonyTe1.4TelluriumCsCesiumBa0.8BariumLa1.7LanthanumHf3.0HafniumTa4.0TantalumW4.3TungstenRe4.4RheniumOs4.5OsmiumIr4.2IridiumPt3.7PlatinumAu2.9GoldHgMercuryTlThalliumPb1.7LeadBi1.7BismuthPo1.5PoloniumFr0.4FranciumRaRadiumAc2.0ActiniumLa1.7LanthanumCe2.6CeriumPr1.7PraseodymiumNd1.7NeodymiumPmPromethiumSm1.4SamariumEu1.0EuropiumGd1.8GadoliniumTb1.9TerbiumDy1.7DysprosiumHo1.8HolmiumEr1.8ErbiumTm1.6ThuliumYb1.4YtterbiumLu2.1LutetiumAc2.0ActiniumThThoriumPaProtactiniumU3.3UraniumNpNeptuniumPuPlutoniumAm2.1AmericiumCmCuriumBkBerkeliumCfCaliforniumEsEinsteiniumFmFermiumMdMendeleviumNoNobeliumLrLawrencium10 Phone 800-443-8817 www.mdcvacuum.com MDC Vacuum Products Corporation

e-Vap ®Miniature Evaporation SystemsSourceAperture3.75TantalumShield,1.29" O.D.x 0.02" wallComplete SystemWire FeedAdapter2.75Del-Seal CFFlangeSource Assemblyis manually fed by a precision linear drive feedthrough, and must befed periodically as determined by source evaporation rates. The e-Vap ® 100 source evaporates high temperature refractory metalsincluding Tantalum, Molybdenum and Tungsten and most other materialsmanufactured in wire form. High temperature materials are notreadily evaporated using Knudsen or Effusion cells, making thee–Vap ® 100, because of its miniature size, an excellent PhysicalVapor Deposition (PVD) evaporation source. The elements table at leftdepicts calculated deposition rates for various pure materials.Thee-Vap ® 100 source is constructed with refractory metals for rapidequilibrium with minimal outgassing, to withstand elevated temperatureswithout the need for water cooling and to reduce the possibilityof contamination in sensitive UHV applications. The source has anoutgas mode to allow vacuum conditioning of the evaporation head.This degas feature allows heating of the e-Vap ® 100 head to driveoff any adsorbed contaminant. The source is mounted on a 2-3/4"Del-Seal CF flange. Power connections are made via four SHV coaxialconnectors clearly labeled for filament positive, filament negative,anode and screen inputs. Maintenance on the evaporation head ismade simple with easy replacement of all key components.The e-Vap ® 100 power supply incorporates all switching technologyfor the high-voltage and filament sections. This translates to a smallerand lighter package, greatly improved arc-suppression and betteremission current control. Arcs are suppressed in the order ofmicroseconds rather than the millisecond response in other 50/60Hzsystems. This, combined with lower levels of stored energy, preventthe molten tip of the evaporant rod from being “blown away” duringan arc, a common occurrence with older systems.7.451.63DESCRIPTIONCOMPLETE SYSTEM 1SOURCE ASSEMBLY100W POWER SUPPLYPOWER SUPPLY SPARE PARTS KIT2MM WIRE-FEED ADAPTERFILAMENT SET, 5 ea.1 Includes source and power supplyREFERENCEEV-100EV-SA-100EV-PS-100EV-PS-SPK-100EV-2MM-100EV-FIL-100SHVCoaxialFeedthroughsLinear MotionFeedthroughHigh TemperaturePARTNUMBER991029992458991192991257-07992589992596PRICE$13500377595003015560Thin Film DepositionMDC Vacuum Products Corporation www.mdcvacuum.com Phone 800-443-881711

e-Vap ®Miniature Evaporation Systemse-Vap ® 3000 System■ Includes water and electrical connections■ Evaporates refractory and dielectric materials■ CE compliantSpecificationsThin Film DepositionMeteringCoolingInput powerVoltage outputOutput RippleDeposition Rate vs Emission CurrentDigital Emission CurrentPower Supply: Air cooledSource: Watercooled225 V ± 25 V, Single-phase, 50/60 Hz, 18 Amperes5 kV DC negative polarityLess than 1% RMSVoltage Regulation .025%Current output0 to 0.6 AmperesEmission Current Regulation 0.25%Efficiency 85%WeightDimensions65lb19" W x 10.5" H x 19" LFeatures■ 3kW Switching technology power supply■ UHV compatible■ 2.75" Del-Seal CF flange mountMDC’s 3kW Electron Beam Source is a versatile and economicaldeposition tool used for thin film coating processes in high and ultrahighvacuum environments. The e-Vap ® 3000 system evaporatesvirtually all rare earth refractory and dielectric materials. It providesresearchers a simple, relatively low-cost means of depositing highpurity thin film coatings. The source is manufactured using all metalsealed gaskets, is extremely compact and has a high level ofruggedness, reliability and efficiency. The compact source designallows the entire source assembly to fit through a 2.75" Del-Seal CF port opening and eliminates internal water and electrical connections.This 3kW source is available free standing or as a completeturnkey system. The filament/emitter assembly has a heat-sink andfeatures a unique single piece high voltage insulator design. Theentire emitter assembly slides out for easy maintenance.A new 3kW Switching Power Supply is available to drive these miniaturesources. State-of-the-art switching technology renders a compactrack mountable power supply. The built-in source controller alsoemploys switching technology and provides extremely accurateThis graph represents stable rates (not maximum rates) @ 3kW with a source to substrate distance of 10 inches. These values are intended as reference only, actual rates may vary.1400Stable Deposition Rate in Å / min120010008006004002000SiOSiO 2HfO 2FeTiPdCoSiNiGeMoTaW0 100 200 300 400 500 600Emission Current in mA12 Phone 800-443-8817 www.mdcvacuum.com MDC Vacuum Products Corporation

e-Vap ®Miniature Evaporation SystemsPower SupplySource AssemblySource Assembly2.75AcrylicHigh-VoltageShield3.757.257.872.75Del-Seal CFFlange• Source can be installed in a portwith 2-3/4" Del-Seal CF flangesSourcefits withina 1.38 insidediameter tubeThin Film DepositionSource DetailFilament Detail2.75Del-Seal CFFlange9.002 ccCrucible.63 Source Face toFlange Center LineVap ® evaporation sources. These liners offer improved thermal stabilitywhile reducing the transfer of heat to the crucible. Liners providethe ability to easily and quickly switch evaporant materialswithout removing the crucible for cleaning. They also reduce powerrequirements to achieve specific evaporation rates. See page 39 fora detailed list of crucible liner materials.1 Includes source and power supplyDESCRIPTIONCOMPLETE SYSTEM 1SOURCE ASSEMBLY3000W POWER SUPPLYFILAMENT SET, 5 ea.ANODEBEAM FORMERBEAM FORMER INSULATORHIGH VOLTAGE INSULATORPOWER SUPPLY SPARE PARTS KITREFERENCEEV-CE-3000EV-SA-3000EV-PS-CE-3000EV-FIL-3000EV-A-3000EV-BF-3000EV-IBF-3000EV-IHV-3000EV-PS-SPK-3000PARTNUMBER992600992601991221992610991929991922990529991921991257-03PRICE$1740059851450060195155712530MDC Vacuum Products Corporation www.mdcvacuum.com Phone 800-443-881713

e-Vap ®Miniature Evaporation SystemsMODULAR SOURCE SERIESFeaturesThin Film DepositionDescriptione-Vap ® Mighty Source 4 Pocket Evaporation SourcePractical, low-cost, and highly reliable electron beam depositionsources are the future as we know it today. MDC introduces the e-Vap ® “Mighty Source ”– a 4 pocket x 2cc rotary electron beamsource. Affordable and extremely compact, it stands just 2.4-inchestall by 4-inches long by 2.8-inches wide. Is there anything smallerout there? The Mighty Source is rated for 3 kilowatts of powerwhich makes it an ideal deposition tool for evaporating metals,oxides, metal-oxides, and magnetic materials. Designed into thesource body are two hermetically-sealed XY-axis sweep coils thatallow you to sweep the electron beam across the crucible pocket,resulting in the maximization of your coating process in terms ofmaterial stability and consistency. The Mighty Source design isspecifically tailored for the following uses – pilot production,lab/R&D applications, and the university marketplace. Its compactdesign features allow it to be mounted onto a 2-3/4-inch Del-SealCF flange or onto a 6-inch or 10-inch Del-Seal CF flange in eitherhorizontal or vertical configurations. To complete this product system,MDC also offers a 3kw power supply and low cost XY sweepcontroller.Specifications■ Ideal for evaporating metals, oxides, magneticmaterials and dielectrics■ Ideal for universities, lab/R&D, pilot productionusers■ Applications include metallization, MBE, nanotechnology,optics, microscopy and thin filmheads■ Rated for 3000 Watts of deposition power■ Four pocket x 2cc rotating crucible■ Ultra small footprint – total size is 2.4" H x 4.1" Lx 2.8" W■ A contained permanent magnet design producesa very small, highly dense beam spot■ XY sweep coils are included■ Crucible drive can be driven from any position –left, right, down, even angled■ Stand-alone, flange-mounted or turn-key assembliesare standard offerings■ Flange-mounts are installed on a 2.75-inch Del-Seal CF flange■ Turnkey assemblies are installed onto a 6-inchand 10 inch Del-Seal CF flange and include shutterand all electrical, water, and mechanicalfeedthroughs –ready to operate■ See the MDC web site for actual deposition ratedata on up to 27 different materials as well asdownloadable layout, e-drawings for the DesignEngineerMaximum Power3000 wattsOperating Voltage5000 voltsBeam Current600 milli-amperesCompatible Vacuum2 x 10E-8 torrWater Flow65 psi or .62 gpmXY Sweep Frequency0 – 50Hz, 1.0 ampsBeam Spot Size3-4 mmCrucible MaterialOFE copperBakeout Temperature150 o CCrucible Geometry 2.0 cc volume crucibles x 4Weight6 lbsDimensions2.4" H x 4.1" L x 2.8” W4 inchese-Vap ® Mighty Source Horizontal Source Assembly (6-inch CF flange)14 Phone 800-443-8817 www.mdcvacuum.com MDC Vacuum Products Corporation

e-Vap ®Miniature Evaporation SystemsMODULAR SOURCE SERIESe-Vap ® Mini Sweep ControllerFlange Mounted AssembliesDeposition Rate Tablee-Vap ® 3kW Power Supply■ Complete turnkey assemblies -plug ‘n play■ Horizontal assembly is supplied on a 6" flange■ Vertical assembly is supplied on a 10" flange■ Water-cooled roofs are available as an option■ Different flange sizes are available upon request■ Physical dimensions are available atwww.mdcvacuum.com/3kw.htmor call 1-800-443-8817 for further detailsDeposition Rate vs PowerDepositin rate vs PowerDeposition Rate (Å/sec25.020.015.010.05.0Deposition Rate vs. Emission CurrentNo Crucible Liners Used*AlTa 2 O 5TiCoGe0.00 100 200 300 400 500 600Emission Current (mA)Accelerating Voltage of 5.25 kVAll rates measured on a Crystal Rate Monitor at 10 inch crucible to sensor distance.*Indicates “with” crucible linerMoAlMATERIALAl*AlAl2O3AgCoCrCuGeHfHfO2InITOMoMgF2NbNiPdSiSi02TaTa 2O5TiTiO2WYZnSZnSeZrO2*with crucible linerSWEEP USEDYES OR NONoNoYesNoNoYesNoNoYesYesNoYesNoYesNoNoNoYesYesNoYesNoYesNoNoYesYesYesEMISSIONCURRENT (MA)500100100150200505003002501502002050010500300100300405001503001505001503010200DEPOSITION RATE(Å/SEC)4.528.08.013.09.013.02.23.07.09.018.010.08.57.01.03.050.01.025.08.07.020.07.58.040.010.040.010.0Thin Film DepositionMDC Vacuum Products Corporation www.mdcvacuum.com Phone 800-443-881715

e-Vap ®Miniature Evaporation SystemsMODULAR SOURCE SERIES☛ Power Supplies descriptionFigure 1e-Vap ® Mighty Source Vertical Source Assembly (10-inch CF flange)Figure 2Figure 3Mighty Source Details TableDESCRIPTIONREFERENCEPART #PRICEFIGThin Film DepositionStand Alone Source3/4" Del Seal CF Flange (horizontal mount)10" Del Seal CF Flange (vertical mount)6" Del Seal CF Flange (horizontal mount)3KW Mini Sweep ControllerPower SupplyPower Supply (spare parts kit)Filament (pack of 5)AnodeBeam FormerBeam former InsulatorHigh Voltage InsulatorEmitter Rebuild Kit 1 (Mighty Source)Crucible Seal Rebuild Kit (Mighty Source)Gasket (1/8” VCRFilament Clamp Sleeve*MS indicates Mighty Source Ref# EV-MS* (Mighty Source )Ref# EV-MS-F275-HRef# EV-MS-F1000Ref# EV-MS-F600HRef# Sweep-MSEV-PS-CE-3000EV-PS-SPK-3000EV-FIL-3000EV-A-3000EV-BF-3000EV-IBF-3000EV-IHF-3000Ref# ERK-MSRef# CSRK-MSCajon Fitting GasketFil Clamp Sleeve-MS1includes 2 filaments, high voltage insulator, beam form, fasteners993400993450993431993430991374991221991257-03992610991929991922990529991921993410993439042064993415550067501105010250149514500306019515571252507.50335123456789Figure 4Figure 6Figure 5Figure 7Figure 8Figure 916 Phone 800-443-8817 www.mdcvacuum.com MDC Vacuum Products Corporation

e-Vap ®Modular Evaporation SourcesIndividual SourceMDC modular e-Vap ® sources are state-of-the-art electron-beamevaporation sources designed for the demanding and exacting worldof vacuum coatings. This unprecedented selection of electron-beamevaporation sources provides vacuum coating solutions for mostapplications including medical, metallurgical, telecommunications,micro-electronics and optics.Modular sources are offered in six standard frame sizes and are standalone components for maximum installation flexibility in existing vacuumsystems. For those desiring standard off-the-shelf solutions,complete horizontal and vertical flange mounted systems are alsoavailable. For a detailed presentation of horizontal and vertical turnkeycoating systems please refer to products beginning on page.Modular sources are fitted with direct watercooled crucibles. Selectmodels have indirectly cooled crucibles that allow the user to changecrucibles without interrupting the flow of water to the source andwithout having to disassemble the source. Modular sources areoffered with material capacities from 6cc to 400cc in a multitude ofpocket geometries and arrangements. They are available in bothfixed and rotary pocket mechanisms for high and ultrahigh vacuumenvironments. e-Vap ® modular sources are designed for optimumperformance with e-Vap ® power supplies, controls and electronics.Other essential components and hardware required for the installationof e-Vap ® modular sources are detailed starting on page.Contact the MDC technical sales engineers for custom electronbeamevaporation requirements.FeaturesFilament Assembly■ Filament is shielded from ion bombardment■ No shorting■ Longer filament life■ Reduced coating of ceramic insulators■ Reduced arcingEmitter Assembly■ 270° arc emitter module■ Heat sunk emitter■ Consistent electrostatic field■ Longer life anode and beam former■ Reduced filament distortion■ Modular plug-in emitter design■ Simple maintenance■ Simple filament replacement■ Minimal adjustment...only requires verification of filament toleranceOpen Cathode Design■ No space charging■ Increased emission■ Cooler operating filament...requires only 42 amps for 15 kWShielded High Voltage Ceramics■ Reduces coating of ceramic insulators■ Prevents arcing■ Unique high voltage insulator design...no screws to reduce dielectric breakdownBeam Sweep Coil Assembly■ Helmholtz design principle produces a uniformmagnetic field■ No tunneling■ Beam maintains constant density and shapewhen swept across crucibleMagnet Assembly■ Permanent magnets■ 270° arc beam deflection...with positive beam containment■ Reliable beam positioning■ No pole pieces■ Efficient magnetic field generation■ Beam travels vertically through crucibleCrucible Module / Replaceable Modules■ Capacity from 6cc to 400cc■ Complete flush-top design■ No condensate build up■ No contamination from flaking condensate■ Complete utilization of vapor cone during deposition...no shadowing■ Reduced cross-contamination during changes ofevaporant materialThin Film DepositionMDC Vacuum Products Corporation www.mdcvacuum.com Phone 800-443-881717

e-Vap ®Modular Evaporation SourcesThin Film DepositionCustom Sources and AssembliesCustom source and source assemblies can be designed to fit anexisting chamber or for a special application. Contact MDC fordetails regarding custom source assemblies or custom sources.Featurese-Vap ® Modular Evaporation SourcesCustom source and source assemblies■ Six Frame SizesCrucible / Pocket GeometryStandard configurations■ Single, Multipocket or Carousel Crucibles■ Custom Crucible configurations available■ Crucible sizes from 6cc to 400cc■ Power ratings from 6kW to 15kW■ Direct or indirect water coolingOptions■ Source Options are available-Consult with MDC for existingdesigns, availability and list prices.■ Single Pocket Sources (Frame 1 and Frame 2) UHV compatiblesources, volumes 7cc to 100 cc.■ UHV Rotary Mechanism (Frame 4 and Frame 5) allows forUHV operation of the multi pocket sources.■ Direct and Indirect Cooling (Frame 5 and Frame 6) optionfor both of these frame sizes. direct cooling allows for higherpower levels to be applied during deposition, the water sealmust be disturbed to change the crucible. Indirect coolingallows the crucible to be removed without disturbing the waterto vacuum seal, however maximum power levels are lower withindirect cooling.■ Custom Crucibles Can be machined with various pocketsizes and configurations depending upon your application. MDCwill manufacture any custom crucible that is required includiingsingle, four pocket, six pocket, pan carousel and bananas.Custom configurationsSingle-PocketCenteredMulti-Pocket 44@90°Multi-Pocket 66@60°Carousel360° Pan1x270°, 1@45°Shown above is one of many possibilities.Contact factory for special geometries.FRAME NUMBER VOLUME MAXIMUMSIZE OF POCKETS PER POCKET POWERREFERENCEPARTNUMBERPRICE$Standard Multi Pocket Sources that havebeen identified by our customers as themost popular sources are listed to the right.MDC is has made a commitment with subcomponentinventory to offer reduced leadtimes for standard multipocket sources.3 4 6cc 6kW4 4 6cc 6kW5 4 15cc 10kW5 4 25cc 10kW5 6 12cc 10kW5 1 150cc 10kW6 4 40cc 15kW6 4 75cc 15kW6 1 400cc 15kW6 6 40cc 15kWEV-4000-66EV-4000-66UHVEV-4000-1015EV-4000-1025EV-6000-1012EV-4000-150CAEV-4000-1540EV-4000-1575EV-4000-400CAEV-6000-15409916009917009919009918009921009925239924059924069931019931001050013750112251122511675112501422514625145251472518 Phone 800-443-8817 www.mdcvacuum.com MDC Vacuum Products Corporation

e-Vap ®Modular Evaporation Sources8.2Frame 1SmallFixed PocketSpecificationsSource SizeSmallSource TypeFixed PocketMaximum Power15kWOperating Voltage 6kV to 10kVFilament12VACCrucible Geometry / VolumeSingle-Pocket 7, 15, 25 & 40ccX-Y Sweep Frequency 200HzEvaporation Rate of Aluminum50,000Å/min @14kW with a source tosubstrate distance of 250mmBeam Spot Size7mmCrucible Material OFE CopperBakeout Temperature200 ° CMaterialsUHV CompatibleCompatible Vacuum 2x10 -11 TorrWater Flow3GPM and / or 65PSIG inlet-outlet differentialDimensions 6.60L x 4.90W x 2.10HWeight9 lbsREFERENCECRUCIBLEVOLUMEMAXIMUMPOWERPARTNUMBERPRICE$EV-1000-67EV-1000-1015EV-1000-1025EV-1000-15407cc15cc25cc40cc6kW10kW10kW15kW9905989905999905979906007850785078507850Frame 2SpecificationsSource SizeLargeSource TypeFixed PocketMaximum Power15kWOperating Voltage 6kV to 10kVFilament12VACCrucible Geometry / VolumeSingle-Pocket75 & 100ccX-Y Sweep Frequency 200HzEvaporation Rate of Aluminum50,000Å/min @15kW with a source tosubstrate distance of 250mmBeam Spot Size7mmCrucible Material OFHC CopperBakeout Temperature200 ° CMaterialsUHV CompatibleCompatible Vacuum 2x10 -11 TorrWater Flow3GPM and / or 65PSIG inlet-outlet differentialDimensions 6.60L x 5.50W x 2.25HWeight10 lbsLargeFixed PocketThin Film DepositionREFERENCECRUCIBLEVOLUMEMAXIMUMPOWERPARTNUMBERPRICE$EV-1000-1575EV-1000-1510075cc100cc15kW15kW992250992430875011750MDC Vacuum Products Corporation www.mdcvacuum.com Phone 800-443-881719

e-Vap ®Modular Evaporation SourcesFrame 3SmallRotary PocketSpecificationsSource SizeSmallSource TypeRotary PocketMaximum Power6kWOperating Voltage 6kV to 10kVFilament12VACCrucible Geometry / VolumeMulti-Pocket4x 6cc, 6x 3ccCarousel360°, 15ccX-Y Sweep Frequency 200HzEvaporation Rate of Aluminum8,000Å/min @6kW with a source tosubstrate distance of 250mmBeam Spot Size7mmCrucible Material OFHC CopperBakeout Temperature150 ° CMaterialsHV CompatibleCompatible Vacuum 2x10 -8 TorrWater Flow2GPM and / or 65PSIG inlet-outlet differentialDimensions 5.32L x 5.12W x 2.46HWeight10 lbsREFERENCECRUCIBLEVOLUMEMAXIMUMPOWERPARTNUMBERPRICE$EV-4000-66EV-6000-664 X 6cc 6kW6 X 3cc 6kW9916009921661050010750Frame 4SmallUHV Rotary PocketThin Film DepositionSpecificationsSource SizeSmallSource Type UHV Rotary PocketMaximum Power6kWOperating Voltage 6kV to 10kVFilament12VACCrucible Geometry / VolumeMulti-Pocket4x 6ccX-Y Sweep Frequency 200HzEvaporation Rate of Aluminum8,000Å/min @6kW with a source tosubstrate distance of 250mmBeam Spot Size7mmCrucible Material OFHC CopperBakeout Temperature200 ° CMaterialsUHV CompatibleCompatible Vacuum 2x10 -11 TorrWater Flow1.75GPM or 65PSIG inlet-outlet differentialDimensions 8.37L x 5.37W x 3.37HWeight17 lbsREFERENCECRUCIBLEVOLUMEMAXIMUMPOWERPARTNUMBEREV-4000-66UHV 4 X 6cc 6kW 991700PRICE$1375020 Phone 800-443-8817 www.mdcvacuum.com MDC Vacuum Products Corporation

e-Vap ®Modular Evaporation Sources8.2Frame 5LargeHV & UHV Rotary PocketSpecificationsSource SizeLargeSource Type HV Rotary PocketUHV Rotary PocketMaximum Power10kWOperating Voltage 6kV to 10kVFilament12VACCrucible Geometry / VolumeMulti-Pocket 4x... 15, 25 & 30cc, 6x 12ccCarousel360° 150ccCombination Custom designs availableEvaporation Rate of Aluminum30,000Å/min @10kW with a source tosubstrate distance of 250mmX-Y Sweep Frequency 200HzBeam Spot Size7mmCrucible Material OFE CopperBakeout Temperature150 ° CMaterialsHV CompatibleCompatible Vacuum 2x10 -8 TorrWater Flow3GPM and / or 65PSIG inlet-outlet differentialDimensions 6.20L x 5.62W x 3.25HWeight27 lbsREFERENCECRUCIBLE MAXIMUM COOLINGVOLUME POWERPARTNUMBERPRICE$EV-4000-1050EV-6000-1015UHVEV-4000-1025EV-4000-1030EV-6000-1012EV-4000-615iEV-4000-625iEV-4000-630iEV-4000-150CARiEV-4000-150CAR4 X 15cc4 X 15cc4 X 25cc4 X 30cc6 X 12cc4 X 15cc4 X 25cc4 X 30cc1 X 150cc1 X 150cc10kW10kW10kW10kW10kW6kW6kW6kW6kW10kWDirectDirectDirectDirectDirectIndirectIndirectIndirectIndirectDirect99190099270099180099240899210099252599250099258599250299252310500166251122511675116751143511500125501187511250Thin Film DepositionMDC Vacuum Products Corporation www.mdcvacuum.com Phone 800-443-881721

e-Vap ®Modular Evaporation SourcesFrame 6Extra-LargeRotary PocketSpecificationsSource SizeExtra-LargeSource TypeRotary PocketMaximum Power15kWOperating Voltage 6kV to 10kVFilament12VACCrucible Geometry / VolumeMulti-Pocket 4x... 40, 60 & 75cc, 6x 40ccCarousel360° 400ccCombination Custom designs availableX-Y Sweep Frequency 200HzEvaporation Rate of Aluminum50,000Å/min @15kW with a source tosubstrate distance of 250mmSource-Substrate Distance 250mmBeam Spot Size7mmCrucible Material OFE CopperBakeout Temperature150 ° CMaterialsHV CompatibleCompatible Vacuum 2x10 -8 TorrWater Flow3GPM and / or 65PSIG inlet-outlet differentialDimensions 8.50L x 6.87W x 3.50HWeight40 lbsREFERENCECRUCIBLE MAXIMUM COOLINGVOLUME POWERPARTNUMBERPRICE$Thin Film DepositionEV-4000-1540EV-4000-1560EV-4000-1575EV-6000-1525EV-6000-1450EV-4000-400CARiEV-4000-400CAREV-6000-640i4 X 40cc4 X 60cc4 X 75cc6 X 25cc6 X 40cc1 X 400cc1 X 400cc6 X 40cc15kWW15kW15kW15kW15kW6kW15kW6kWDirectDirectDirectDirectDirectIndirectDirectIndirect992405992400992406992599993100992720993101992674142251555014625155501472516625145251562522 Phone 800-443-8817 www.mdcvacuum.com MDC Vacuum Products Corporation

e-Vap ®Modular Evaporation SourcesHorizontal Source AssemblyHorizontal Flange Mounted SystemFeatures■ UHV compatible system■ 8" or 10" Del-Seal CF flange mount■ Assembly includes rotary, linear and electricalfeedthroughs, clamps, linkages, water flow switchand water connections■ Manual, push-pull shutter■ High temperature, 300°C manual rotary drive on4 pocket models; blanked off on single pocket■ Flange seal surface to crucible centerline is 8" on8" Del-Seal CF■ Flange seal surface to crucible centerline is 10"on 10" Del-Seal CF■ Systems available with or without watercooledroofsUHV Single-Pocket Source10.00 with 10" Flange8.00 with 8" FlangeCoolingRoofCrucible Face to Flange Center Line0.30" Fixed on 8" Flange0.14" Fixed on 10" Flange1.38" Rotary on 10" FlangeThin Film Deposition10.75 Shutter Open8.75 Shutter ClosedSource/CrucibleWater LinesShown withUHV Rotary-Pocket SourceFrame Size 4Cooling RoofWater LinesShown with10" Del-Seal CFFlange14.0 with 10" Flange12.0 with 8" FlangeUHV Rotary-Pocket SourceManual ShutterLinear FeedthroughPocket IndexerRotary FeedthroughFilament TransformerHigh Voltage FeedthroughX-Y SweepInstrumentation FeedthroughGuide RodSupport BushingsMDC Vacuum Products Corporation www.mdcvacuum.com Phone 800-443-881723

e-Vap ®Modular Evaporation SourcesVertical Source AssemblyFeatures■ UHV compatible system■ 10.0" Del-Seal CF flange mount■ Assembly includes rotary and electricalfeedthroughs, clamps, linkages, water flow switchand water connections■ Shutter is fitted with a high temperature, 300°Cmanual rotary drive■ Flange seal surface to crucible centerline is 6"standard■ Systems available with or without watercooledroofsVertical Flange Mounted SystemCoolingRoof11.90Thin Film Deposition6.00UHV Single-Pocket SourceUHVSingle-PocketSource7.0010" Del-Seal CFFlangeVertical Flange Mount / Less Cooling RoofCooling RoofWater LinesSource/CrucibleWater LinesX-Y SweepInstrumentation FeedthroughManual ShutterRotary FeedthroughFilament TransformerHigh Voltage FeedthroughMDC Vacuum Products Corporation www.mdcvacuum.com Phone 800-443-881725

e-Vap ®Modular Evaporation SourcesVertical Flange Mounted SourceMDC has eliminated the difficulties of flange mounting electronbeam sources. The effort that goes into designing and fitting asource to a vacuum coating chamber has been done for you with theintroduction of standard vertical flange mounted evaporationsources. The flanged assembly includes one 7cc electron beamsource with all water and electrical connections. This type of flangemounted system is typically installed vertically through the bottomside of a chamber. The compact footprint of these flanged evaporationsystems requires only one port flange for installation. A popularoption commonly ordered with these systems is a water-cooled roof,which mounts directly above the e-Vap ® source. The water-cooledroof acts as a heat barrier between the source and substrate andalso prevents vapor condensation on chamber walls.The watercooled roof is fitted with a deposition port, angled towardsthe substrate, which yields excellent deposition uniformity, evenwhen source to substrate centerlines are offset. The single-pocketsource comes standard with a 7cc capacity crucible. The sameassembly can be fitted with larger capacity sources including 15, 25and 40cc versions. To order the larger volume crucible option addone of the three option numbers to the end of the assembly partnumber. Vertical systems purchased with a source control modulewill be fitted with flange-mounted filament transformers.MOUNTING FRAME SOURCE COOLING SOURCE WEIGHTFLANGE SIZE TYPE & VOLUME ROOF NUMBER POUNDSREFERENCEPARTNUMBERPRICE$10" DEL-SEAL 1 ONE POCKET 7cc NO 990598 5010" DEL-SEAL 1 ONE POCKET 7cc YES 990598 50EV-FMP-10VEV-FMP-10RV9925119925131475015500Optional AccessoriesThin Film DepositionOPTION -01Pneumatic ShutterShutters mask off the vapor stream betweensource and substrate. Shutters are ideal forpre-melt or “soak” prior to deposition by blanketingthe evaporation material. Pneumaticshutters for vertical flanged assemblies cannotbe mounted on source flange, but can beinstalled through a secondary 1.33" Del-Seal CF port. This shutter is a two position shutterwhich includes a 120VAC solenoid.OPTION -06 TO -08Custom Crucible VolumeThe standard volume for a single-pocket crucibleis 7cc. For single pocket volumes of 15,25 or 40cc add option -06, -07 or -08 respectively.OPTION -04Custom Source PositionSource position is the distance from the sourceface to mounting flange seal face. This dimensionis standard at 6" for all vertical systems.Customer chamber layout or specificationsmay dictate a custom distance. Source positionsbetween 6" and 10" are optional andavailable at the price listed bellow. Dimensionsoutside these limits must be quoted separately.OPTION -05Custom Roof PortsWatercooled roofs have three ports. A mainport directly over the source, which is usedfor the deposition process. A second port forthe crystal sensor is used to monitor depositionrate. A third port provides direct visualinspection of the source and beam through achamber viewport. Each of these port locationscan be specified by the customer.DESCRIPTIONPNEUMATIC SHUTTER, TWO POSITIONCUSTOM SOURCE POSITIONCUSTOM COOLING ROOF PORTS15cc CRUCIBLE25cc CRUCIBLE40cc CRUCIBLEOPTIONNUMBER-01-04-05-06-07-08PRICE$15005001250CallCallCallWhen ordering e-Vap ® assembly options, please add the option number(s) to the end of thedesired assembly Part Number listed above. For example 992511-01-04-05-0826 Phone 800-443-8817 www.mdcvacuum.com MDC Vacuum Products Corporation

e-Vap ®Modular Evaporation SourcesPower SuppliesFeatures■ 6kW, 10kW and 15kW models■ High frequency switching technology■ Excellent regulation■ Low stored energy■ Power efficiency greater than 85%■ Low ripple■ Rugged IGBT switches■ CE compliant■ Sequential or simultaneous operation of up tothree electron beam evaporation sourcesCVS-6 Power SupplySpecificationsMeteringDigital Voltage and Emission CurrentCoolingAir cooledInput power 208 V ±10%, Three-phase, 50/60 Hz, 30, 40, 60 Amperes400 V ± 5%, Three-phase, 50/60 Hz, 15, 20, 30 AmperesVoltage output1 to 10 kV DC, negative polarityVoltage RippleLess than 1% RMSVoltage regulation± 0.25% of full scale outputEfficiency 85%Cables From – To LengthInput power cord Facilities outlet – Power Supply 12'8 gauge ground wire Power Supply – Ground 12'Current output6 kW 0 to 0.6 Amperes10 kW 0 to 1.0 Amperes15 kW 0 to 1.5 AmperesWeightSee TableDimensions19" W x 10.25" H x 21" Le-Vap ® CVS Series Power Supplies are constructed using state-ofthe-artsolid state high frequency switching technology. They areoffered in three standard models rated for 6kW, 10kW and 15kW.CVS series power supplies are for use with the horizontal and verticalflange mounted systems detailed on the previous four pages, aswell as the e-Vap ® modular sources as detailed beginning on pageof this catalog. These power supplies are also compatible with mostcommercially available electron beam sources and are recommendedas upgrade power supplies in existing electron beam evaporationsystems.Power supply enclosures are fully interlocked for operator safety.e-Vap ® CVS Series Power Supplies can power and control up tothree electron beam sources. Source controls and X-Y Sweeps arenot included with power supplies and must be purchased separately.For ordering information please see the next three pages. Thee-Vap ® source control module also employs solid state high frequencyswitching technology and is designed to precisely controlemission current when used with e-Vap ® power supplies. MDC recommendsthe use of a high voltage grounding hook when servicingor working with all high voltage power supplies. Grounding hooks aredetailed on page of this catalog.POWERWEIGHTSUPPLY VOLTAGE POUNDS6kW 208 7510kW 208 9015kW 208 1006kW 400 7510kW 400 9015kW 400 100REFERENCECVS-6-2CECVS-10-2CECVS-15-2CECVS-6-4CECVS-10-4CECVS-15-4CEPARTNUMBER991240991275991242991193991245991246PRICE$153002257524750153002257524750Thin Film DepositionMDC Vacuum Products Corporation www.mdcvacuum.com Phone 800-443-881727

e-Vap ®Controls and MeasurementSource Control ModuleSource Control ModuleFeatures■ High frequency switching technology■ Improved emission stability over 60 Hz SCRcircuits■ Compact filament transformer■ Electrically isolated from high voltage unit■ Grounded and shielded filament transformeroffers improved safety over conventional designs■ Self contained emission current monitoring forindependent operation■ CE compliant■ Full remote control capability■ Touch screen programming■ PS/2 handheld mouse/trackball■ Rack mount brackets includedThin Film DepositionIndirectSpecificationsMeteringDigital Emission CurrentCoolingAir cooledInput power208 V ±10%, Single-phase, 50/60 Hz, 8 AmperesVoltage output12 VACCurrent output0 to 70 AmperesEfficiency 85%Cables From – To LengthInput power cord 1 Wall outlet – Source Control Module 7.5'Interface cable 1 Power Supply – Source Control Module 6'Secondary cable 1 Transformer – e-Vap ® Source 3'Control cable 2 Source Control Module – Transformer 12'Transformer input cable 2 Source Control Module – Transformer 12'High voltage cable 2 Power Supply – Transformer 12'WeightDimensionsDirect20 lb8.5" W x 5.25" H x 14" L1 Fixed length cables; not available in other lengths2 A 25-foot cable kit may be purchased separately; three cables are included in one kite-Vap ® CVS Source Control Modules are designed for use withe-Vap ® CVS Series Power Supplies. The source control module unitincludes filament transformer assembly, hand held mouse controland all necessary cables for hook-up with an e-Vap ® CVS PowerSupply. A maximum output current of 70 amperes assures sufficientpower to drive virtually any commercially available electron beamsource. e-Vap ® CVS Source Control Modules are available in threeinstallation packages, direct flange mount and two remote cablemounts. Direct flange mount packages are used on all MDC flangemounted evaporation systems. This package allows mounting of thefilament transformer to a high voltage feedthrough fitted with a2.75" Del-Seal CF flange. Filament transformer attachment isaccomplished by bolting the transformer housing via two of theflanges .250-28 bolts positioned 180° apart. The remote cablemount packages provide 36" of high voltage cable with OFE copperconnector lugs and an acrylic high voltage shield. This package istypically used with modular source installations where high voltageelectrical feedthroughs are fitted with 2-3/4 Del-Seal CF flanges,but limited space does not allow direct installation. The secondremote package is used on installations where high voltage are two1" feedthroughs.The source control module’s compact size occupies only half thewidth in a standard 19" electronics rack. To facilitate the installationinto a standard 19" rack, MDC offers half-rack spacers. However, ifthe source control module is purchased in conjunction with an e-Vap ® programmable X-Y sweep controller the two units can be fastenedtogether to form the standard 19" rack width and would notrequire the half-rack spacer.DESCRIPTIONWEIGHTPOUNDSDIRECT PACKAGE 10REMOTE PACKAGE 10REMOTE FOR 2-1" BOLT FT10HALF RACK SPACER 125-FOOT CABLE KIT 3REFERENCESCM2-DFM-CESCM2-RCM-CESCM2-RCM-1"BEV-HRSSCM-25FC-CEPARTNUMBER991364-01991364991364-02991062991287PRICE$56005750600512585028 Phone 800-443-8817 www.mdcvacuum.com MDC Vacuum Products Corporation

e-Vap ®Controls and MeasurementXY Programmable Sweep Controllere-Vap ® XY Programmable Sweep Controller with mouseDescriptionThe next generation e-Vap ® Programmable Sweep Controller has takenelectron beam sweep capabilities to a higher level in versatility and practicality.It combines years of customer feedback with the latest advances in electronicstechnology. It possesses profound advancements from its predecessor interms of functionality and ruggedness. It is designed with both the coatingengineer and coatingoperator in mind. Electronbeam control is dynamicallyprecise allowing theuser optimum ability todeposit dielectrics andmetals in the mostdemanding of applications.The strength of the sweepcontroller lies in its abilityto easily adapt to differentevaporation processWelcome Screen Displayrequirements, using its many expandable sweep patterns. Four predefinedsweep patterns and up to 95 additional user-defined patterns can bestored. The predefined patterns include CIRCLE, SPIRAL, FIGURE 8, andLINE patterns. Each of the 95 user defined patterns may consist of upto 208 XY points with a different beam dwell time for each beam point.The user interface includes a large, vibrant color LCD display with sixfunction keys and a smooth rolling adjustment knob. A handheld PS/2device/trackball is provided which allows beam maneuverability forcrucible material preparation and evaporation. For computer-automatedvacuum systems, a detailed rear panel digital I/O port along with astandard RS-232 interface allows access to the most important sweeperfunctions and status signals. An optional interactive Windows program isavailable allowing desktop sweep pattern design and virtually unlimitedsweep pattern storage.Features■ Use with virtually any electron beam source■ Large color LCD display■ Store up to 99 sweep patterns (up to 95user programmable)■ Four pre-defined and highly expandablepatterns include CIRCLE, SPIRAL, FIGURE 8,and, LINE patterns■ PS/2 handheld mouse/trackball control included■ An audible alarm warns of possible fault conditions■ Ability to custom name each sweep pattern■ Ability to choose a crucible pocket number tocorrespond to specific sweep patterns and/orparameters such as beam centering orevaporation material specification■ Ability to custom name the sweep controlleritself for coating machine identification■ Expanded beam power-profile capabilitiesallow the user to control erosion of difficultto evaporate materials■ Customizable display color (foreground andbackground) to match your company colorsor coating machine colors■ Password option – requires a four digitpassword to access functions■ RS-232 interface■ Safety-interlocked■ All cabling included■ CE compliant■ Rack mounting brackets includedSpecificationsGraphic DisplayColor LCDInput Power100-120/200-240V, 50/60Hz, 3AMax Coil Output (sweep + dc bias)5 AmpsMax Sweep Frequency200 HzProgramming InterfacePushbutton, Digital I/O, or RS-232Mouse Remote InputPS/2Max Cable Length (18AWG)25 feet (7.6 meters)Weight11 lbsDimensions8.5" W x 5.25" H x 14” L, Rack-mountableThin Film DepositionMDC Vacuum Products Corporation www.mdcvacuum.com Phone 800-443-881729

e-Vap ®Controls and MeasurementSweep Pattern TypesAll of these patterns may have their sweep characteristics andparameters highly modified. These parameters include SPEED, PHASE,and POWER PROFILE.SPEED is defined as the speed of which the beam travels to completeone cycle of a given pattern. The fundamental frequency of beam sweepis speed. SPEED settings are Fast, Medium, and Slow. Fast is consideredthe base time, Medium takes twice as long, and Slow takes fivetimes as long.PHASE is defined as angular pattern rotation per cycle. The pattern isrotated a few degrees after each sweep pattern cycle. PHASE settings areFast (50 degree steps), Medium (20 degree steps), Slow (10 degreesteps), and None.POWER PROFILE is defined as speed of the beam based on its distancefrom the center of the crucible. It allows the beam to sweep faster throughthe center of the crucible than at the outer edges. The parameter of apattern crossing a crucible too many times, thus resulting in “tunneling”of the material, may be adjusted to obtain “even” beam temperaturedistribution across the crucible surface. POWER PROFILE settings rangefrom 1 to 1/R 2 . A setting of 1 is considered as the beam dwell time, beingthe same for all points. A setting of 1/R 2 is considered the beam dwelltimes being four times greater on the outer edges of the crucible. Adjustingthe profile between 1 and 1/R 2 (twenty possible adjustments) is a newfeature for the sweep controller and adds coating process optimization tothis already valuable parameter.Select PatternCircle PatternThin Film DepositionThe Select pattern allows the user to view patterns 1 through 99. Allpatterns may be started and/or edited from here as well.A CIRCLE pattern makes the beam sweep in concentric circles beginning atthe outer edge of the crucible and steps closer to the center of the cruciblewith each revolution. Upon reaching the center, a reverse cycle begins andthe beam sweep pattern continues.Spiral PatternFigure 8 PatternA SPIRAL pattern makes the beam sweep in a continuous spiral, beginning The FIGURE 8 pattern makes the beam sweep in a well-defined figure 8at the outer edge of the crucible and advancing toward the center and then path across the crucible.back out again.30 Phone 800-443-8817 www.mdcvacuum.com MDC Vacuum Products Corporation

e-Vap ®Controls and MeasurementDisplay ModesLine PatternSystem ParametersA LINE pattern makes the beam sweep in a straight line across the crucible.As in all the predefined patterns (circle, spiral, figure 8 and line), the sweepamplitude, speed, phase, power profile, and XY offset can be readily adjusted.There is also easy access to selecting patterns and scrolling throughdifferent screen menus.User PatternThe System Parameter screen allows the XY offset to be adjusted andstored. Linearity and contrast adjustments can be implemented from here aswell. Foreground and background color selections can also be made fromthis screen and will affect all subsequent patterns. The maximum allowablesweep amplitude current can be set here for the pattern. You can alsodesignate the coating machine’s name as well as adjust the sensitivity of themouse from this screen.User PatternThin Film DepositionUser Pattern: Ninety-six (96) user-defined patterns, completely customizableby the user, can be designed and stored into the sweep controller for instantaccess. Each of the user-defined patterns can contain up to 208 beamlocation points. Each point can possess its own dwell time ranging from1 to 100mS. Patterns can be designed via front panel or through RS-232. Ifdesigned via the front panel, a color interactive matrix panel is displayed foruser feedback. It displays a crucible-shaped area showing all selected points(see the Interactive Matrix Panel screen shown on the left.) Custom namingof the generated pattern, adding and deleting points/patterns, and modifyingdwell times is all done on this same screen. A new feature of the sweepcontroller allows the user to access the SPEED function as well. Choices areFast, Medium, and Slow.MDC Vacuum Products Corporation www.mdcvacuum.com Phone 800-443-881731

e-Vap ®Controls and MeasurementCustomize the Pattern/Controller NameThe sweep controller has the ability to custom name each individual sweeppattern, whether pre-defined or user-defined. For example, when youchoose a specific pattern for a specific evaporation material, it may bedesirable to name the pattern after the evaporation material, such as“QuartzPattern” or “TitaniumPattern.”The sweep controller also has the ability to store a name for itself. If yourcoating machine is called “Coating Machine One,” you could customize thename of the sweep controller as, “CoatingMachine1.”The sweep controller also has the ability to assign a specific patternnumber (1 to 99) to a specific crucible number or crucible pocket. This isadvantageous for users who always have a certain evaporation material ina certain crucible pocket. This allows the user to have saved custom sweepand beam parameters for a given crucible pocket. This is beneficial sincemost deposition controllers have the ability to invoke crucible pocketsduring a coating cycle.Optical Coating Uniformity SolutionsHandheld PS/2 Mouse/TrackballRotary Pocket Evaporation Source with HF Emitter Assembly0Thin Film Deposition6030306090 901.0 0.8 0.6 0.4 0.2 0.0 0.2 0.4 0.6 0.8 1.0Maximize coating distribution with optimal sweep patternsThe XY Programmable Sweep Controller comes equipped witha handheld PS/2 mouse/trackball which allows activation, and XYoffsets and sweep amplitude adjustments from up to 6 feet away.• Sweep On/Off – click the left mouse button• DC On/Off – click the right mouse button• Edit XY Offset – roll the trackball in the desired direction• Edit Amplitude – highlight amplitude, roll the trackball up or down.Ordering InformationHidden Filament Emitter AssemblyDESCRIPTIONREFERENCEPARTNUMBERPRICE$XY PROGRAMMABLE SWEEP CONTROLLERHALF RACK SPACERXYS2-CEEV-HRS991344991062440012532 Phone 800-443-8817 www.mdcvacuum.com MDC Vacuum Products Corporation

e-Vap ®Controls and MeasurementDeposition Monitoring and ControlDescriptionMDC offers a choice of four units with a range of capabilities frommonitoring the deposition process to controlling multiple depositionprocess or controlling co-deposition processes. The choices are tailoredfrom introductory / economical thin film deposition to fullprocess control for a production process. Co-deposition of materialsfrom multiple sources allows easier fabrication and investigation ofcomplex material compositions and layers. All of the monitors andcontrollers utilize proven 6 MHz quartz crystal sensor technology tomeasure the thin film deposition process.SQM-122C Screen ExampleSQM-160 Rate/Thickness MonitorThe SQM-160 measures thickness and deposition rate of the thinfilm deposition process. The base unit can monitor from 2 independentmeasurement channels. Four relays are available to controlsource and crystal shutters during the deposition process. Up tonine films can be stored in memory in the SQM-160, active film canbe easily changed from the front panel. All parameters can also beset from the front panel of the monitor. The SQM-160 is a monitoronly it is not capable of controlling the rate during deposition.The SQC-122 controls deposition rate and thickness in multi-layerthing film deposition processes. The controller was designed forease of use with six content sensitive Softkeys providing rapidaccess to frequently used data. The 122C memory will hold up to 25processes consisting of 250 layers and 25 materials. Cut / Copy/Paste Capabilities make it easy to modify or duplicate processesand layers. The controller has inputs for two crystal sensors, two 0-10 volt outputs are available to control the evaporation rate. Eightrelays and digital inputs can be independently assigned to over 40possible events, including pocket rotation and external process controls.A windows program for set up and data acquisition is alsoincluded with the controller.Thin Film DepositionSQM-222C Co Deposition ControllerSQM-122C Two Channel Deposition ControllerThe SQC-222C model of the controller includes software for co-depositioncontrol. The two crystal sensors and two outputs to controldeposition rate, along with special software features allow for codepositioncapability.MDC Vacuum Products Corporation www.mdcvacuum.com Phone 800-443-881733

e-Vap ®Controls and MeasurementDeposition Monitoring and Controlcommunicate with digital I/O cards. The SQS-242 software packagesupports multiple cards, co-deposition, digital I/O , graphing, anddata logging.Thin Film DepositionSQM-242 Co Deposition Controller PCI CardThe SQM-242 is a thin film deposition controller and a standardPCI expansion card. Each SQM monitors from one to four crystalsensor inputs, and provides two control voltage outputs. Atypical single sensor deposition system is shown, the SQM-242card is installed in a computer, a quartz crystal sensor is connectedto the input and the output is connected to a power supply.The card will control the deposition rate and adjust the outputof the power supply for constant deposition rate. The basicSQM-242 card includes software that is easily modified toCrystal Sensor PackagesSQM-242 Co Deposition Controller SoftwareDESCRIPTIONSQM-160 TWO CHANNEL DEPOSITION MONITORSQM-122C TWO CHANNEL DEPOSITION MONITORSQM-22C TWO CHANNEL DEPOSITION MONITORSQM-242 TWO CHANNEL DEPOSITION MONITORSQS-242 CO DEPOSITION SOFTWAREREFERENCESQM-160SQC-122CSQC-222CSCM-242SQS-242PARTNUMBER9913669913099913679913279913281" Base-Plate Low Profile 2.75" Del-Seal CF Low Profile 2.75" Del-Seal CF Bakeable to 400°CPRICE$12952700315012951075This low profile sensor package includes sensor head,oscillator, 30" in-vacuum cable, 6" BNC cable, 10' BNCcable, a box of gold coated sensor crystals with 5crystals per box, two Swagelok ® compression fittingsand a 1" base-plate sensor feedthrough. Bakeable to180°C.This low profile sensor package includes sensor head,oscillator, 30" in-vacuum cable, 6" BNC cable, 10' BNCcable, a box of gold coated sensor crystals with 5crystals per box, two Swagelok ® compression fittingsand a 2.75" Del-Seal CF sensor feedthrough. Bakeableto 180°C.This bakeable sensor package includes a 400°C bakeablesensor head, oscillator, 30" in-vacuum cable, 6"BNC cable, 10' BNC cable, and a box of gold coated sensorcrystals with 5 crystals per box. Sensor head is preinstalled on a 2.75" Del-Seal CF flange, which includesthe sensor feedthrough.WEIGHTDESCRIPTION MOUNT POUNDSREFERENCEPARTNUMBERPRICE$LOW PROFILE SENSOR PACKAGE 1" BASEPLATE 5LOW PROFILE SENSOR PACKAGE 2.75" DEL-SEAL 5BAKEABLE SENSOR PACKAGE 2.75" DEL-SEAL 5SENSOR CRYSTALS, GOLD RATED BOX OF 10 5LPSP-1LPSP-275LPSP-HT-275CRP-500-11799131099131199163799113113751425197012034 Phone 800-443-8817 www.mdcvacuum.com MDC Vacuum Products Corporation

e-Vap ®Controls and MeasurementDeposition Monitoring and ControlFeatures■ Reliable■ Small Footprint■ Minimal Shadowing■ Minimal Crystal Handling■ Ease of Installation■ Works w/ Present Thin Film Controllers■ 1/3 The Price of Leading Competitors UnitsDescriptionXL12 Multi Crystal Sensor HeadThe XL12 Multi Crystal Sensor Head can hold up to 12, 6 MHzCrystal at one time. With the XL12, the customer can take financialadvantage of long term deposition runs! This instrument is anexclusive patent pending design ready to meet industry needs.This revolutionary design is a small 1.5”w x 5.75”l x 1.4”h (seedrawings) sensor head that uses slide technology to transfer thecrystals. The crystals are seated in carriage assemblies in order toprovide guaranteed exchange during process. When the crystal inuse expires, an operator can manually signal the next crystal tomove into position or you can send a signal via your thin film monitor/ controller. After a signal is given, the XL12 transfers the nextcrystal into position which moves the expired crystal into a holdingcompartment. To reload the XL12 you simply remove the self aligningcrystal cartridge from the main body. You remove 2 screws andthe top plate, you then re-load 12 new crystals, replace the topplate and reinstall the cartridge to the main body. This processtakes less than 5 minutes!XL12 Multi Crystal Sensor Head Package Includes:■ Multi Crystal Sensor Head■ Controller■ 1” Bolt Feedthrough or 2 3/4 Conflat■ 30” In-Vacuum Cable■ 12 Complementary Quartz Crystals■ 15 Crystal Carriages■ 2 Sensor ShieldsXL12 Multi Crystal Sensor Head SpecificationsThin Film DepositionDESCRIPTIONPOUNDSREFERENCEPARTNUMBERPRICE$XL12 MULTI CRYSTAL SENSOR HEAD 2 EV-XL12CS 991375 CallCrystal loaded in cartridgeMDC Vacuum Products Corporation www.mdcvacuum.com Phone 800-443-881735

e-Vap ®Controls and MeasurementCrucible IndexerFeatures■ Direct drive-No pulleys or belts to set or adjust■ Electronic calibration of position■ 8 predefined pocket configurations included■ User configurable feature allows for custom or specialpocket configurations■ Can be operated manually or by external controller■ Two speed ranges for a total of 20 speed settings■ 1.8º resolution■ CE compliante-Vap® Crucible IndexerThin Film DepositionSpecificationsMOTOR DRIVEMotor typemicro-stepperTorque1.4 N-m (200 oz-in)Speed (RPM) low: 0.05, 0.06, 0.08, 0.10, 0.12, 0.15, 0.19, 0.24, 0.30, 0.37high: 0.5, 0.6, 0.8, 1.0, 1.2, 1.5, 1.9, 2.4, 3.0, 3.7Resolution1.8ºlRepeatability0.25ºlSize (height x width x depth) 89 x 89 x 122 mm (3.5" x 3.5" x 4.8")Weight1.5 Kg (3.2 lbs)Power12 W (supplied by controller)The e-Vap® Crucible Indexer is a micro stepper controlled motor driveunit used to position and rotate a multi-hearth electron beam source.The crucible indexer will rotate and position up to eight pocket positions,additional eight preprogrammed configurations can be selected via dipswitch settings at the back of the controller. These include: 4 pocket, 6pocket, 2 pocket, 180° Banana, 3 pocket 90° Banana, 3 pocket 120°Banana, 3 pocket 135° Banana, 3 pocket 145° Banana, or Continuous360° rotation. An additional dip switch lets the user select the followingmodes: Bi-Direction (shortest path between pockets), CounterClockwise Rotation, UHV Source Type, High Speed Range, BCD I/O, andEnable Ethernet communications. In addition the indexer can be userconfigured for any pocket / banana crucible layout. The Indexer alsoeliminates mechanical adjustment of the home or 1st pocket location,the "home" position can be defined electronically.SpecificationsCONTROLLERPockets up to 8digital inputsbinary or BCD encodedlow = 0 to 2 Vdc, high = 4 to 24 Vdc, non-isolatedCommunicationsRS-232 or EthernetSize (height x width x depth) 88 x 213 x 197 mm (3.5" x 8.4" x 7.75")Weight2.7 Kg (6 lbs)Power100-120 / 200-240 VAC, 50/60 Hz, 20WComplianceCE (LVF & ECD)Interconnecting cable10ft (3m), standard DB25The e-Vap® Crucible Indexer can be controlled either manually orremotely, it can be configured to interface with most deposition controllerequipped to select pockets on a multi layer deposition. AWindows-based configuration screen can be used to customize thepocket layout. The drive motor comes with a bracket to attach to a 2.75inch Del Seal rotary feedthrough or to a 1 inch bolt type rotaryfeedthrough. The indexer is supplied with a coupling to connect the 1/4inch drive shaft to the 1/4 inch feedthrough shaft. The e-Vap® CrucibleIndexer is designed to be one of the most flexible methods to customizeor fine tune crucible rotation and control for multi hearth electron beamsources.DESCRIPTIONCRUCIBLE INDEXERREFERENCEPARTNUMBEREV-CI-INDEXER 991400PRICE$225536 Phone 800-443-8817 www.mdcvacuum.com MDC Vacuum Products Corporation

e-Vap ®Evaporation Source AccessoriesHigh Voltage Safety AccessoriesGrounding Hook... MDC recommends the use of a grounding hook prior to serviceor maintenance of any high voltage equipment. Connections which werepreviously energized should be discharged with a grounding hook solidly connectedto a low impedance earth ground. Hook installation is made easy withthe supplied 64" insulated cable.High Voltage Shield... To prevent accidental contact with exposed high voltageleads MDC recommends the use of high voltage acrylic shields. Shields areavailable for 2-3/4" Del-Seal CF flange and 1" Baseplate mounted feedthroughs.Strain relief will accept cable sizes from .23" to .47" diameters.DESCRIPTIONREFERENCEPARTNUMBERPRICE$HIGH VOLTAGE SAFETY GROUND HOOKACRYLIC SHIELD 2-3/4" DEL-SEALACRYLIC SHIELD 1" BASE-PLATEEV-SGHHVE-2BHVE-2991106640051640057215195225Pneumatic Shutter Two PositionPneumatic shutters are an excellent tool for precise control of film thicknessonto a substrate. The air actuated shutter masks off the vapor stream betweensource and substrate at the beginning and finishing stages of theevaporation/deposition cycle. The shutter also allows pre-melt or “soak” prior todeposition by blanketing the evaporation material. Shutters with a 2" diameterand 2" stroke are used on sources with crucible volumes of less than 40cc.Shutters with a 3" diameter and 4" stroke are used on sources with crucible volumesof 40cc and greater. These shutters come standard with a 120VAC solenoidvalve.NOM. SHUTTER STROKEFLANGE DIAMETER LENGTH1-1/3 2.00 2.001-1/3 3.00 4.002-3/4 2.00 2.002-3/4 3.00 4.00REFERENCEPS-2P2-133PS-2P3-133PS-2P2-275PS-2P3-275PARTNUMBER991796-02991796-01991794-02991794-01PRICE$93015009501250Thin Film DepositionPneumatic Shutter Three PositionPneumatic shutters are an excellent tool for precise control of film thicknessonto a substrate. The air actuated shutter masks off the vapor stream betweensource and substrate at the beginning and finishing stages of theevaporation/deposition cycle. The shutter also allows pre-melt or “soak” prior todeposition by blanketing the evaporation material. A three position shutter offersgreater process flexibility than other shutters. In position one the shutter willclose the deposition and rate monitoring ports on a horizontal e-Vap ® systemfitted with a water-cooled roof. In position two the shutter continues to block thedeposition port, but opens the rate monitoring port. In position three all ports areopen and the system is ready to begin a coating cycle. This shutter includes a120VAC solenoid air control valve.DESCRIPTIONSHUTTER 3-POSITIONREFERENCEPARTNUMBERPS-3PU-133 996343PRICE$1650MDC Vacuum Products Corporation www.mdcvacuum.com Phone 800-443-881737

e-Vap ®Evaporation Source AccessoriesManual Shutter Push-PullManual shutters are an excellent tool for control of film thickness onto a substrate.The manually operated shutter masks off the vapor stream betweensource and substrate at the beginning and finishing stages of theevaporation/deposition cycle. The shutter also allows pre-melt or “soak” prior todeposition by blanketing the evaporation material. Shutters with a 2" diameterby 2" stroke are used on sources with crucible volumes of less than 40cc.Shutters with a 3" diameter by 4" stroke are used on sources with crucible volumesof 40cc and greater.NOM. SHUTTER STROKEFLANGE DIAMETER LENGTHREFERENCEPARTNUMBERPRICE$1-1/3 2.00 2.001-1/3 3.00 4.002-3/4 2.00 2.002-3/4 3.00 4.00MS-2-133MS-3-133MS-2-275MS-3-275991793-01991793-02991792-01991792-02825975925985Linear Guide RodsThin Film DepositionLinear bearing guide rods allow horizontal flange mounted e-Vap ® systems tobe routinely maintained by simply sliding in and out, in drawer-like fashion. Twolinear ball bushings provide the smooth gliding action required for ease ofmovement. Weldable support brackets secure the guide rods onto the user’sport flange. The bracket installation procedure is simple and self explanatory.DESCRIPTIONGUIDE RODSREFERENCEPARTNUMBEREV-LGRA 991791PRICE$825Water Flow Switche-Vap ® electron beam sources rely on water-cooling to dissipate the largeamounts of heat generated by an electron beam. Proper water flow is essentialfor normal system operation as well as for safety. The water flow switch will turnoff all power to the e-Vap ® source when and if a preset water flow rate dropsbelow its set point.DESCRIPTIONREFERENCEPARTNUMBERPRICE$WATER FLOW SWITCH 110VWATER FLOW SWITCH 24VDCEV-WF110EV-WF240991031991031-0130030038 Phone 800-443-8817 www.mdcvacuum.com MDC Vacuum Products Corporation

e-Vap ®Evaporation Source AccessoriesCrucible LinersMDC recommends using crucible liners with all e-Vap ® sources. Crucibleliners provide thermal isolation between a target material and a source’swatercooled crucible. These liners offer improved thermal stability whilereducing the transfer of heat to the crucible. Liners provide the ability to easilyand quickly switch evaporant materials without removing the source forcleaning. They also reduce power requirements to achieve specific evaporationrates. Graphite and vitreous carbon are the most popular liner materialsdue to their low cost and favorable thermal properties. Vitreous carbon isproduced using a patented glazing process baked above 1400°C eliminatingany porosity in the carbon. Please contact MDC sales for price and availabilityon the various non-priced liner materials.LINERMATERIALCRUCIBLESIZEREFERENCEPARTNUMBERPRICE$LINERMATERIALCRUCIBLESIZEREFERENCEPARTNUMBERPRICE$GRAPHITEGRAPHITEGRAPHITEGRAPHITEGRAPHITEGRAPHITEGRAPHITEGRAPHITEGRAPHITEGRAPHITEVITREOUS CARBONVITREOUS CARBONVITREOUS CARBONVITREOUS CARBONVITREOUS CARBONVITREOUS CARBONVITREOUS CARBONVITREOUS CARBONVITREOUS CARBONVITREOUS CARBONMOLYBDENUMMOLYBDENUMMOLYBDENUMMOLYBDENUMMOLYBDENUMMOLYBDENUMMOLYBDENUMMOLYBDENUMMOLYBDENUMMOLYBDENUMTUNGSTENTUNGSTENTUNGSTENTUNGSTENTUNGSTENFABMATEFABMATE2cc6cc7cc15cc25cc30cc40cc60cc75cc100cc2cc6cc7cc15cc25cc30cc40cc60cc75cc100cc2cc6cc7cc15cc25cc30cc40cc60cc75cc100cc2cc6cc7cc15cc25cc2cc6ccEV-CL2GEV-CL6GEV-CL7GEV-CL15GEV-CL25GEV-CL30GEV-CL40GEV-CL60GEV-CL75GEV-CL100GEV-CL2VCEV-CL6VCEV-CL7VCEV-CL15VCEV-CL25VCEV-CL30VCEV-CL40VCEV-CL60VCEV-CL75VCEV-CL100VCEV-CL2MEV-CL6MEV-CL7MEV-CL15MEV-CL25MEV-CL30MEV-CL40MEV-CL60MEV-CL75MEV-CL100MEV-CL2TUEV-CL6TUEV-CL7TUEV-CL15TUEV-CL25TUEV-CL2FMEV-CL2FM992584-01990586-01990587-01990588-01990589-01992484-01990590-01992571-01992572-01992573-01992584-02990586-02990587-02990588-02990589-02992484-02990590-02992571-02992572-02992573-02992584-03990586-03990587-03990588-03990589-03992484-03990590-03992571-03992572-03992573-03992584-04990586-04990587-04990588-04990589-04992584-10990586-108055757080135CallCallCallCall135135135150225225CallCallCallCallCallCallCallCallCallCallCallCallCallCallCallCallCallCallCall90100TUNGSTENTUNGSTENTUNGSTENTUNGSTENTUNGSTENBORON NITRIDEBORON NITRIDEBORON NITRIDEBORON NITRIDEBORON NITRIDEBORON NITRIDEBORON NITRIDEBORON NITRIDEBORON NITRIDEBORON NITRIDEALUMINAALUMINAALUMINAALUMINAALUMINAALUMINAALUMINAALUMINAALUMINAALUMINACOPPERCOPPERCOPPERCOPPERCOPPERCOPPERCOPPERCOPPERCOPPERCOPPER30cc40cc60cc75cc100cc2cc6cc7cc15cc25cc30cc40cc60cc75cc100cc2cc6cc7cc15cc25cc30cc40cc60cc75cc100cc2cc6cc7cc15cc25cc30cc40cc60cc75cc100ccEV-CL30TUEV-CL40TUEV-CL60TUEV-CL75TUEV-CL100TUEV-CL2BNEV-CL6BNEV-CL7BNEV-CL15BNEV-CL25BNEV-CL30BNEV-CL40BNEV-CL60BNEV-CL75BNEV-CL100BNEV-CL2AEV-CL6AEV-CL7AEV-CL15AEV-CL25AEV-CL30AEV-CL40AEV-CL60AEV-CL75AEV-CL100AEV-CL2CUEV-CL6CUEV-CL7CUEV-CL15CUEV-CL25CUEV-CL30CUEV-CL40CUEV-CL60CUEV-CL75CUEV-CL100CU992484-04990590-04992571-04992572-04992573-04992584-05990586-05990587-05990588-05990589-05992484-05990590-05992571-05992572-05992573-05992584-06990586-06990587-06990588-06990589-06992484-06990590-06992571-06992572-06992573-06992584-08990586-08990587-08990588-08990589-08992484-08990590-08992571-08992572-08992573-08CallCallCallCallCallCallCallCallCallCallCallCallCallCallCallCallCallCallCallCallCallCallCallCallCallCallCallCallCallCallCallCallCallCallCallThin Film DepositionMDC Vacuum Products Corporation www.mdcvacuum.com Phone 800-443-881739

e-Vap ®Evaporation Source Accessories270º Emitter Consumable AccessoriesThe spare parts detailed below are a list of e-Vap ® consumable components which mayrequire periodic replacement. These components have been specifically designed for usewith MDC e-Vap ® electron beam evaporation sources and systems.Figure 1USED WITHDESCRIPTION FRAME SIZE FIGUREREFERENCEPARTNUMBERPRICE$Thin Film DepositionFigure 2Figure 4Figure 6Figure 3Figure 5Figure 7ANODE 1-6 1BEAM DEFLECTOR SHIELD 1, 2, 5, 6 2BEAM DEFLECTOR SHIELD 3, 4 2BEAM FORMER 1 - 6 3CATHODE BLOCK, LH 1, 2 4CATHODE BLOCK, RH 1, 2 4CATHODE BLOCK, LH 3 - 6 4CATHODE BLOCK, RH 3 - 6 4EMITTER ASSEMBLY 1, 2 6EMITTER ASSEMBLY, OLD 5 1 6EMITTER ASSEMBLY 6 6EMITTER ASSEMBLY 3 6EMITTER ASSEMBLY 4 6EMITTER ASSEMBLY, NEW 5 1 6FASTENERS, NON-GALLING 1 - 6 5FILAMENT CLAMP, LH 1 - 6 7FILAMENT CLAMP, RH 1 - 6 7FILAMENT SET, 5 ea. 1, 2, 6 8FILAMENT SET, 5 ea. 3, 4, 5 8INSULATOR, HIGH VOLTAGE 1 - 6 AINSULATOR, FILAMENT BLOCK 1 - 6 BINSULATOR, BEAM DEFLECTOR 1 - 6 CINSULATOR, BEAM FORMER 1 - 6 DEV-EAEV-BDSEV-BDSEV-BFEV-LCBEV-RCBEV-LCBEV-RCBEV-EA-1000EV-EA-4010EV-EA-4015EV-EA-4066EV-EA-4UHVEV-EA-4010EV-FKEV-LFCEV-RFCEV-FILEV-FILEV-IHVEV-IFBEV-IBDSEV-IBDS990537992201990534990533990525-01990526-01990525-02990526-02990630-01990630-02990630-03990630-04990630-06990630-059905859905319905329923309905279905309905289905359905293251156540200200200200145014501450145014501450504040606015201571 Older frame-five emitter assemblies are fitted with short design anodes as pictured in figure seven and bottom of figureone. New frame-five emitter assemblies are fitted with new extended design anodes as shown at top of figure one.Figure 8 Figure 9BACDDC40 Phone 800-443-8817 www.mdcvacuum.com MDC Vacuum Products Corporation

e-Vap ®Evaporation Source AccessoriesHF Emitter AssemblyThe spare parts detailed below are a list of e-Vap ® consumable componentswhich may require periodic replacement. These componentshave been specifically designed for use with MDC e-Vap ®electron beam evaporation sources and systems equipped with theHF Emitter Assembly.Components may be purchased individually or as acomplete retrofit kit.Retrofit KitA complete HF Emitter Assembly retrofit kit includes:• One HF Emitter Assembly• One filament installation tool• One face plate for emitter• Permanent magnets (Frame size 5 and 6 only)• Two installation screws• Detailed instructionsFigure 1Figure 2USED WITHDESCRIPTION FRAME SIZE FIGUREREFERENCEPARTNUMBERPRICE$EMITTER RETROFIT KITEMITTER RETROFIT KIT 1, 2, 5 1EMITTER RETROFIT KIT 6 2EV-EAHF1-KITEV-EAHF6-KIT99290899290935004100EMITTER ASSEMBLYFigure 3Figure 4EMITTER ASSEMBLY 1, 2, 5 1EMITTER ASSEMBLY 6 2EV-EAHF1EV-EAHF6992850-02992850-0125002500Figure 5Figure 6REPLACEMENT PARTSANODE 1-6 3BEAM DEFLECTOR SHIELD 1-6 4FILAMENT INSTALLATION TOOL 1-6 5CATHODE BLOCK, LH 1-6 6CATHODE BLOCK, RH 1-6 6FASTENERS, NON-GALLING (Set of 8) 1-6 7FILAMENT CLAMP, LH 1-6 8FILAMENT CLAMP, RH 1-6 8EV-AHFEV-BDSHFEV-FITEV-LCBHFEV-RCBHFEV-FKHFEV-LFCHFEV-RFCHF992845992846992534-01992853992852993042992847-01992847-0225012515650650509595Thin Film DepositionFigure 7Figure 8Figure 9 Figure 10CONSUMABLESFILAMENT SET, 5 ea. 1-6 9INSULATOR, HIGH VOLTAGE 1-6 10EV-FILHFEV-IHVHF99052799241460235MDC Vacuum Products Corporation www.mdcvacuum.com Phone 800-443-881741

e-Vap ®Evaporation Source AccessoriesInstallation HardwareListed below are the essential components required for a typical installation of stand-alonemodular e-Vap ® electron beam sources. Included are feedthroughs for source water coolingand all electrical interfaces. Manual and auto-indexer type rotary feedthroughs areavailable for the installation of multi-pocket sources. All components are fitted with industrystandard vacuum mounts to facilitate source installation onto existing coating systems.Standard mounts include... Del-Seal CF metal seal flanges and 1" baseplate O-ring sealmounts. Customers with Balzers systems with 1-1/4" base plate ports can use MDC 1-1/4"to 1" baseplate port adapters.Figure 1Figure 2Figure 3Figure 4DESCRIPTIONFIGUREREFERENCEPARTNUMBERPRICE$Thin Film DepositionFEEDTHROUGHS, WATER & ELECTRICALWATER, DUAL .312" TUBES, 2.75" DEL-SEAL 1WATER, DUAL .312" TUBES, 1" BASE-PLATE 1SWEEP COIL, 4 PIN .056, 1.33" DEL-SEAL 2SWEEP COIL, 4 PIN .056, 2.75" DEL-SEAL 2SWEEP COIL, 4 PIN .056, 1" BASE-PLATE 2TC-CRIMP CONTACTS FOR .056 PIN, Pkg of 5 2HIGH VOLTAGE, 2 PIN .250, 12kV 2.75" DEL-SEAL 3HIGH VOLTAGE, 1 PIN .312, 12kV 1" BASE-PLATE 10CONNECTOR, RIGHT ANGLE POWER, .25" PIN 3CONNECTOR, INLINE POWER, 25" PIN 3CONNECTOR, RIGHT ANGLE, .312" PINEV-LF275EV-LF1EV-IF133EV-IF275EV-IF1TC-CRIMPEV-HC275EV-HC1RAPCILPCREVHVC991534991726991531991532991727991538640005992940991537991536992818-0315028527527530060425395252575Figure 5Figure 7Figure 6Figure 8FEEDTHROUGHS, ROTARY BELLOWS SEALROTARY MANUAL, .250 SHAFT, 1.33" DEL-SEAL 4ROTARY MANUAL, .250 SHAFT, 2.75" DEL-SEAL 4ROTARY, .250 SHAFT BOTH ENDS, 1.33" DEL-SEAL 5ROTARY, .250 SHAFT BOTH ENDS, 2.75" DEL-SEAL 5HTBRM-133HTBRM-275EV-BRMI-133EV-BRMI-275670004670005991731991730450465525535FEEDTHROUGHS, ROTARY O-RING SEALROTARY, .250 SHAFT BOTH ENDS, 1" BASE-PLATE 6FRM-1652000345Figure 9Figure 10ASSEMBLY EQUIPMENTBASE-PLATE ADAPTER BALZERS 1-1/4" TO MDC 1" 7VCR ® GLAND, .250" MODIFIED .218" BORE 8VCR ® GLAND, .250" TO .312" TUBE ADAPTER 8WATER FLOW SWITCH, 110V 9WATER FLOW SWITCH, 240V 9HIGH VOLTAGE SAFETY GROUND HOOK 11HIGH VOLTAGE ACRYLIC SHIELD, 2-3/4" DEL-SEAL 12HIGH VOLTAGE ACRYLIC SHIELD, 1" BASE-PLATE 12EV-BAIEV-MVCREV-TAVCREV-WF110EV-WF24DEV-SGHHVE-2BHVE-2991813990610991809991031991031-01991106640051640057952210300300215195225Figure 11Figure 1242 Phone 800-443-8817 www.mdcvacuum.com MDC Vacuum Products Corporation

e-Vap ®Ordering InformationShipping MethodAll standard shipments are made by thefollowing method unless otherwise specified:• FOB Hayward, California and Sarasota,Florida.• prepay and added to invoice (PPA);• shipped via UPS ground service or bestway as determined by MDC.Nonstandard shipments must be specified bythe customer. General notes include thefollowing:• orders may be specified to ship collect;• charges for nonstandard methods ofshipping are determined by the specifiedcarrier;• in some cases, oversized items may becharged at a “dimensional weight” (dimweight)rate which is substantially higherthan surface rates.MDC recommends in all cases that analternative carrier be named at the time oforder.Weights stated in this catalog are forreference only. Exact shipping weights aredetermined at the time of shipment.Payment TermsNet 30 days with prior credit approval.VISA ® , MasterCard ® and AmericanExpress ® credit cards, prepaid, are alsoaccepted.Prices and SpecificationsPrices and specifications are subject tochange without notice.DeliveryEvery effort will be made to ship within three(3) days of receipt of an order. In the event ofback-order, a firm delivery date will beestablished and quoted.WarrantyAll products manufactured by MDC VacuumProducts Corporation are warranted to befree from defects in materials andworkmanship for a period of twelve (12)months from the date of shipment by MDCVacuum Products Corporation to the buyer.Liability under this warranty is expresslylimited to repair or replacement of defectiveproducts at the option of MDC VacuumProducts Corporation. Products returned toMDC Vacuum Products Corporation for repairor replacement shall be received prepaid.Expendable items such as gaskets, bellows,bearings, lubricants, etc., may have a servicelife of less than one year in normal usage. Ifsuch items fail to give reasonable service fora period of time, as determined by MDCVacuum Products Corporation, they will berepaired or replaced by MDC VacuumProducts Corporation at its election.Return PolicyIn the event that a product is to be returnedto MDC, a Return Authorization (RA) numbermust be obtained from the MDC SalesDepartment prior to shipment of the product.Call the toll free number listed at the bottomof this page and request an RA number. Tofacilitate processing, please provide theoriginal date of purchase and either theoriginal purchase order number or theoriginal MDC sales order number.Products returned to MDC Vacuum ProductsCorporation for repair or replacement shallbe received prepaid. Items arriving without aReturn Authorization number will be refused.A product failing to give reasonable servicefor a period of time, as determined by MDCVacuum Products Corporation, will be repairedor replaced by MDC Vacuum ProductsCorporation at its election.Trademark OwnershipAmerican Express ® American Express Co.MasterCard ® Mastercard International Inc.VISA ® VISA International Service AssociationApiezon ®Avo Biddle InstrumentsAutoCad ®AutoDesk CorporationConflat ® , Fel-Pro ® Varian Associates Inc.Corning ® , Pyrex ®Corning Inc.Dicronite ® Rotary Components, Inc.Kovar ®Carpenter TechnologyMazak ®Yamazaki Mazak Corp.Slo-Syn ®Superior Electric Co.Suprasil Heraeus Amersil Inc.Swagelok ® , VCR ®Swagelok Co.Teflon ® E.I. DuPont de Nemours & Co., Inc.VacOptix ®Insulator SealViton ® , Buna ® , Kapton ® , Kalrez ® ,Krytox ® , Vespel ® , Delrin ® DuPont DowElastomersCab-Fast ®Caburn-MDC LimitedDel-Seal , Del-Base , Del-Weld , Kwik-Flange , Large-Flange , Mini-Scaffold ,Auto-Dock , C-Loc , Uni-Loc , V-Plane ,Re-Vap , e-Vap ®MDC Vacuum Products CorporationAll dimensions in this catalog are given ininches unless specified otherwise.Thin Film DepositionMDC customer service and technical department MDC inventory and stock room MDC shipping and receiving departmentMDC Vacuum Products Corporation www.mdcvacuum.com Phone 800-443-881743

e-Vap ®Subject Page Subject Page Subject PageThin Film DepositionAAccessories, e-Vap ®Consumable. . . . . . . . . . . . . . . . . . . 40-44General . . . . . . . . . . . . . . . . . . . . . . . . . 37Installation . . . . . . . . . . . . . . . . . . . . . . 42Acrylic, high voltage shieldFits 1" baseplate mounts . . . . . . . . . 37,42Fits 2-3/4" Del-Seal CF . . . . . . . . . 37,42Adapter, e-Vap ®1/4" to 5/16" tube . . . . . . . . . . . . . . . . 421-1/4" to 1" baseplate . . . . . . . . . . . . . 422mm wire feed . . . . . . . . . . . . . . . . . . . 11Alumina crucible liners . . . . . . . . . . . . . . . 39Anode, 3kW miniature source. . . . . . . . 13,16Anode, modular source. . . . . . . . . . . . . 40,41Applications, e-Vap ® . . . . . . . . . . . . . . . . . 2BBaseplateAdapter, 1-1/4" to 1" . . . . . . . . . . . . . . 42Beam former3kW source. . . . . . . . . . . . . . . . . . . . . . 13270º source. . . . . . . . . . . . . . . . . . . . . . 40Block insulator, filament 270º . . . . . . . . . 482Block, cathode 270º . . . . . . . . . . . . . . . . . 40Boron Nitride crucible liners . . . . . . . . . . . 40CCable, 25' source control. . . . . . . . . . . . . . 28Carbon crucible liners . . . . . . . . . . . . . . . . 39Carousel source, modular . . . . . . . . . . 21-22Cathode block 270º. . . . . . . . . . . . . . . . . . 40Coil feedthroughs . . . . . . . . . . . . . . . . . . . 42Electrical 4 pin .056", 2-3/4" . . . . . . . . 42Electrical 4 pin .056", 1-1/3" . . . . . . . . 42Electrical 4 pin .056", 1" baseplate. . . . 42Consumable accessories . . . . . . . . . . . 40-41Controller, deposition rate . . . . . . . . . . 33-34Copper crucible liners . . . . . . . . . . . . . . . . 39Crucible liners . . . . . . . . . . . . . . . . . . . . . . 39Crucible, resistive source oxide . . . . . . . . . . 5Crucible Indexer . . . . . . . . . . . . . . . . . . . . 36Crystal sensor packagesLow profile on 1" baseplate . . . . . . . . . 34Low profile on 2-3/4" . . . . . . . . . . . . . . 34High temperature on 2-3/4" . . . . . . . . . 34Low profile on 2-3/4" . . . . . . . . . . . . . . 34DXL-12 . . . . . . . . . . . . . . . . . . . . . . . . . . 35Deposition rate controller. . . . . . . . . . . 33-34Deposition ratesMonolayer . . . . . . . . . . . . . . . . . . . . . . . 10Stable . . . . . . . . . . . . . . . . . . . . . . . . . . 10EElectrical feedthrough, e-Vap ® Sweep,4 pin, .056" on 2-3/4" . . . . . . . . . . . . . 424 pin, .056" on 1-1/3" . . . . . . . . . . . . . 424 pin, .056" on 1" baseplate . . . . . . . . . 424 pin, .056" on 2-3/4 . . . . . . . . . . . . . . 42High voltage, 2 pin .250 on 2-3/4" . . . . 42High voltage, 2 pin .250 on 1" baseplate 42High current, Re-Vap . . . . . . . . . . . . . . 9Element, resistive source heater basketBaffled boat. . . . . . . . . . . . . . . . . . . . . . . 8Coil . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5Filament . . . . . . . . . . . . . . . . . . . . . . . . . 8Foil boat, metal . . . . . . . . . . . . . . . . . . . . 5Foil boat, coated metal . . . . . . . . . . . . . . 5Emitter assembly, 270º . . . . . . . . . . . . . . . 40Emitter assembly, HF. . . . . . . . . . . . . . . . . 41Extension kit, Re-Vap conductor . . . . . . . . 5FFasteners, non-galling . . . . . . . . . . . . . 40,41FeedthroughsElectrical . . . . . . . . . . . . . . . . . . . . . . . . 42Rotary . . . . . . . . . . . . . . . . . . . . . . . . . 42Water, dual 5/16 tube . . . . . . . . . . . . . . 42High current, Re-Vap Filament clamp . . . . . . . . . . . . . . . . . . . . . 42Filament sets,EV-100 . . . . . . . . . . . . . . . . . . . . . . . . . 113kw single . . . . . . . . . . . . . . . . . . . . . . 13Mighty Source TM . . . . . . . . . . . . . . . . . . . 16270º emitter . . . . . . . . . . . . . . . . . . . . . 40HF emitter . . . . . . . . . . . . . . . . . . . . . . . 41Filament transformer, source control . . . . . 28Filament, resistive sourceRe-Vap 900 . . . . . . . . . . . . . . . . . . . . . . 5Re-Vap 3000 . . . . . . . . . . . . . . . . . . . . . 8Flange mounted sourcesHorizontal . . . . . . . . . . . . . . . . . . . . . . . 24Miniature. . . . . . . . . . . . . . . . . . . . . . . . 13Mighty Source TM . . . . . . . . . . . . . . . . . . . 16Vertical . . . . . . . . . . . . . . . . . . . . . . . . . 25Flow switch, water . . . . . . . . . . . . . . . . . . 38Frame size, modular sourceFrame 1, 2, . . . . . . . . . . . . . . . . . . . . . . 19Frame 3,4 . . . . . . . . . . . . . . . . . . . . . . . 20Frame 5 . . . . . . . . . . . . . . . . . . . . . . . . 21Frame 6 . . . . . . . . . . . . . . . . . . . . . . . . 22GGland 1/4 VCR ® with .218" bore . . . . . . . 42Gland 1/4 VCR ® to 5/16"tube adapter . . . . . . . . . . . . . . . . . . . . . 42Graphite crucible liners . . . . . . . . . . . . . . . 39Grounding hook, high voltage . . . . . . . . . . 37Guide rods, horizontal flangedsource. . . . . . . . . . . . . . . . . . . . . . . . . . 38HHalf-rack spacer3-1/2" high . . . . . . . . . . . . . . . . . . . . . . 365-1/4" high . . . . . . . . . . . . . . . . . . . 28,32HF emitter . . . . . . . . . . . . . . . . . . . . . . . . . 41High voltage power supplies, 208 volt100W-EV-100 . . . . . . . . . . . . . . . . . . . . 113kW . . . . . . . . . . . . . . . . . . . . . . . . 13,156kW, 10kW, 15kW . . . . . . . . . . . . . . . . . 27High voltage power supplies, 400 volt6kW, 10kW, 15kW . . . . . . . . . . . . . . . . . 27High voltage shield, acrylicFits 2-3/4" Del-Seal CF . . . . . . . . . 37,42Fits 1" baseplate mount . . . . . . . . . . 37,42IIndexer, crucible . . . . . . . . . . . . . . . . . . . . 36Indirect watercooled sources . . . . . . . . 21,22InsulatorBeam deflector, 270º. . . . . . . . . . . . . . . 40Beam former, 270º . . . . . . . . . . . . . . . . 40Ceramic, 270º . . . . . . . . . . . . . . . . . . . . 40Filament block, 270º . . . . . . . . . . . . . . . 40High voltage, HF, 270º . . . . . . . . . . . 40,4144 Phone 800-443-8817 www.mdcvacuum.com MDC Vacuum Products Corporation

e-Vap ®Subject Page Subject Page Subject PageJKLMManual shutter, push-pull . . . . . . . . . . . . . 38Miniature evaporation systems . . . . . . . 10-14Miniature sourcese-Vap ® 100W . . . . . . . . . . . . . . . . . 10-11e-Vap ® 3000W . . . . . . . . . . . . . . . . 12-13Mighty Source . . . . . . . . . . . . . . . . 14-15Modular sources, by frame sizeFrame 1, 2 . . . . . . . . . . . . . . . . . . . . . . 19Frame 3,4 . . . . . . . . . . . . . . . . . . . . . . . 20Frame 5 . . . . . . . . . . . . . . . . . . . . . . . . 21Frame 6 . . . . . . . . . . . . . . . . . . . . . . . . 22Modular sources, flangedHorizontal . . . . . . . . . . . . . . . . . . . . . . . 24Vertical . . . . . . . . . . . . . . . . . . . . . . . . . 25Molybdenum crucible liners. . . . . . . . . . . . 39Mouse, XY sweep . . . . . . . . . . . . . . . . . . . 32NOOrdering information . . . . . . . . . . . . . . . . . 43PPatterns, XY sweep . . . . . . . . . . . . . . . 30-31Pneumatic shutter2 position, 2 on 1-1/3" . . . . . . . . . . . . . 372 position, 2 on 2-3/4" . . . . . . . . . . . . . 372 position, 3 on 1-1/3" . . . . . . . . . . . . . 372 position, 3 on 2-3/4" . . . . . . . . . . . . . 37Power supplies, 208V input voltage100W, EV-100 . . . . . . . . . . . . . . . . . . . . 11900W, Re-Vap . . . . . . . . . . . . . . . . . . . . 43000W, Re-Vap . . . . . . . . . . . . . . . . . . . 63kW . . . . . . . . . . . . . . . . . . . . . . . . . 13,156kW, 10kW, 15kW . . . . . . . . . . . . . . . . . 27Power supplies 400V input voltage6kW, 10kW, 15kW . . . . . . . . . . . . . . . . . 27QRRate controller, deposition . . . . . . . . . . 33,34Re-Vap . . . . . . . . . . . . . . . . . . . . . . . . . . 4,9Remote mount filament transformer . . . . . 28Resistive source, Re-Vap . . . . . . . . . . . . 4,9Rods, guide, horizontal flanged source . . . 38Roof, watercooled . . . . . . . . . . . . . . . . 23-26SSafety accessoriesAcrylic shield, fits 1" baseplate . . . . . . . 37Acrylic shield, fits 2-3/4". . . . . . . . . . . . 37Grounding hook, high voltage . . . . . . . . 37Sensor packages, crystal. . . . . . . . . . . . . . 34XL-12 . . . . . . . . . . . . . . . . . . . . . . . . . . 35Shipping method . . . . . . . . . . . . . . . . . . . . 43Shutter, e-Vap ®Manual . . . . . . . . . . . . . . . . . . . . . . . . . 38Pneumatic. . . . . . . . . . . . . . . . . . . . . . . 37Single-pocket sources, modular . . . . . . . . 19Source control filament transformer . . . . . 28Source control module . . . . . . . . . . . . . . . 28Sources,Resistive, Re-Vap 900 . . . . . . . . . . . . . . 4Resistive, Re-Vap 3000 . . . . . . . . . . . 7-9Sweep coil feedthroughs . . . . . . . . . . . . . . 29Sweep patterns . . . . . . . . . . . . . . . . . . 31-31Sweep programmable controller, XY. . . 29-32Switch, water flow110 volt. . . . . . . . . . . . . . . . . . . . . . . . . 3824VDC volt . . . . . . . . . . . . . . . . . . . . . . 38Systems, e-Vap ®Horizontal, flanged electron beam . . . . . 23Miniature, flanged electronbeam . . . . . . . . . . . . . . . . . . . . . . . . . 13Miniature, flanged resistive . . . . . . . . . . . 4Vertical, flanged electron beam . . . . . . . 25Re-Vap 3000. . . . . . . . . . . . . . . . . . . . . 6TMighty source TM . . . . . . . . . . . . . . . . . . . 14Tantalum crucible liners . . . . . . . . . . . . . . 39Tungsten crucible liners. . . . . . . . . . . . . . . 39UVVCR ® Gland 1/4 with .218" bore . . . . . . . 42VCR ® Gland 1/4 to 5/16"tube adapter . . . . . . . . . . . . . . . . . . . . . 42Vitreous carbon crucible liners . . . . . . . . . 39WWarranty . . . . . . . . . . . . . . . . . . . . . . . . . . 43Water cooling, direct and indirect,e-Vap ® . . . . . . . . . . . . . . . . . . . . . . . . . 18Water feedthroughs, e-Vap ®Dual 5/16" tube on 1" baseplate. . . . . . 42Dual 5/16" tube on 2-3/4" . . . . . . . . . . 42Water flow switch . . . . . . . . . . . . . . . . . . . 38Watercooled roof, horizontal andvertical. . . . . . . . . . . . . . . . . . . . . . . 24,26Wire fed source-EV-11001mm wire . . . . . . . . . . . . . . . . . . . . . . . 112mm wire . . . . . . . . . . . . . . . . . . . . . . . 11XXY sweep controller, programmable . . . 29-32YZThin Film DepositionMDC Vacuum Products Corporation www.mdcvacuum.com Phone 800-443-881745

e-Vap ®NotesThin Film Deposition46Phone 800-443-8817 www.mdcvacuum.com MDC Vacuum Products Corporation

e-Vap ®NotesThin Film DepositionMDC Vacuum Products Corporation www.mdcvacuum.com Phone 800-443-881747

Visit www.mdcvacuum.comto order online and for all of the latest pricing, newproduct and sales representative contact information.Access over 3300 parts online–thousands ofcomponents in-stock!

e-Vap ®SourceMightySource Singlepocket• MultipocketUHV ••Flange-mountedFlange-mountedUHV SourceMultipocketRe-Vap 900Systeme-Vap®3000AccessoriesSinglepocket

Thin Film TechnologyMDC Vacuum Products Corporation23842 Cabot Boulevard, Hayward, CA 94545-1651• Toll Free 800-443-8817• Phone 510-265-3500 • Fax 510-887-0626• e-mail evap@mdcvacuum.com • www.mdcvacuum.comVACUUM PRODUCTS CORPORATION