High & Ultrahigh Vacuum Thin Film Deposition Technology

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e-Vap ®Miniature Evaporation SystemsMODULAR SOURCE SERIES☛ Power Supplies descriptionFigure 1e-Vap ® Mighty Source Vertical Source Assembly (10-inch CF flange)Figure 2Figure 3Mighty Source Details TableDESCRIPTIONREFERENCEPART #PRICEFIGThin Film DepositionStand Alone Source3/4" Del Seal CF Flange (horizontal mount)10" Del Seal CF Flange (vertical mount)6" Del Seal CF Flange (horizontal mount)3KW Mini Sweep ControllerPower SupplyPower Supply (spare parts kit)Filament (pack of 5)AnodeBeam FormerBeam former InsulatorHigh Voltage InsulatorEmitter Rebuild Kit 1 (Mighty Source)Crucible Seal Rebuild Kit (Mighty Source)Gasket (1/8” VCRFilament Clamp Sleeve*MS indicates Mighty Source Ref# EV-MS* (Mighty Source )Ref# EV-MS-F275-HRef# EV-MS-F1000Ref# EV-MS-F600HRef# Sweep-MSEV-PS-CE-3000EV-PS-SPK-3000EV-FIL-3000EV-A-3000EV-BF-3000EV-IBF-3000EV-IHF-3000Ref# ERK-MSRef# CSRK-MSCajon Fitting GasketFil Clamp Sleeve-MS1includes 2 filaments, high voltage insulator, beam form, fasteners993400993450993431993430991374991221991257-03992610991929991922990529991921993410993439042064993415550067501105010250149514500306019515571252507.50335123456789Figure 4Figure 6Figure 5Figure 7Figure 8Figure 916 Phone 800-443-8817 www.mdcvacuum.com MDC Vacuum Products Corporation
e-Vap ®Modular Evaporation SourcesIndividual SourceMDC modular e-Vap ® sources are state-of-the-art electron-beamevaporation sources designed for the demanding and exacting worldof vacuum coatings. This unprecedented selection of electron-beamevaporation sources provides vacuum coating solutions for mostapplications including medical, metallurgical, telecommunications,micro-electronics and optics.Modular sources are offered in six standard frame sizes and are standalone components for maximum installation flexibility in existing vacuumsystems. For those desiring standard off-the-shelf solutions,complete horizontal and vertical flange mounted systems are alsoavailable. For a detailed presentation of horizontal and vertical turnkeycoating systems please refer to products beginning on page.Modular sources are fitted with direct watercooled crucibles. Selectmodels have indirectly cooled crucibles that allow the user to changecrucibles without interrupting the flow of water to the source andwithout having to disassemble the source. Modular sources areoffered with material capacities from 6cc to 400cc in a multitude ofpocket geometries and arrangements. They are available in bothfixed and rotary pocket mechanisms for high and ultrahigh vacuumenvironments. e-Vap ® modular sources are designed for optimumperformance with e-Vap ® power supplies, controls and electronics.Other essential components and hardware required for the installationof e-Vap ® modular sources are detailed starting on page.Contact the MDC technical sales engineers for custom electronbeamevaporation requirements.FeaturesFilament Assembly■ Filament is shielded from ion bombardment■ No shorting■ Longer filament life■ Reduced coating of ceramic insulators■ Reduced arcingEmitter Assembly■ 270° arc emitter module■ Heat sunk emitter■ Consistent electrostatic field■ Longer life anode and beam former■ Reduced filament distortion■ Modular plug-in emitter design■ Simple maintenance■ Simple filament replacement■ Minimal adjustment...only requires verification of filament toleranceOpen Cathode Design■ No space charging■ Increased emission■ Cooler operating filament...requires only 42 amps for 15 kWShielded High Voltage Ceramics■ Reduces coating of ceramic insulators■ Prevents arcing■ Unique high voltage insulator design...no screws to reduce dielectric breakdownBeam Sweep Coil Assembly■ Helmholtz design principle produces a uniformmagnetic field■ No tunneling■ Beam maintains constant density and shapewhen swept across crucibleMagnet Assembly■ Permanent magnets■ 270° arc beam deflection...with positive beam containment■ Reliable beam positioning■ No pole pieces■ Efficient magnetic field generation■ Beam travels vertically through crucibleCrucible Module / Replaceable Modules■ Capacity from 6cc to 400cc■ Complete flush-top design■ No condensate build up■ No contamination from flaking condensate■ Complete utilization of vapor cone during deposition...no shadowing■ Reduced cross-contamination during changes ofevaporant materialThin Film DepositionMDC Vacuum Products Corporation www.mdcvacuum.com Phone 800-443-881717
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High & Ultrahigh Vacuum Thin Film Deposition Technology

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