High & Ultrahigh Vacuum Thin Film Deposition Technology

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e-Vap ®Miniature Evaporation SystemsMODULAR SOURCE SERIESFeaturesThin Film DepositionDescriptione-Vap ® Mighty Source 4 Pocket Evaporation SourcePractical, low-cost, and highly reliable electron beam depositionsources are the future as we know it today. MDC introduces the e-Vap ® “Mighty Source ”– a 4 pocket x 2cc rotary electron beamsource. Affordable and extremely compact, it stands just 2.4-inchestall by 4-inches long by 2.8-inches wide. Is there anything smallerout there? The Mighty Source is rated for 3 kilowatts of powerwhich makes it an ideal deposition tool for evaporating metals,oxides, metal-oxides, and magnetic materials. Designed into thesource body are two hermetically-sealed XY-axis sweep coils thatallow you to sweep the electron beam across the crucible pocket,resulting in the maximization of your coating process in terms ofmaterial stability and consistency. The Mighty Source design isspecifically tailored for the following uses – pilot production,lab/R&D applications, and the university marketplace. Its compactdesign features allow it to be mounted onto a 2-3/4-inch Del-SealCF flange or onto a 6-inch or 10-inch Del-Seal CF flange in eitherhorizontal or vertical configurations. To complete this product system,MDC also offers a 3kw power supply and low cost XY sweepcontroller.Specifications■ Ideal for evaporating metals, oxides, magneticmaterials and dielectrics■ Ideal for universities, lab/R&D, pilot productionusers■ Applications include metallization, MBE, nanotechnology,optics, microscopy and thin filmheads■ Rated for 3000 Watts of deposition power■ Four pocket x 2cc rotating crucible■ Ultra small footprint – total size is 2.4" H x 4.1" Lx 2.8" W■ A contained permanent magnet design producesa very small, highly dense beam spot■ XY sweep coils are included■ Crucible drive can be driven from any position –left, right, down, even angled■ Stand-alone, flange-mounted or turn-key assembliesare standard offerings■ Flange-mounts are installed on a 2.75-inch Del-Seal CF flange■ Turnkey assemblies are installed onto a 6-inchand 10 inch Del-Seal CF flange and include shutterand all electrical, water, and mechanicalfeedthroughs –ready to operate■ See the MDC web site for actual deposition ratedata on up to 27 different materials as well asdownloadable layout, e-drawings for the DesignEngineerMaximum Power3000 wattsOperating Voltage5000 voltsBeam Current600 milli-amperesCompatible Vacuum2 x 10E-8 torrWater Flow65 psi or .62 gpmXY Sweep Frequency0 – 50Hz, 1.0 ampsBeam Spot Size3-4 mmCrucible MaterialOFE copperBakeout Temperature150 o CCrucible Geometry 2.0 cc volume crucibles x 4Weight6 lbsDimensions2.4" H x 4.1" L x 2.8” W4 inchese-Vap ® Mighty Source Horizontal Source Assembly (6-inch CF flange)14 Phone 800-443-8817 www.mdcvacuum.com MDC Vacuum Products Corporation
e-Vap ®Miniature Evaporation SystemsMODULAR SOURCE SERIESe-Vap ® Mini Sweep ControllerFlange Mounted AssembliesDeposition Rate Tablee-Vap ® 3kW Power Supply■ Complete turnkey assemblies -plug ‘n play■ Horizontal assembly is supplied on a 6" flange■ Vertical assembly is supplied on a 10" flange■ Water-cooled roofs are available as an option■ Different flange sizes are available upon request■ Physical dimensions are available atwww.mdcvacuum.com/3kw.htmor call 1-800-443-8817 for further detailsDeposition Rate vs PowerDepositin rate vs PowerDeposition Rate (Å/sec25.020.015.010.05.0Deposition Rate vs. Emission CurrentNo Crucible Liners Used*AlTa 2 O 5TiCoGe0.00 100 200 300 400 500 600Emission Current (mA)Accelerating Voltage of 5.25 kVAll rates measured on a Crystal Rate Monitor at 10 inch crucible to sensor distance.*Indicates “with” crucible linerMoAlMATERIALAl*AlAl2O3AgCoCrCuGeHfHfO2InITOMoMgF2NbNiPdSiSi02TaTa 2O5TiTiO2WYZnSZnSeZrO2*with crucible linerSWEEP USEDYES OR NONoNoYesNoNoYesNoNoYesYesNoYesNoYesNoNoNoYesYesNoYesNoYesNoNoYesYesYesEMISSIONCURRENT (MA)500100100150200505003002501502002050010500300100300405001503001505001503010200DEPOSITION RATE(Å/SEC)4.528.08.013.09.013.02.23.07.09.018.010.08.57.01.03.050.01.025.08.07.020.07.58.040.010.040.010.0Thin Film DepositionMDC Vacuum Products Corporation www.mdcvacuum.com Phone 800-443-881715
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High & Ultrahigh Vacuum Thin Film Deposition Technology

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